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2009 Elsevier XRD Microlaue
2009 Elsevier XRD Microlaue
available at www.sciencedirect.com
www.elsevier.com/locate/matchar
Tutorial review
Article history: MicroLaue diffraction combines the oldest x-ray diffraction method–Laue diffraction–with the
Received 1 May 2009 most modern x-ray sources, optics and detectors. The combination can resolve complex
Received in revised form materials into single-crystal-like submicron volumes. This unique ability to nondestructively
6 July 2009 map crystal structure at and below a sample surface, with high spatial and strain resolution
Accepted 21 July 2009 can address long-standing fundamental issues in materials science. For example, the three-
dimensional evolution of mesoscale structure and the self organization of defects can be
Keywords: observed nondestructively to understand the origins of inhomogeneous grain growth,
X-ray deformation and fracture.
Microbeam © 2009 Elsevier Inc. All rights reserved.
Laue
Diffraction
Deformation
Grain growth
Fracture
⁎ Corresponding author.
E-mail address: IceGE@ornl.gov (G.E. Ice).
1044-5803/$ – see front matter © 2009 Elsevier Inc. All rights reserved.
doi:10.1016/j.matchar.2009.07.006
1192 M A TE RI A L S C H A RAC TE RI ZA T ION 6 0 ( 2 00 9 ) 1 1 9 1– 1 2 0 1
x-ray microdiffraction efforts predate the widespread avail- identical instrumentation philosophy to 34-ID-E–came on line
ability of synchrotron radiation and continue. For example, in 1999. Early results from beamline 7-ID and station 34-ID-E at
electron-backscattering diffraction (EBSD) is now a critical tool the APS, as well as the results from 7.3.3 at the ALS justified
in materials science [3], and provides a rapid method of ana- the optimism of the early supporters with unexpected
lyzing surface crystal structures which can be extended to 3D observations of deformation in electronic interconnects [21]
analysis by systematically removing surface layers [4,5]. In and with a conclusive picture of grain growth mechanisms in
addition, heroic laboratory experiments with x-ray microdif- high-temperature superconductor (RABiTS) films [22].
fraction predate synchrotron sources and continue to inspire Based on these and a growing number of exciting results,
and provide important information about materials [6–11]. microLaue instruments have now been commissioned at the
Within this context, microLaue diffraction provides unprece- Pohang Synchrotron [23], the Swiss Light Source (X05LA) [24],
dented flexibility to study complicated 3D crystal structures and the Canadian Light Source (VESPERS) [25] with other in-
nondestructively, with little sample preparation, and with Q struments planned for the Australian Light Source [26], SOLEIL
resolution only possible in special cases with electron diffrac- [27], PETRA III and elsewhere. In addition, in 2007 the Ad-
tion methods. vanced Light Source moved microLaue experiments to a new
A major milestones toward modern microLaue diffraction more powerful beamline 12.3.2 [28].
was a spatially-resolved Laue measurement on a white beam
topography line at the National Synchrotron Light Source
circa 1987 [12]. Using a 25 μm-Ø laser-drilled pinhole in Pt, 2. Underlying Physics of MicroLaue Diffraction
Rebonato et al. [12] mapped changes in the elastic strain
distribution near a single-crystal Mo notch during a tensile 2.1. Laue Diffraction from Perfect Crystals
experiment. This demonstration experiment used a simple
knife-edge to localize the Laue spots and a solid-state detector to As Laue guessed in 1912, the atomic lattice in crystals creates
determine spot energy. Even this early approach demonstrated constructive and destructive interferences in the scattering of
the ability of microLaue measurements to precisely determine x-rays from the crystal atoms. It is well known, for example
changes in local lattice parameters and to relate elastic strain that a monochromatic x-ray beam of wavelength λ efficiently
maps to the local boundary conditions. Also, while similar to reflects off crystal planes with spacing d, when the crystal is
lab-based experiments by Weismann and co-workers [6–8], the rotated to satisfy the Bragg condition:
measurements were made with 100× smaller beams.
2dsinh = nk: ð1Þ
Around 1990 these and related results came to the attention
of Walter Brown at Bell Laboratories who invited Gene Ice to Here θ is the angle between the incident beam and a real-
discuss how such techniques might be adapted to study elastic space set of parallel atomic planes defined by the crystal
strains in microelectronic interconnects. At the time, elastic lattice. Here we note that the real space planes are defined as
strains were known to influence interconnect reliability, but no described below according to the real-space lattice, but do not
direct measurements were possible because actual intercon- necessarily intersect real atoms. Efficient scattering results
nect material was buried under an oxide passivation layer. from constructive interference of the weak scattering from
From their discussions a complete picture emerged that in- thousands of atomic planes within the crystal. What is often
cluded the essential elements needed to efficiently map elastic less appreciated is that between the conditions for efficient
strains in thin films: (1) achromatic microfocusing optics, (2) an scattering, the crystal lattice causes destructive interferences
efficient area detector; (3) a precision sample stage; and (4) an and scattering away from the Bragg condition is typically
insertable monochromator to characterize the energy of one or weaker than from an amorphous sample with the same atoms.
a few Laue spots. This basic suite of instrumentation was later Indeed for good crystals, the chance of satisfying the Bragg
realized in a demonstration project on the MHATT-Cat beam- condition with an arbitrary crystal orientation and a mono-
line 7-ID at the Advanced Photon Source (1998) and later on chromatic beam is small.
the dedicated APS station 34-ID-E (2000). Resolution in the The beauty of Laue diffraction is the automatic selection of
third dimension was added through an insight by Bennett those monochromatic wavelengths from continuous spectra
Larson [13]. Larson et al. adapted beam profiling techniques that satisfy the Bragg condition and the reflection of those
used to measure the incident beam size and diffracted beam wavelengths into angles that are determined by the shape and
ray tracing techniques under development by Stewart Stock orientation of the unit cell. The ability to determine crystal
and others to create a simple but powerful way to localize Laue orientation quickly and with minimum sample preparation
diffraction along the incident x-ray beam. This technique was continues to make Laue diffraction a useful tool even today.
called differential aperture microscopy [13]. Schematically the main elements of Laue diffraction can be
Of course during this period of time parallel and related understood with a generalized Ewald Sphere construction. As
efforts were underway around the world. Early microdiffrac- illustrated in Fig. 1, constructive interference for a real space
tion experiments at Daresbury [14], the Photon Factory [15,16], lattice occurs under specific conditions related to the x-ray
the NSLS [17,18], and the ESRF [19,20] demonstrated the wavelength and to the crystal orientation with respect to the
importance of localized x-ray diffraction information from incident beam. For more details see for example reference [29]
materials. At the ALS, experiments aimed at a microLaue or any general text on x-ray diffraction. The three dimensional
capability began around 1997 with a proof-of-principle experi- orientation/wavelength conditions set up a reciprocal space
ment in 1998. The microLaue station 7.3.3 at the ALS lattice and if the momentum transfer, kf–ki, for a scattering
championed by Howard Padmore and J. Patel–with a virtually direction intersects a reciprocal lattice point, then the crystal
M A TE RI A L S C H A RAC TE RI ZA T ION 6 0 ( 2 00 9 ) 1 1 9 1–1 2 0 1 1193
Yr +j
Y
n hkl = Yhkl : ð2Þ
j rhkl + jj
patterns can be used to determine information about the local changes within the volume probed (strain gradients), then the
elastic strain (stress) and the local dislocation content. This angular distortions are not uniform and the reflections must
formalism is based on Fig. 1, which shows that in a Laue ex- be blurred. A strain tensor gradient can therefore cause blurring
periment, each pixel intensity at the 2-D detector records a and streaking of the Bragg peaks. In general, the strain tensor
radial line integral through reciprocal space weighted by the (either deviatoric or total) at each point inside a sample can
incident beam spectra. therefore be determined by 3D spatially resolved microLaue
diffraction. Strain gradients can then be calculated by differ-
2.2. Laue Diffraction from Imperfect Crystals ential geometry. There is however another very common
cause of Laue spot streaking: dislocations.
2.2.1. Elastic Strain
Elastic stress is one of the key driving forces for mesoscale 2.2.2. Dislocations and MicroLaue Patterns
materials evolution and single crystal strain can be used as a In many materials, Laue streaking due to unpaired disloca-
monitor of stress through the compliance matrix [32]. Ul- tions is common and dominates over the influence of elastic
timately local elastic stress can be determined by deviations strain gradients. Dislocations are line defects that interrupt
from the unstrained unit cell parameters of subgrain crystal the periodicity of the crystal lattice and introduce long-range
volumes. Methods for determining the unit cell parameters rotations between sections of the crystal lattice. The rotation
from monochromatic automated diffractometer experiments axis depends on the kind of dislocation. The size of the mea-
on single crystals have been famously derived by Busing and sured rotations depends on the density of unpaired or geo-
Levy [33]. Their formalism finds that 3 linearly independent metrically necessary dislocations and on the volume sampled.
reflections determine the 3 parameters required for crystal- Because the character of Laue pattern streaking changes with
lographic orientation and the 6 parameters of the unit cell: a, dislocation type (Fig. 3) and because the commonly activated
b, c, α, β, γ. Following a similar formalism, Chung and Ice [30] dislocations are known for most materials, 3D spatially-
show that four Laue reflections (λ unknown) determine the resolved blurring of Laue patterns can be fitted to models to
3 crystallographic orientation parameters and the unit cell evaluate the most likely slip systems in a local volume [34–36].
shape: a/c, b/c, α, β, γ. Once the unit cell shape is known, the In principle, it is also possible to derive information about the
unit cell parameters can be determined with the additional total dislocation density by observing longitudinal blurring of
information of the energy of one reflection. The components the Laue reflections [34–36]. However these are much more
of the second-rank elastic strain tensor, εij, (deviatoric or full) difficult experiments and have not yet been attempted. In real
can be determined from the transformation matrix T that materials, inhomogeneities in dislocation density and elastic
maps unstrained to strained vectors, [30] stresses are interrelated, and can arise either because of the
geometry of loading or because of inhomogeneous deforma-
eij = Tij + Tji =2 Iij where Ameas = TA0 : ð3Þ tion in the materials.
Although modeling can lead to insights into the activated
It is important to note that although elastic strain distorts dislocations, there are assumptions involved because real
the angles between reflections, with a constant strain tensor materials have a complex distribution of various dislocation
throughout the sampled volume, the sharpness of the Bragg kinds. However, microLaue diffraction can unambiguously de-
spots will not be changed. However, if the elastic strain tensor termine the local Nye (dislocation) tensor and can even
Fig. 3 – Various dislocation types have distinct effects on the observed Laue diffraction pattern. Here we compare modeled
streaking of three of 12 most likely slip systems in an FCC alloy with experimental measurement of an Ir weld.
M A TE RI A L S C H A RAC TE RI ZA T ION 6 0 ( 2 00 9 ) 1 1 9 1–1 2 0 1 1195
determine this in the presence of an elastic strain gradient. Kirkpatrick–Baez Mirrors) that focus either monochromatic or
This capability has been demonstrated in a series of beautiful polychromatic beams to the same spot, (4) the sample with a
experiments by Larson, El-Azab et al., [31] and is of great precision 3D stage to position the sample; (5) an absorbing wire
importance because of the central role the Nye tensor plays in that can run through the diffraction pattern to resolve the Laue
emerging theories of size-dependent plasticity. Formally, the diffraction from along the penetrating beam path; and (6) an
Nye tensor αij, is determined by measurements of local lattice x-ray sensitive area detector.
curvature κ and elastic strain tensor gradients. The experiments are typically run at a nominal 2θ scat-
tering angle of 90°, although other options are possible. This
aij = jji ðjii ÞIij eijk Ak elj : ð4Þ
choice of scattering angles has two advantages: (1) the depth
The curvature tensor κ and the elastic strain gradient sampled by the x-rays is maximized at 90°, and (2) the spatial
components can be determined by mapping the local crystal- resolution along the incident x-ray beam from differential
lographic orientation and elastic strain in three dimensions. aperture microscopy is best at 90°. One disadvantage of work-
As mentioned above, the development of strain gradient ing at 90° is the lower reflectivity of high-energy reflections
plasticity theories [37,38] represent an effort to bridge the gap and a transmission geometry is used at the SLS [24].
between classical plasticity and dislocation theory and to ac- In a typical experiment the sample is mounted on the
count for size-dependent plasticity. Considering different mod- sample stage, and positioned so its surface intersects the beam
els of geometrically necessary dislocations of constant density, near the focus of the nondispersive focusing optics. The initial
GNDs, Gao [38] related effective strain gradient η to the density sample positioning is done using either a laser position
of GNDs, n+. In many cases plastic strain and dislocation den- monitor or a long-distance microscope. After the sample is
sity heterogeneity within the crystal lattice can precipitate the positioned, a polychromatic Laue pattern is collected with the
organization of defects and the presence of local lattice rotations x-ray sensitive area detector. The pattern is indexed with an
changes the diffraction conditions and causes redistribution of automated indexing program using the known unit cell
intensity of each Laue spot. In this way, Laue images collected parameters of the undeformed material. Once the index of
using synchrotron x-ray microbeams are sensitive to the hier- the reflections is determined, then the energies of the reflec-
archical distribution of dislocations. tions can be estimated. At this point the experimental ap-
proach depends on the kind of sample that is being studied
and the kind of information that is required. The white beam
measurements inherently provide the deviatoric stain tensor
3. Implementation of Polychromatic
which is sensitive to geometrical distortions of the unit cell
Microdiffraction
shape but not to hydrostatic strain. If deviatoric strain is
sufficient, then the sample can be mapped in two dimensions
Although Laue diffraction is inherently a rather simple char-
by simply moving the sample under the focused beam. If three-
acterization method, the extension to submicron-spatial resolu-
dimensional information is required, then at each position of
tion with <0.01° angular resolution requires special equipment
the sample, the wire is moved through the diffraction pattern
and techniques. This is particularly true for mapping local
(wire scan) and the shadow of the wire on the diffraction
crystal structure and defects in 3D. A schematic of the geometry
pattern is used to triangulate backward the measured intensity
for a generic polychromatic microdiffraction experiment is
at the detector. This “differential aperture microscopy meth-
shown in Fig. 4. The experiment has six key elements: (1) the
od” determines the local Laue pattern generated at each sub-
intense source, (2) a nondispersive monochromator that can
grain volume along the incident beam.
be inserted into or out of the polychromatic x-ray beam to pass
For even more detailed information, scanning energy
either a polychromatic or a tunable monochromatic beam on-
methods can be used to determine the absolute strain tensor.
to the sample, (3) a nondispersive focusing system (typically
For example, if the energy of even one Laue reflection is de-
termined, then the deviatoric strain tensor can be set on an
absolute scale and the full strain tensor is determined. Nat-
urally in order to make such measurements, both wire scans
and monochromator energy scans are needed in addition
to two-dimensional samples scans. These measurements are
therefore very time consuming and even with the fastest area
detectors can only be used over restricted 3D volumes.
Fig. 4 – A generic polychromatic microdiffraction system has MicroLaue diffraction has widespread applicability both to stud-
six key elements: (1) a brilliant polychromatic x-ray source; ies of fundamental materials physics and to applied studies of
(2) a nondispersive monochromator that can be moved into or specific materials systems. For example, microLaue diffraction
out of the beam; (3) achromatic focusing optics; (4) a precision has been used to understand unanticipated deformation pro-
sample stage; (5) an x-ray absorbing wire; and (6) an x-ray cesses in electronic interconnect materials during electromi-
sensitive area detector. gration [21]. Other examples include fundamental studies of
1196 M A TE RI A L S C H A RAC TE RI ZA T ION 6 0 ( 2 00 9 ) 1 1 9 1– 1 2 0 1
dislocation patterning in Cu single crystals [39] that allow direct the Laue streaks at various depths of the samples. Fig. 5b
comparison to plasticity simulations; studies of 3D grain growth shows a small region of the Laue pattern, corresponding to the
mechanisms that test the impact of grain boundary curva- boxed region in Fig. 5a. In the near-surface region only one set
ture and defect refinement [40]; measurements of elastic stain of very-long streaks is present which is replaced by a second
distributions in anomalous Sn grain growth leading to Sn set of streaks about 12–15 μm below the surface. Each set of
whiskers in Pb-free solders [41]; and measurements of hetero- streaks is related to a certain (predominant) dislocation den-
epitaxial grain growth on surfaces with specific implications of sity tensor and indicates that at least two regions with dif-
high-temperature superconductor films on textured substrates ferent slip systems and different strain gradient direction are
[22]. In general the unique power of polychromatic microdif- present in the probed volume [43].
fraction is to observe 3D crystal structures nondestructively The streak profiles were used to determine the orientation of
and with sufficient spatial and angular resolution as to test eigenvectors and eigenvalues of the dislocation density tensor
theories of mesoscale evolution driven by inhomogeneous from the streaks profiles of the experimental Laue pattern at
strain, plasticity, or defect distributions. We describe below each region. The predominant slip systems corresponding to
four experiments that illustrate the how microLaue and related the dislocation density tensor were determined by least square
methods can contribute to our understanding of inhomoge- fitting. To understand the shape of the experimental Laue
neous deformation and elastic strain distributions. We proceed images and to check the sensitivity of the Laue image to
from polycrystal samples with complicated grain boundary different possible slip systems, Laue patterns were simulated
networks to bi-crystals and ultimately to single crystal samples. with different slip systems. As Ni is face-centered cubic, slip
As the starting complexity of the sample decreases, in many systems comprised of dislocation movements with the distor-
ways the sophistication of theory must increase to account for tion direction, Burger's vector b // h110i and corresponding glide
more subtle processes that break sample symmetry. planes [111], and dislocation lines ξ // h112i are considered.
Assuming only one set of slip system is activated in the
4.1. Subgrain Rotations Near the Free surface of near surface region, the direction of the slip system is deter-
Polycrystalline Materials mined to be b // [011 ] and ξ // [21 1]. A change in the slip
direction was observed at around 15 μm where splitting of the
An example of unexpected complexity in local subgrain lattice streaks were noted as illustrated in Fig. 5. The split indicates
rotations during deformation, is a uni-axial tension experi- that more than one slip system was activated. It is not possible
ment by Pang et al. that followed local lattice rotations near the to determine the exact number of activated slip systems from
surface of a polycrystalline Ni sample [42]. This nondestructive the experiment. Instead the minimum number of slip systems
microLaue study provides new insights into mesoscale defor- required to explain the observed Laue patterns was assumed.
mation inhomogeneity in polycrystalline materials. The aver- The best-fit set is a combination of two slip systems: b // [011 ]
age grain size of the Ni sample was ~100 μm. Microbeam-Laue and ξ // [211 ] + b // [01 1] and ξ // [2 11 ]. Comparison between the
diffraction reveals pronounced Laue streaking after 15% strain simulated and experimental images is shown in Fig. 6. The
(Fig. 5a). The plastic response of the material in each grain can addition of one more slip systems at 15 μm is consistent with
be explained by the formation of a cell wall structure to relax the argument that restrictions in the bulk may require more
the stress field induced during pulling. dislocation activities to achieve rotation.
After deformation, depth-resolved Laue images were con-
structed below the free surface of a single Ni grain with the 4.2. Grain Boundary Effects on Local Dislocation Density
grain surface normal almost parallel to [2 33] and with loading
direction approximately in [11 2] direction. Distinct streaking Grain deformation is strongly influenced by the crystallographic
of the Laue spots is observed to ~25 μm below the sample orientations of the grain and by the orientation of neighbor
surface. The depth-integrated Laue image is given in Fig. 5a. grains, which influences the grain boundary type. Inhomoge-
The depth-resolved Laue images identify the contribution of neous deformation is anticipated at grain boundaries because of
strain incompatibility of neighbor grains, and because the grain
Fig. 10 – Orientation map of crystal axis <100> for deformed Cu samples with <321> (top) and <100> (bottom) parallel to the
loading axis.
M A TE RI A L S C H A RAC TE RI ZA T ION 6 0 ( 2 00 9 ) 1 1 9 1–1 2 0 1 1199
5. Future Directions
Despite major progress over the last decade, microLaue dif- Fig. 13 – Variation of the austenite lattice parameter with
fraction is rapidly evolving with significant improvements depth.
1200 M A TE RI A L S C H A RAC TE RI ZA T ION 6 0 ( 2 00 9 ) 1 1 9 1– 1 2 0 1
routine the collection of 3D submicron-resolved diffraction [12] Rebonato R, Ice GE, Habenschuss A, Bilello JC. High-resolution
information. microdiffraction study of notch-tip deformation in mo
single-crystals using x-ray synchrotron radiation. Philos Mag
Beyond instrumentation, the software currently in use to
A Phys Condens Matter Struct Defects Mech Prop 1989;60
collect and analyze microLaue data is still in its infancy. As (5):571–83.
the field grows, there is increased demand for user friendly [13] Larson BC, Yang W, Ice GE, Budai JD, Tischler JZ.
software and for data analysis in real time to maximize the Three-dimensional X-ray structural microscopy with
experimental productivity of the precious microLaue instru- submicrometre resolution. Nature 2002;415(6874):887–90.
ments. International collaborations are underway to standar- [14] Bhat HL, Klapper H, Roberts KJ. Slit-collimated Laue
dize and accelerate approaches for reconstruction of Laue diffraction using synchrotron radiation: an
examination of the paraelectric-to-ferroelectric phase
patterns in depth, peak searching, indexing, structure deter-
transformation in ammonium sulfate. J Appl Crystallogr
mination and other critical analysis steps. 1995;28:827–9.
Finally, as sample features become increasingly small, [15] Hirano T, Higashi F, Usami K. X-ray microdiffractometer using
coherent effects will play an ever larger role in the observed synchrotron radiation. Rev Sci Instrum 1992;63(12):5602–6.
patterns. The use of wide-bandpass and energy-tunable beams [16] Takanishi Y, Iida A, Ishikawa K, Takezoe H, Fukuda A.
opens up new opportunities for studying ultra-small features Spontaneous layer twist in a stripe texture of chiral
ferroelectric smectics observed by synchrotron X-ray
below the diffraction limit of achromatic optics. More details
microdiffraction. Jpn J Appl Phys 1996;35(2A):683–7.
about future directions in coherent scattering, small beams, fast
[17] Mooney PM, Jordan-Sweet JL, Noyan IC, Kaldor SK, Wang PC.
detectors and new software can be found in references [55] and Observation of local tilted regions in strain-relaxed SiGe/Si
[56]. buffer layers using x-ray microdiffraction. Appl Phys Lett
1999;74(5):726–8.
[18] Noyan IC, Jordan-Sweet J, Liniger EG, Kaldor SK.
Characterization of substrate/thin-film interfaces with x-ray
Acknowledgements
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[19] Riekel C, Bosecke P, Delrio MS. 2 high brillance beam lines
This research is supported by the Division of Materials Science at the ESRF dedicated to microdiffraction, biological
and Engineering, Office of Basic Energy Science, U.S. Department crystallography, and small-angle scattering (invited). Rev Sci
of Energy. Research is in part on beamline 34-ID-E which is funded Instrum 1992;63(1):974–81.
by the Office of Basic Energy Science, U.S. Department of Energy. [20] Wenk HR, Heidelbach F, Chateigner D, Zontone F. Laue
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