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State of The Theory of Vacuum Arcs
State of The Theory of Vacuum Arcs
Invited Paper
Fig. 5. Schematic presentation of the current continuity in the case of a B. Mass Flow and Cathode Erosion Rate
mercury cathode: plasma cathode and double sheath model.
Usually, the erosion rate was obtained by calculating the
volume of the cathode in the liquid state and assuming that
[59]. The arc current at the cathode surface is closed by ion flux all of this material is removed [2], [62], or by calculating the
from the adjacent cathode plasma. evaporation rate [33], [47], [51] when the spot temperature
Film Cathode: In order to understand the spot mechanism is known by the Dushman formula [63]. In both cases, the
on thin-film cathodes, the modified GDM was solved [60] using calculated values depend on the type of heat source (Joule or
the experimental dependence between the film erosion rate and ion bombardment), which is a given parameter. However, the
track size in the form . It is assumed that the spot Dushman evaporation rates [63] are correct only in vacuum,
moves when the underlying film is evaporated [2]. The equation while in the arc cathode spot region the pressure is very large
of heat conduction for thin films in the cathode energy balance [40], [43]–[46], [54]–[56]. Presenting this case, the calculation
was taken in account. The calculation for different film thick- of cathode mass flow should be based on a kinetic treatment of
ness is presented in [56] and [60]. The calculations show that atomic evaporation, as considered by Moizhes et al. [64] and
the spot diameter is approximately equal to the observed track Beilis [65]–[67].
width and that energy loss by film heat conduction (with an ef- Moizhes et al. considered the near-cathode Knudsen layer,
fective voltage for heating of 1 V–2 V) is smaller than in bulk taking into account the electron momentum while neglecting the
cathodes (6 V–7 V [56], [61]). This result and the small spot electric field force in the plasma-flow momentum equation. The
size for thin-film cathodes ( m), indicates that the spot cathode mass loss was calculated by assuming a sonic plasma
operation on the thin-film cathode is different than on the bulk velocity on the external boundary of the Knudsen layer, similar
cathode, due to different heat loss and spot motion mechanisms to the same assumption made by using the Dushman formula
(see below). [63].
Comparison of the Explosive and Evaporating Models: The Beilis [65] considered a kinetic model (KM) with two atomic
last formulation of the ECM uses the equations of electron emis- fluxes near the cathode surface in the Knudsen layer (see Fig. 6),
sion, cathode heating and electric field at the cathode-sheath consisting of evaporated atoms flowing from the electrode and
boundary that were used in the GDM and in previous models of a return flux of electrons, ions, and atoms that is formed in the
cathode evaporation processes [2], [43], [45], [55]. The finite sheath and nonequilibrium plasma layers. The difference be-
lifetime of the EC could explain the nonstationary spot function tween these fluxes determines the plasma density and velocity
during the arc operation. However, the assumption about the and, therefore, the cathode mass erosion in the vapor phase. This
relatively small size of the EC only allows a solution for high analysis used a bimodal velocity distribution function [68]. The
values of spot current density ( 10 A/cm ). According to the calculation according to the KM shows that the evaporated atom
experiments [34]–[36], [38] the explosion of the microprotru- flux is comparable with the return heavy particle (atom and ion)
BEILIS: STATE OF THE THEORY OF VACUUM ARCS 661
Fig. 8. Dependence of the cathode erosion rate versus the spot current. The
calculated values is marked by Gt, The measured values, marked by Ge, are
taken from [5] for an Al cathode and from [10] for Cu a cathode.
flux. It was obtained that during the spot operation the plasma
velocity must be smaller than the sound velocity and, therefore,
the plasma flow in the Knudsen layer is not free. The nonfree
plasma flow in the near-cathode region is one of the conditions
Fig. 9. Dependence of the calculated CPD versus spot current for Al and Cu
for the self-consistent cathode spot mechanism. when the cathode is at room temperature (300 K) and heated (1500 K).
The calculation of plasma parameters according to the KM is
presented in [56], [66], and [67] The heavy particle density parameters and different condition were used in the various
does not strongly deviate from the saturation value theories. Kesaev [2] tried to estimate CPD from the plasma
[66], while the nonequilibrium plasma velocity at the particle balance and Khvesuk et al. [69] tried by solving
external boundary of the Knudsen layer is one or two orders of the Poisson equation, assuming that the atoms are ionized
magnitude smaller than the sound velocity . The analysis of by cathode-emitted electrons accelerated in the CPD zone.
the kinetic layer indicates that the spot can appear only in the However, this approach is weak because the electron beam
case when the condition is fulfilled, i.e., the plasma contribution in the ionization process is small and the ion
flow in the electron beam relaxation zone is not free. The last generation depends on ionization by thermal electrons in the
condition could occur in the case when a plasma cloud is present plasma [55]. In other calculations [46], [57] of the CPD, the
before spot initiation as shown in the Fig. 7. Therefore, deter- “minimal principle” was used. The weak point of this method
mines the cathode mass loss. The results of the cathode erosion is that the minimal value of the CPD depends on many spot
rate calculation are presented in the Fig. 8, as an illustration. parameters, including the current density, temperature, size,
It may be seen that the calculated and measured [9], [10], [12] lifetime, etc and it difficult to obtain by complicated spot
values agree well. The calculation also shows [65], [66] that the processes [56].
electric field force in the cathode sheath compensates the mo- In general, the CPD depends on the electron momentum and
mentum of plasma electron pressure and they do not affect the energy balances in the sheath. Taking into account the processes
near-cathode plasma flow in Knudsen layer. in the sheath, the CPD was calculated from a KM (Fig. 4) [70].
The electron fluxes from and to the cathode surface were ob-
C. Cathode Arc Characteristics tained by assuming that the kinetics of emission electron flow
Cathode Potential Drop: The theoretical calculation of the is similar to kinetics of atom evaporation. The equation for the
cathode potential drop (CPD) always was problematic in electric sheath together with the equations for the mass flow in
spite of its relatively exact measurement for both bulk and the nonequilibrium Knudsen layer and in the electron relaxation
thin-film cathodes [2], [3]. The calculation is difficult because zone form a closed system of equations for calculating as a
of the CPD multiparametric dependence. Therefore, arbitrary function on the spot current I (see Fig. 9). It may be seen that
662 IEEE TRANSACTIONS ON PLASMA SCIENCE, VOL. 29, NO. 5, OCTOBER 2001
Fig. 11. Model of the dynamics of spot motion on a rough cold clean cathode.
Fig. 10. Calculated thin Cu film CPD U as a function of film thickness.
Fig. 16. Degree of ionization of the Cu anode vapor versus anode erosion rate. Fig. 17. Electron current fraction versus plasma jet velocity in a hot-cathode
vacuum arc (Cr-cathode).
current. For a current of about 1 kA can exceed 0.1. The
electron density and the degree of ionization in the anode spot that the electron current fraction is 10 –10 . Dorodnov
plasma are considerably smaller than in the cathode plasma (in [92], [93] suggests that the discrepancy could be explained if
the case when the current density is the same in the anode and the work function of the cathode material were lowered by
cathode spots), due to the larger electron velocity in comparison approximately 1.5 eV, but offers no explanation about what
with the ion velocity at the plasma-electrode interface. might cause this.
The measured Cu anode spot temperature, 2970 K–3770 K, Nemchinsky [94] and Zektser [95] suggest that current conti-
[89] is mostly within the calculated range quoted above. The nuity can be maintained at the cathode surface by ion flux. Their
calculated electron density is (0.7–2) 10 cm and approach is analogous to the GDM used in explaining cathode
in order of magnitude agrees with the measured values in an
spots on cold cathodes [55], [56] but without consideration of
Al anode spot [84] ( 10 cm ) and in the near anode spot
the cathode energy balance. In addition, they neglected Joule
region for Cu [90] ( 10 cm ). These results illustrate that
heating [94] and nonelastic losses in the electron energy bal-
the anode plasma density is much lower than the plasma den-
ance [95].
sity in the cathode spots ( 10 cm [56]). Furthermore, both
Let us consider the GDM approach [55] in order to study
the measured electron temperature (0.67–0.47 eV for Al [84])
the role of the ion current. We take in account the equation of
and the calculated value are also lower than in the cathode spot
heat conduction for a disk Cr cathode [93], the equation for the
plasma (1–2 eV [56]).
cathode sheath [59], where the plasma electrons are repelled
and the equation for plasma expansion in the cathode jet [72],
IV. HOT ELECTRODE VACUUM ARC
[73]. A calculation with A shows that the electron cur-
The “spotless” arc, i.e., with a “diffuse attachment” of the rent fraction decreases from 0.2 to 10 (see Fig. 17), the arc
plasma to the electrodes has been observed for many years in voltage increases from 11 V to 18 V and the cathode tempera-
low-pressure arcs on refractory cathodes [91]. The transition ture decreases from 2800 K to 2000 K when the jet velocity in-
from an arc with cathode spots to the “spotless” arc is due to creases from to 2 10 cm/s. The calculated values are
electrode heating. Hot cathode and hot anode vacuum arcs rep- in good agreement with the experimental data mentioned above
resent the technological applications of diffuse attachment arcs. and indicate that cathode current continuity in the HCVA can be
supported by ion flux. However the predicted values of the ion
A. Hot Cathode Vacuum Arc (HCVA) density (about 10 –10 cm ) necessary to account for cur-
Two types of the HCVA were observed experimentally: those rent continuity at the cathode surface are below measured the
1) with a hot refractory (nonconsumable) cathode in a noble value of 10 cm [92]. Thus, further investigation, in partic-
gas atmosphere [92] and 2) those with a hot volatile cathode in ular of the plasma density distribution, is necessary for a full
vacuum [93]. In the first case, the arc is stable and there is no understanding of the current continuity problem at the HCVA
significant electrode erosion. In the second case, diffuse attach- cathode surface.
ment to the cathode is obtained with current density in range of Hot Anode Vacuum Arc (HAVA): Two HAVA modes are ob-
10–100 A/cm . For a Cr cathode, the arc voltage was 12–14 V, served when the anode is thermally insulated and heated by the
the cathode temperature was 1900–2200 K, the electron tem- arc current.
perature was 2–4 eV and the electron density was 10 The first mode is observed with anode materials that are more
cm [93]. volatile than the cathode [82], [96]–[99]. The electron tempera-
In both cases, the main theoretical problem is “anomalous ture and density were measured using Langmuir probes at dis-
electron emission” —the contradiction between present ex- tances of up to 24 cm from the anode and found to be in the range
periments at arc current and calculations of the current based of 0.2–1 eV and 10 –10 cm , respectively. The sign of the
on known mechanisms of cathodic electron emission, i.e., anode voltage sheath is important in understanding the anode
explaining current continuity at the plasma-cathode interface. energy balance. Merinov and Petrosov [100], using a combi-
The calculated thermionic emission in the HCVA is between nation of calorimetric and probe methods, measured a positive
factors of 10 to 10 lower than the arc current. This means anode potential at a current of 30 A. The potential crosses zero at
666 IEEE TRANSACTIONS ON PLASMA SCIENCE, VOL. 29, NO. 5, OCTOBER 2001
about 40 A and becomes negative for larger currents. Both the first decreases as the magnetic field increases from zero, then
anode drop and the effective anode heating potential are rela- pass through a minimum value that depends on the arc current
tively constant for currents between 50 and 140 A, having values and then increases slowly (V-shape).
of 4 V and 6 V, respectively. A fundamental issue in the theoretical study of the interelec-
A theoretical description of the HAVA parameters with opera- trode plasma is the variation of the plasma parameters (e.g., den-
tion between disk electrodes was present by Boxman and Gold- sity, temperature) during the plasma expansion and their influ-
smith [101]. The one-dimensional (1-D) model takes into ac- ence on electrode phenomena. The character of the plasma ex-
count the energy balance at the anode surface between plasma pansion depends on the gap configuration. The free-boundary
heating and radiative and evaporative cooling, as well as con- cathode jet expansion was analyzed using a 2-D model for a disk
servation of particles and momentum within the plasma. The cathode and different anode geometries: ring anode [112], disk
discharge parameters were calculated as a function of the cur- anode [113], and small anode [114]. The influence of the radial
rent density from 1 to 10 A/cm . The Cu anode temperature plasma density gradient on the plasma and electrical current ex-
increases from 1350 K to 2500 K and the electron density in- pansion in the jet was investigated. The calculation shows that
creases from 10 to 10 cm , while the electron temperature in the case of relatively small jet current ( A) the plasma
decreases from 1.5 to 0.8 eV. The decrease in electron temper- contracts and the voltage monotonically increases with the axial
ature causes the effective heating potential to drop from 7.3 to magnetic field strength (as observed experimentally [109]), due
6.3 eV, in agreement with measured values mentioned in the to the plasma density and electrical current density increasing
above experimental works. The 1-D model however ignores the near the jet axis.
radial plasma flows and radiation, which are present in labora- The transition region in the V-shaped voltage-magnetic
tory arcs. field characteristic is first explained in [109]–[111] by a
The second mode is encountered when a refractory anode transition between a diffuse arc with one column and an arc
(e.g., graphite or molybdenum) is used. This hot refractory with many parallel cathode-spot columns. The influence of
anode vacuum arc (HRAVA) [102], [103] initially operates as a small magnetic field is connected with voltage decreasing
a conventional cathode spot vacuum arc and deposits cathodic in the diffuse broad column [111]. When a strong magnetic
field is applied, the arc voltage increase is determined by
material on the anode while it is cool. As the anode heats,
the current density growth within the individual arc columns
however, an anodic plasma plume is formed that expands
[111]. Later, the V-shape characteristic was calculated using
radially outside the inter-electrode gap. A steady-state model
a semiquantitative model [115]. However the formulas in
was developed for the plasma in the gap [104], as well as for
[115] were obtained by arbitrary assumption and contain error.
the radial two-dimensional (2-D) plasma flow outside the gap
In particular, the expression for the jet radius was obtained
[105]. The latter model considered the influence of the self
from a simple equation of motion where the momentum of
magnetic field. The calculation showed that the anode effective
plasma motion is balanced only by magnetic field force. In
voltage in the discharge beginning (multispot mode) is about
addition, the condition was used that the radial plasma velocity
12 V and in the steady-state (HRAVA mode) is about 6 V. This
is equal to the axial velocity. The calculation according to a
result indicates the large ion energy in the cathode plasma jet
2-D model [113] shows that the plasma focusing is opposed by
that latter dissipated by radial plasma expansion in the HRAVA the plasma pressure gradient force and the jet radius depends
and, therefore, not collected by the anode. Good agreement on the plasma expansion distance. Schellekens and Schulman
between the calculated anode temperature distribution, anode [116] indicate that the simple model [115] cannot predict the
effective voltage, and electron temperature was found with their transition processes in high-current arc. A calculation of the
measured values. The HRAVA is currently being investigated as high-current arc voltage characteristic in an axial magnetic
a plasma source for producing coatings with a high deposition field using the 2-D model [112], [113] and the interaction of
rate and strongly reduced macroparticle contamination. individual plasma jets is presented in [117].
It should be noted that the interaction of the individual plasma
V. INTERELECTRODE PLASMA jets in high-current arcs determines not only the arc voltage but
also can affect the ion temperature [113] and the radial plasma
Experimental studies of the interelectrode plasma are dis- expansion. The measurements show that the ion velocity in ra-
cussed by Goldsmith [1]. We consider here the inter-electrode dial expanding plasma [110] and the ion energy [118] in high
plasma in an external axial magnetic field. A few aspects are ob- current arcs are considerably smaller than in low-current single
served with arc current increasing and when the axial magnetic jets [4]–[6]. Some theoretical analysis of the arc voltage depen-
field (AMF) is applied: 1) the AMF enhances the ion flux along dence versus the axial jet velocity and electron temperature in
the arc axis and reduces significantly the radial component of the magnetic field is presented in [119]. The calculation shows
the ion flux [106], [107]; 2) constriction of the arc column is re- that the electron temperature in the plasma jet slightly increases
duced relative to the case with no AMF and the arc becomes due to magnetic compression in case of cathode current distri-
diffuse when the arc current is more than a few kA and the bution observed for arc current < 2 kA [18]. The experimental
AMF is sufficiently large [108]; 3) the arc voltage dependence investigation of the ion energy distribution in radially expanding
on the magnetic field strength changes from monotonic for rel- plasma [120] indicates that the plasma velocity could decrease
atively small arc current ( kA) to nonmonotonic for high due to cathode jet interaction with heavy particles emitted from
current arc ( 1 kA) [109]–[111]. In the last case, the voltage the anode and filled the gap. The result of ion energy decrease
BEILIS: STATE OF THE THEORY OF VACUUM ARCS 667
is similar to that obtained in the high-current vacuum arc with by displacement to a new site where the cathode heat losses and
arc current increasing in [118]. cathode voltage are relatively small. This condition occurs at rel-
The interelectrode plasma affects the anode spot initiation. atively small arc currents ( A). As a result the arc voltage
Different models (anode vaporization by the cathode jet inter- fluctuates during spot birth and death. With larger arc currents,
action with the anode [121], cathode jet constriction in an axial when the cathode bulk can be sufficiently heated, the slow group
magnetic field before anode vaporization [122], anode voltage spot appears. Here the plasma flow is impeded by the pressure of
sign change [123], etc.) are present in the literature that is well plasma emitted from adjacent cells of the group spot. The high
reviewed by Miller [82]. In the last decade, the theory of cathode jet velocity is a result of nonequilibrium heating of the plasma
jet interaction with the anode was improved by taking into ac- electrons, which pass their energy to the ions and atoms during
count the current distribution in the anode sheath [113], [124] the plasma jet expansion into vacuum. The strong difference in
and the interaction [125] with the low-energy secondary anode the spot current for film cathodes ( A) and for bulk cath-
plasma particles [126]. odes (2–10 A) for Cu is explained in the framework of GDM
Still the quantitative theory of anode spot initiation in high- by taking in account the difference of the heat losses in these
current vacuum arc is in progress. One of the questions is how cathodes.
the threshold current of anode spot initiation depends on the arc Two principle conditions for current continuity supporting are
current, anode material, anode geometry and gas pressure [83]. established: 1) The nonfree plasma flow in the near-cathode re-
gion; 2) The relatively low cathode heat loss with respect to the
input energy flux.
VI. SUMMARY
In spite of the progress in spot theory, still there is no con-
The vacuum arc operates by high current density and low- sensus about the explanation of the cathode spot mechanism.
level arc voltage. The existence of such discharge operation is New high-speed, high-resolution experiments are required
due to cathode and near-cathode plasma regions with mutual to elucidate the spot dynamics. The latest experimental data
high-intensity and local heating in the cathode spot. There are [20]–[23] indicate that the spot fragments can change within
different approaches for explaining the existence of cathode 50 ns and, therefore, these results are different from obtained
spots. previous [16]. The reason for the difference is discussed in
The EC theory, in which an electron emission micro area ap- [22]. Another question is comparison of the calculated results
pears after the explosion of a microprotrusion at the cathode sur- with experimental data. The different models (EC and GDM)
face, was developed in the last decade. It is based on the calcu- obtain a good agreement between calculated and measured
lation of electron emission and heat conduction. The system of parameters (jet velocity, erosion rate, etc). This fact bring
equations describes the processes at relatively small areas, com- to conclusion that such comparison is not always could be a
parable with electrode surface features and, therefore, results criterion for correctly calculated model in case of cathode spot
in a solution with relative large spot current density. The ECM theory. In first, the model should not consist the contradicting
theory is well applicable to transient discharge phenomena with assumption and results. In second, it should be noted that the
relatively high rates of current rise. spot type is very sensitive to the experimental conditions (e.g.,
In the gas-dynamic theory, the arc spot characteristics are ob- electrode gap geometry, pressure, applied voltage, electrode
tained by study of the mutual processes in the cathode and in surface state, arc current, and arc duration). Therefore, in order
the plasma flow. GDM operates with a mathematically closed to correctly compare with the theory full information about
system of equations and, therefore, the spot radius could be ob- the experimental conditions and complete experimental data
tained with dependence on the arc condition. The following can (plasma and cathode parameters and arc electrical character-
be concluded from the gas-dynamic theory of the cathode spot. istic) should be used. Not only the order of magnitude of a
In contrast to glow discharge in the arc cathode region, the measured parameter should be compared with the calculation,
plasma is highly dense and, therefore, very intense electron but its dependence must be also investigated.
emission energy dissipation occurs. The sheath created at The anode spot theory is sufficiently developed using the
the plasma cathode interface plays an important role in the GDM [87], [88]. The calculation for copper and graphite an-
cathode and plasma energy-transfer processes by accelerating odes leads to an important conclusion about the relatively small
the charged particles. The sheath also controls the current ionization fraction (i.e., it indicates the high level of neutral den-
continuity at the cathode. It has extremely different physical sity) in comparison with the cathode spot plasma in the case of
properties, depending on the cathode material. It acts as a small anode spot current ( A). This result could explain
plasma cathode for Hg and a virtual cathode for W. the relatively large anode erosion rate. In the case of large anode
Nonequilibrium layers take place near the cathode surface spot current ( A), the anode plasma ionization fraction
where the cathode emission particles change their energy, mo- approaches to the value in the cathode spot plasma. In the fu-
mentum, and mass flux. The kinetic processes of heavy particle ture, the anode spot theory should be extended to volatile anode
evaporation and electron emission from the cathode surface de- materials and the sheath structure in different cases should be
termine the cathode erosion rate and the CPD. The spot motion investigated, as was accomplished for the cathode spot.
depends on the cathode heat losses, which determine how the The hot electrode vacuum arc is an excellent plasma source
CPD grows and on the character (impeded or not impeded) of for different plasma technology applications. However, the
the cathode plasma flow. The spot moves because the micro- mechanism of operation of this arc discharge is not completely
protrusion or film is completely evaporated at the bulk cathode, understood. The main theoretical problem is connected with
668 IEEE TRANSACTIONS ON PLASMA SCIENCE, VOL. 29, NO. 5, OCTOBER 2001
an explanation of the current continuity near the hot cathode. [22] , “Nanosecond displacement times of arc cathode spots in vacuum,”
The contradiction between the calculated and measured plasma IEEE Trans. Plasma Sci., vol. 27, pp. 836–844, Aug. 1999.
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energy distribution of high current arcs in vacuum,” IEEE Trans. Plasma Isak I. Beilis (M’97–SM’00) received the M.Sc. de-
Sci., vol. 23, pp. 909–914, Dec. 1995. gree from Moscow Institute for Steel and Alloys, and
[119] I. I. Beilis and M. Keidar, “Theoretical study of plasma expansion and the Ph.D. and Doctor of Science in Physics and Math-
electrical characteristics in the high-current vacuum arc,” in XIXth IS- ematics degrees from the U.S.S.R. Academy of Sci-
DEIV Xi’an, China, 2000, pp. 18–22. ences in 1966, 1973, and 1990, respectively.
[120] I. I. Beilis, R. L. Boxman, S. Goldsmith, and V. L. Paperny, “Radially From 1969 to 1991, he worked in the Institute
expanding plasma parameters in a hot refractory anode arc,” J. Appl. for High Temperatures (IVTAN), Moscow, U.S.S.R.
Phys., vol. 88, no. N11, pp. 6224–6231, 2000. (now Russia), while also holding a position of
[121] J. M. Lafferty, “Triggered vacuum gaps,” Proc. IEEE, vol. 54, pp. 23–32, Visiting Scientist in the Institute of Mechanics of
1966. the Moscow Lomonosov University. Since January
[122] R. L. Boxman, “Magnetic constriction effects in high-current vacuum 1992, he has been with the Faculty of Engineering at Tel Aviv University.
arcs prior to the release anode vapor,” J. Appl. Phys., vol. 48, no. N1, His research interests include electrical discharges in vacuum interrupters,
pp. 2338–2345, 1977. MHD-generators, plasma accelerators, arc cathode and anode spots, vacuum
[123] G. A. Djuzhev, S. M. Shkol’nik, and V. G. Yur’ev, “Anode phenomena arc plasma jet expansion in magnetic fields, plasma-wall transition (sheath and
in the high-current arc,” Sov. Phys. Tech. Phys., pt. I-II, vol. 23, pp. presheath), dusty plasma transport in ducts, macroparticle charging phenomena,
667–677, 1978. and processes in hot electrode arcs. He is co-author of the books “MHD Energy
[124] C. Wieckert and W. Egli, “Theoretical analysis of the current and energy Conversion—Physical and Technical Aspects” (Moscow, U.S.S.R.: Nauka,
flow to the anode in diffuse vacuum arc,” IEEE Trans. Plasma Sci., vol. 1982) and “Handbook of Vacuum Arc Science and Technology” (Park Ridge,
17, pp. 649–652, Oct. 1989. NJ: Noyes, 1995).