Professional Documents
Culture Documents
DT 3
DT 3
DT 3
Project Report
On
“FABRICATION AND TESTING OF
POWER DEVICES - DIODE AND THYRISTOR”
Submitted in Partial Fulfillment towards the Project work of 8th semester of
BACHELOR OF ENGINEERING
IN
ELECTRICAL AND ELECTRONICS ENGINEERING
Submitted By
AYESHA SIDDIQA 4PS20EE005
BHOOMIKA A S 4PS20EE006
DAJIED KYNSAI SUSNGI 4PS20EE009
JEEVAN G R 4PS20EE016
2023-2024
TABLE OF CONTENTS
1. INTRODUCTION......................................................................................... 1
1.1 INTRODUCTION............................................................................................... 2
1.2 LITERATURE SURVEY................................................................................... 5
1.3 OBJECTIVES.......................................................................................................9
2. METHODOLGY......................................................................................... 10
2.1 BLOCK DIAGRAM OF FABRICATION PROCESS...................................... 11
2.1.1 RESISTIVITY MEASUREMENT............................................................12
2.1.2 CRYSTAL ORIENTATION..................................................................... 12
2.1.3 LASER CUTTING.................................................................................... 13
2.1.4 DIFFUSION.............................................................................................. 13
2.1.5 OXIDATION.............................................................................................15
2.1.6 PHOTOLITHOGRAPHY..........................................................................15
2.1.7 UV - EXPOSING...................................................................................... 16
2.1.8 ETCHING..................................................................................................17
2.1.9 PHOSPHROUS DIFFUSION.....................................................................18
2.1.10 ALLOYING............................................................................................ 19
2.1.11 BEVELING............................................................................................. 19
2.1.12 ENCAPSULATION.................................................................................21
6. CONCLUSIONS......................................................................................... 42
6.1 CONCLUSIONS.............................................................................................. 43
6.2 REFERENCES................................................................................................. 44
LIST OF FIGURES