Micro-Nano Manufacturing

(ME557)
By: Dr. Pawan Sharma
Assistant Professor
IIT BHU, Surat

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 Syllabus
 Unit 1:Introduction to Micro- Nano manufacturing: An Introduction, Challenges in Meso Micro and Nano manufacturing, Scope and
Classification Precision Engineering, Micromachining, Micro phenomenon in Electrophotography, Microelectromechanical Systems
(MEMS), Microelectronics, Fabrication Methods Microinstrumentation, Micromechatronics Nanofinishing and Nano and laser
Micromanufacturing.
 Unit 2: Dimensional Metrology for Micro/Mesoscale Manufacturing
 Unit 3: Micromachining: Microturning, Microgrinding. Biomachining—Acidithiobacillus-Genus-Based Metal Removal, Micro- and
Nanomanufacturing by Focused Ion Beam
 Unit 4: Nanofinishing: Magnetorheological and Allied Finishing Processes, Magnetic Abrasive Finishing (MAF), Abrasive Flow
Finishing (AFF) for Micromanufacturing
 Unit 5: Microjoining: Laser Microwelding, Electron Beams for Macro- and Microwelding Applications
 Unit 6: Microforming: Micro- and Nanostructured Surface Development by Nano Plastic Forming and Roller Imprinting,
Microextrusion, Microbending with Laser.
 Unit 7: Micro-casting: allied processes
 Unit 8: Micromolding :A Soft Lithography Technique
 Unit 9: Fabrication of Microelectronic Devices, An Integrated Wafer Surface Evolution Model for Chemical Mechanical Planarization
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(CMP)
Books Recommended
1. “Micromanufacturing Processes” By V.K. Jain, October 15, 2012 by CRC Press.
2. “Introduction to Micromachining” By V.K. Jain, 2011 by Narosa Publication House.
3. “Micromanufacturing and Nanotechnology” by N. P. Mahalik, 2006, Springer Verlog.

Prerequisite for the subject

 Material Science
 Manufacturing Science

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 What is Manufacturing?
The word manufacture is derived from two Latin words, manus (hand) and factus (make); the
combination means made by hand.

(a) (b)

Figure: Two ways to define manufacturing: (a) as a technical process, and (b) as an economic process.
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History of Manufacturing

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Source: J.A. Schey, C.S. Smith, R.F. Tylecote, T.K. Derry, T.I. Williams, S.R. Schmid, and S. Kalpakjian. 7
Thank You