MODULAR SUBSTRATE

COMPONENTS
1.125” C-SEAL for Ultra Clean Delivery Systems
MODULAR SUBSTRATE FOR GAS
DELIVERY SYSTEMS
Smaller footprint Table specification
Surface mount technology provides a method of
constructing gas delivery systems in a much more
Description Ultra high purity
compact package compared to in-line, face-seal
construction. For example, a valve occupies a space
Material of 316L alloy with additional processing to
of 1.125" square. Each surface mount component construction exceed SEMI F201 Ultra High Purity grade
follows SEMI dimensional standards to provide requiremets
interchangeability between manufacturers.
Surface Chemistry Wetted surface properties exceed all SEMI
Configurability characteristics F192 Ultra High Purity grade requiremets
The Modular Substrate Component (MSC) system
enables easy configuration changes by providing pre-
Surface finish Elctropolished to < 5 microinch Ra ave
machined flow paths that can be assembled in different
sequences without the need for any welded assemblies.
Quality & Process Full material and production process
Easier Maintenance Assurance traceability is available
Surface mount technology simplifies maintenance by
Cleaning & Final cleaning and packaging performed in
needing top only access for component replacement Packaging a class 10 clean room
and service.
Sealing 1.125" C-Seal
technology
(1)
SEMI F20 - 0815
(2)
SEMI F19 - 0706E (R0917)

MODULAR SUBSTRATE INDEX

SUBSTRATE
ISO MALE FEMALE 3 PORT MALE LUS/DS MALE MCF MALE 3 PORT MALE END
32205 FEMALE FEMALE 32213 32208
32209 32212

4 4 4 5 5

MCF FEMALE 3 PORT FEMALE END US / DS FEMALE END 2 PORT FEMALE END
32214 32206 32210 1/4 TS
34476

5 6 6 6

2 MODULAR SUBSTRATE COMPONENTS MSC

MANIFOLD
1400 1T 1400 1L 1400 2T SIDE - 2 SIDE - 1
32223 32221 32224 32255
34495

7 7 7 8 8

FLANGE CAP
THREADED 1/4 TW 1/4 TW SIDE 624 CAP MFC FLANGE SIDE COMP 2 PORT
SIDE 32215 32258 32229 32268
32218

9 9 9 10 10

MOUNT BLOCK
BLOCK 0.62 HEIGHT BLOCK 0.82 HEIGHT
32226 32754

11 11

BRACKET
MOUNTING MOUNTING MOUNTING MOUNTING SUPPORT BRACKET
BRACKET 0.32" BRACKET 0.82" BRACKET 0.52" BRACKET 0.62" 1/4 TUBE
32227 32752 32751 32228 32245

12 12 12 13 13

SUPPORT BRACKET
1/4 TUBE HEATED
32778

13

HAM-LET LEADING BY INNOVATION 3

 SUBSTRATE

MSC MODULAR, ISO, MALE, FEMALE

Part Number: 32205

M4x0.7-6H 5.8 M4x0.7-6H 5.1

39.27
21.34

21.74

28.45
15.85
10.67

9.50

9.50

12.70
21.74

All dimensions in mm

MSC MODULAR, 3 PORT, MALE, FEMALE

Part Number: 32209

32209

M4x0.7-6H 5.8 M4x0.7-6H 5.1

39.27
21.34
7.75
10.67

15.85

28.45
21.74

9.50

9.50

12.70
21.74
All dimensions in mm

MSC MODULAR, US/DS, MALE, FEMALE

Part Number: 32212
32212

M4x0.7-6H 5.8 M4x0.7-6H 5.1

39.17
21.34
10.67
21.74

15.85

28.45

9.50

9.50
12.70

21.74

All dimensions in mm

4 MODULAR SUBSTRATE COMPONENTS MSC

 SUBSTRATE

MSC MODULAR, MCF, MALE

Part Number: 32213

32213

M4x0.7-6H 5.8 M4x0.7-6H 5.1

29.08
13.59
21.74

10.67

15.85

28.45

9.50

12.70
All dimensions in mm

MSC MODULAR, 3 PORT, MALE, END

Part Number: 32208

32208

M4x0.7-6H 5.8 M4x0.7-6H 5.1 M4x0.7-6H 7.1

39.27

21.34

7.75 7.75
10.67

14.27

15.85

28.45
21.74

12.70
21.74

All dimensions in mm

MSC MODULAR, FEMALE

Part Number: 32214

32214

M4x0.7-6H 5.1

18.10
21.74

15.85
28.45

9.50

12.70

All dimensions in mm

HAM-LET LEADING BY INNOVATION 5

 SUBSTRATE

MSC MODULAR, 3 PORT, FEMALE, MALE

Part Number: 32206

32206

M4x0.7-6H 5.8 M4x0.7-6H 7.1

28.19
21.74 7.75

14.27

15.85

28.45

9.50

12.70
21.74
All dimensions in mm

MSC MODULAR, US/DS FEMALE END

Part Number: 32210

32210

M4x0.7-6H 5.8 M4x0.7-6H 7.1

28.19
14.27

15.85

28.45
21.74

9.50

12.70
21.74 7.75

All dimensions in mm

MSC MODULAR, 2 PORT, FEMALE, END 1/4" TS

Part Number: 34476

M4x0.7-6H THRU

34.81
20.52
4.62
6.35
28.45
21.74

9.50

12.70

21.74

All dimensions in mm

6 MODULAR SUBSTRATE COMPONENTS MSC

 MANIFOLDS

MSC MODULAR, MANIFOLD, 1400, 1T

Part Number: 32223

32223

35.94
17.97

11.48
M4x0.7-6H 5.1

4.62
7.67

6.35
15.85 21.84

All dimensions in mm

MSC MODULAR, MANIFOLD, 1400, 1L

Part Number: 32221

32221

28.89

17.97
4.62

M4x0.7-6H 5.1
11.48
6.65
7.67

15.85 21.84

All dimensions in mm

MSC MODULAR, MANIFOLD, 1400, 2T

Part Number: 32224

32224

71.50
35.56
4.62

M4x0.7-6H 5.1
11.48
7.67

6.35

57.40
15.85

All dimensions in mm

HAM-LET LEADING BY INNOVATION 7

 MANIFOLDS

MSC MODULAR, SIDE - 2

Part Number: 34495

34495

10.57
15.84

M4x0.7-6H 5.1

6.35

4.62
11.48
7.67

21.84 21.13

All dimensions in mm

MSC MODULAR,SIDE - 1
Part Number: 32255
32255

14.40
21.84
15.85

11.48
6.35

4.62

7.67 M4x0.7-6H 5.1

All dimensions in mm

8 MODULAR SUBSTRATE COMPONENTS MSC

 FLANGE

MSC MODULAR, THREADED FLANGE, 1/4 TW, SIDE

Part Number: 32218

32218

15.85 14.40
M4x0.7-6H THRU
7.67

6.35
4.62
7.70

All dimensions in mm

MSC MODULAR, FLANGE, 1/4 TW, SIDE

Part Number: 32215
32215

22.61

14.27 14.40
4.62
6.35
7.67

7.70

4.25 THRU

All dimensions in mm

MSC MODULAR, 624 CAP

Part Number: 32258
32258

22.61
7.70
15.85

4.25 THRU
7.67

All dimensions in mm

HAM-LET LEADING BY INNOVATION 9

 FLANGE

MSC MODULAR, MFC FLANGE SIDE

Part Number: 32229
32229

19.81
4.20 THRU 13.27

4.62
6.35
13.08

9.53

21.74
28.45

All dimensions in mm

CAP

MSC FLOW THRU CAP, 2 PORT

Part Number: 32268
32268

21.74
4.50 THRU

22.35
21.74

28.32

7.75
28.32
3.60
17.02
6.60

30°

All dimensions in mm

10 MODULAR SUBSTRATE COMPONENTS MSC

 MOUNT BLOCK

MSC MODULAR, SUBSTRATE MOUNTING, BLOCK, 0.62 HEIGHT

Part Number: 32226
32226

29.72
15.85

4.50

15.88
7.10

All dimensions in mm

MSC MODULAR, MANIFOLD, 1400, 1T

Part Number: 32754

32754

29.72

15.85

4.50
21.03
7.10

All dimensions in mm

HAM-LET LEADING BY INNOVATION 11

 BRACKET

MSC SUBSTRATE MTG BRK 0.32"

Part Number: 32227
32227

15.75 8.10

4.50 THRU
28.19
14.27

15.85

8.64
9.14
5.48

All dimensions in mm

MSC SUBSTRATE MTG BRK 0.82"

Part Number: 32752

32752

15.75 21.03
4.50 THRU
28.19

14.27

15.85

8.64
9.14
5.48

All dimensions in mm

MSC SUBSTRATE MTG BRK 0.52"

Part Number: 32751
32751
15.75 13.26

4.50 THRU
28.19
14.27

15.85

8.64
9.14
5.48

All dimensions in mm

12 MODULAR SUBSTRATE COMPONENTS MSC

 BRACKET

MSC SUBSTRATE MTG BRK 0.62"

Part Number: 32228
32228

15.75 15.88

4.50 THRU
28.19
14.27

15.85

8.64
9.14
5.48

All dimensions in mm

MSC SUPPORT BRACKET 1/4" TUBE

Part Number: 32245
32245

6.73
18.54
12.07

25.40
9.65

4.50 THRU
15.85

All dimensions in mm

MSC SUPPORT BRACKET 1/4" TUBE HEATED

Part Number: 32778
32778

6.73
23.62
17.22

25.40 9.65

4.50 THRU
15.85

All dimensions in mm

HAM-LET LEADING BY INNOVATION 13

HOW TO ORDER - MODULAR SUBSTRATE COMPONENTS
MSC - S - 32205 - V

Series Type Part No. Material

MSC 32205 V 316L F20(1)

32206
P 316L(2)
32208
AL AL. 6061(3)
32209

S 32210
(1)
SEMI F20- 0815 Ultra-High Purity grade 316L
(2)
Relevant for Brackets
32212 (3)
Relevant for Mount blocks
32213

32214

34476

32221
32223

M 32224

32255

34495

32215
32218
F
32229

32258

C 32268

32226
MB
32754

32227
32228

32215
B
32778

32751

32752

S – Substrate
M – Manifold
F – Flange
C – Cap
MB – Mount Block
B – Bracket

MSC | 2020_Rev00 Note: For additional part numbers, plese contact your local representative

14 MODULAR SUBSTRATE COMPONENTS MSC