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Nanoscale: Twisted Non-Di Ffracting Beams Through All Dielectric Meta-Axicons
Nanoscale: Twisted Non-Di Ffracting Beams Through All Dielectric Meta-Axicons
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in the visible domain. These limitations motivated the search Conventionally, axicon lenses (which comprise conical
for appropriate materials in the visible spectrum to realize prisms) are employed to bend the incident light by refraction
highly efficient metasurfaces. The best candidate addressing to generate the first-order BB. Fig. S1b† demonstrates the
this issue is clearly lossless dielectric materials with polariz- working principle of the traditional axicon with the axicon
ation insensitive geometries of their nano-resonators, which angle α0. The incident plane wave is illuminated from the left
can ensure high efficiency for transmission-based geometries with a light source with the incidence angle αi. According to
in the visible domain. In this context, different research the law of refraction
groups have demonstrated highly efficient metasurfaces
through various lossless dielectrics (in the visible range); these ng sinð90 α0 Þ ¼ na sinðαt Þ ð2Þ
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With this motivation, in the current work we demonstrate along with a sufficiently high index of refraction (n = 3.2475)
highly efficient all-dielectric meta-axicons to generate zeroth for the operational wavelength of 633 nm. The inclusion of the
(m = 0) and higher order (m = 2 and 4) BBs without using hydrogen content in a-Si can significantly decrease the imagin-
additional phase components. We have demonstrated a meta- ary part of the refractive index compared to that of a-Si without
axicon which results in a non-diffracting beam for a finite the inclusion of the hydrogen content by tuning the mobility
propagation distance. Naturally, all beams are diverging but gap.49
this designed structure generates the phenomena of a non- In the current work, we utilize cylindrical nano-pillars of
diffracting beam for a propagation length of ≈1.6 mm which a-Si:H, with a fixed thickness of 0.63 λ, as building blocks of
is approximately equal to 2600 λ. A polarization insensitive the all-dielectric meta-axicons. This provides a balanced trade-
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response is achieved by adopting cylindrical nano-wave- off between ease of fabrication and diffraction efficiency. The
guides, whereas their geometrical parameters are optimized optical constants of our a-Si:H (sketched in green and black
through rigorous numerical optimization. We utilize hydro- curves respectively) in Fig. 1a reveal that it is best suited for
genated amorphous silicon as the dielectric material due to realizing efficient all-dielectric metasurfaces for visible wave-
its transparency window for higher wavelengths of visible lengths (mainly for red light). In metasurfaces, the spatial dis-
light and a sufficiently large real part of the refractive index tribution of subwavelength resonators with different geometri-
for strong confinement of light within it. These pseudo-non- cal parameters along the interface allows full control over the
diffracting beams can become important for practical wavefront of incident light. The implementation of any phase
applications. dictated phenomenon through metasurfaces requires that
each nano-resonator must contribute a specified phase to
achieve the desired optical response.
2. Materials and methods We have designed and optimized the nano-features of our
nano-waveguides in such a way that they meet the requirement
Fig. 1a presents the measured optical constants of a-Si:H and of complete phase accumulation (0–2π), while maintaining the
the comparison with the standard amorphous silicon (a-Si) for maximum possible transmission efficiency. The proposed
wavelengths ranging from 200 nm to 1000 nm. As compared to nano-pillars follow the indexed waveguide mechanism where
a-Si (shown in blue and red curves), the proposed a-Si:H the complete phase profile is acquired by changing the dia-
material exhibits significantly reduced absorption (k = 0.0471) meter of the nano-pillars.50 By altering the diameter of the
Fig. 1 (a) Measured optical properties of the proposed hydrogenated amorphous silicon (green and black curves) compared with standard amor-
phous silicon (blue and red curves) for wavelengths ranging from 200 nm to 1000 nm. The reduced absorption of the proposed dielectric material
allows device design with higher diffraction efficiency which is an important requirement of many optical components. (b) Schematic of the nano-
pillar on a glass substrate indicating D as the diameter, H as the thickness, and U as the periodicity of the unit cell. The periodicity (center to center
spacing of the two nano-pillars) is optimized at 300 nm ensuring maximum attainable transmission efficiency also to facilitate the fabrication
process. (c) Complete 0–2π phase coverage of the impinged light is depicted under a linearly polarized plane wave source. By sweeping the diameter
of the nano-pillars ranging from 100 nm to 250 nm, complete phase modulation is achieved. (d) Working principle of the all-dielectric metasurface
as a meta-axicon tiling an ultrathin monolayer of a-Si:H on a glass substrate is presented where the metasurface is illuminated from the substrate
side.
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nano-pillars as a function of the position (xi, yj ), the effective This spatial distribution of nano-pillars (to form the meta-
refractive index of the propagating mode is modified and even- axicons) to generate zero and higher order BBs is given in eqn
tually, the required phase modulation is achieved; this is illus- (8) and (9), respectively.
trated in Fig. S1a.† These cylindrical nano-resonators act as
2π qffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffi
truncated waveguides whose behavior could be better under- φ1 ðxi ; yj Þ ¼ 2π xi 2 þ yj 2 NA ð8Þ
λd
stood with the help of the indexed waveguide theory by the fol-
lowing equation:27 2π qffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffi yj
φ1 ðxi ; yj Þ ¼ 2π xi 2 þ yj 2 NA þ m tan1
2π λd xi
Φ¼ neff H ð7Þ ð9Þ
λd
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where λd is the design wavelength, neff represents the effective where NA is the numerical aperture, xi and yi represent the
refractive index and H represents the height of the nano- coordinates of each nano-pillar on the interface and m is the
pillar. topological charge indicating the number of intertwined
The schematic depiction of the nano-pillar used to helices in the imaging plane. The presented all-dielectric
implement the all-dielectric meta-axicons is given in Fig. 1b, meta-axicons are implemented at the design wavelength λd =
where H is the height and D is the diameter while U corres- 633 nm.
ponds to the periodicity of the basic building block. Due to the For experimental investigation, different structures are
cylindrical symmetry, the numerically simulated phase fabricated on a coverage area of 200 μm × 200 μm. First,
response of the nano-pillar and overall behavior, both numeri- 400 nm a-Si:H is deposited on a 500 μm thick fused silica
cally simulated and experimentally verified, of the meta- (SiO2) substrate by plasma enhanced chemical vapor depo-
axicons are polarization insensitive. To address the limitations sition (PECVD) (BMR Technology, HiDep-SC). Subsequently,
imposed by the miniaturization of the integrated optical com- spin-coating and hotplate baking at 180 °C for 5 minutes
ponents and fabrication techniques, the parameters of the lead to 100 nm thickness of the positive tone resist
nano-resonators must be engineered intelligently. The (Microchem, 495 PMMA A2). A conductive polymer layer
minimum diameter should meet the requirement enforced by (Showa Denko, E-spacer 300Z), which is spin-coated at
the aspect ratio (ratio between maximum height and 2000 rpm for 60 seconds, can also reduce the charging effect
minimum feature size) and the maximum diameter should be of the electron beam. Thereafter, the metasurface is crafted
smaller than the periodicity of the unit cell, which is ulti- by standard electron-beam lithography (EBL) (ELIONIX,
mately addressed by the Nyquist criterion (U < λd/2NA). The ELS-7800, 80 kV, 50 pA) with an optimized exposure dose of
periodicity, center to center spacing between two nano-resona- around 1280–1600 μC cm−2. The conductive polymer layer is
tors, is optimized to minimize the inter-resonator coupling removed by DI water dipping at room temperature for
and allow the scattered light to interfere constructively, result- 2 minutes, and it is soaked in methyl isobutyl ketone
ing in the maximum possible transmission amplitude. The (MIBK)/isopropyl alcohol (IPA) 1 : 3 solution for 12 minutes
complete phase coverage, depicted in Fig. 1c, is achieved by at 0 °C to develop the positive resist. After the development
optimizing the various parameters such as a fixed thickness of of the positive resist, it is cleaned with IPA for 60 seconds.
the nano-pillar (400 nm), aspect ratio (4.0), maximum and Subsequently, a 30 nm thick chromium etch mask is formed
minimum diameters (Dmax = 250 nm, Dmin = 100 nm) and using an electron beam evaporator (KVT, KVE-ENS4004) with
periodicity (U = 300 nm). To ensure the polarization insensitive a lift-off process which involves dipping in 50 °C acetone for
capability of the proposed building block, complete phase 15 minutes and cleaning with IPA for 60 seconds. After dry
(0–2π) pickup of the optical wavefront is acquired under linear etching (DMS, silicon/metal hybrid etcher), the etch mask is
and circular polarization of the incident light which is shown removed using the Cr etchant (CR-7).
in Fig. 1c and Fig. S3a† respectively, showing excellent agree- Scanning electron microscopy (SEM) images of the fabri-
ment for the different polarization states. The above-men- cated meta-axicons for topological charge m = 0, 2 and 4 with
tioned optimization was achieved using the finite difference numerical aperture NA = 0.1 and 0.9 are given in Fig. 2. The
time domain technique based on commercially available inset in each subfigure of Fig. 2 presents the magnified
FDTD Solution software (Lumerical). The basic building block version of the central part of each fabricated meta-axicon.
is simulated with periodic boundary conditions along the x- Nano-resonators of a-Si:H with 16 discrete levels of the dia-
and y-axis while it is simulated by perfectly matched layer meter increasing from 100 nm to 250 nm are spatially distribu-
(PML) boundaries along the z-axis ( propagation direction). ted along the interface to cover the complete phase with a step
The working principle of the all-dielectric meta-axicon is size of 22.5°.
shown in Fig. 1d where the 400 nm thick nano-pillars of a-Si:H
are spatially distributed along the interface. The meta-axicon
is illuminated with a plane wave from the substrate side, and 3. Results and discussion
the diffracted light interferes constructively leading to the non-
diffracting behavior for a specific segment along the propa- For experimental verification of the generation of non-diffr-
gation direction. acting twisted beams via all-dielectric, highly efficient and
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Fig. 2 SEM images of the fabricated meta-axicons. (a–c) Low magnification SEM images of the meta-axicons with NA = 0.1 having topological charge
m = 0, 2 and 4. The inset in each subfigure shows the high magnification image from the center of each structure. The scale bar for the low magnifi-
cation images is 10 μm while for the inset it is 2 μm. (d–f) SEM images of the meta-axicons with NA = 0.9 having topological charge m = 0, 2 and 4.
polarization insensitive meta-axicons, the fabricated struc- purpose. A helium–neon (HeNe) laser with an operational
tures are optically characterized in the transmission mode. wavelength of 633 nm exhibiting random polarization (with a
A sequential arrangement of optical elements in a custom- measured beam diameter of 0.63 mm and 2.0 mW power) is
built optical microscope as shown in Fig. 3 is used for this used to generate the electromagnetic wave. The incident light
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wave plate (QWP) are placed in the optical path to switch the
polarization of the incident beam horizontally and vertically
and from the left and right. This polarized light is then
focused on the back focal plane of the objective lens (100× oil
immersion lens but used dry) using an optical lens with a
focal length of 150 mm. The diffracted light of the meta-
axicons is imaged using a 100× objective. To ensure the
uniform illumination of the meta-axicon, this step is necess-
ary, and is called Kohler illumination. A homemade sample
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Fig. 4 Experimental characterization of the fabricated all-dielectric meta-axicons. (a–f ) Description of the behaviour of the meta-axicons for NA =
0.1 and (g–l) for NA = 0.9 with topological charges m = 0, 2 and 4. For all the obtained results, the interval of diffracted light intensity is a step size
of 1 μm, which is recorded on the screen of the CCD camera.
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Fig. 5 Experimental characterization of the full width at half maximum (FWHM) of the zeroth-order BB for NA = 0.1, 0.7 and 0.9 (a–c). These results
state that our meta-axicon can provide a sub-diffraction limited spot for high numerical apertures.
describe the optically characterized results for NA = 0.1 while cost-effectiveness and the novel approach of phase manipu-
Fig. 4g–l illustrate the results for NA = 0.9 while the optically lation into a single subwavelength thick surface show great
characterized results for NA = 0.7 are described in Fig. S5g–l.† potential and promise for practical applications in integrated
Fig. 4a, c, e, g, i and k describe the measured results under optics and photonics.
linear polarization for topological charge m = 0, 2 and 4
respectively while the remaining subfigures describe the same
behavior but under circular polarization of the incident light. Conflicts of interest
It is worth noting that the optically characterized behavior of
the fabricated meta-axicons shows excellent agreement There are no conflicts to declare.
between linearly and circularly polarized light.
Fig. 5a–c show the measured FWHM of the zero-order ( J0)
Bessel beam at an operational wavelength λ = 633 nm. Acknowledgements
The measured FWHM of the zeroth-order BB for NA = 0.1 is
observed to be ∼3.579 λ (2.265 μm), which is very close to its This work was financially supported by the National Research
theoretical limit of 2.437 μm (eqn (6)). The measured FWHM Foundation (NRF) grants (NRF-2019R1A2C3003129,
of the J0 Bessel beam is 325 nm and 230 nm for NA = 0.7 and CAMM-2019M3A6B3030637, NRF-2019R1A5A8080290,
0.9 respectively. These measurements show very good agree- NRF-2018M3D1A1058998, NRF-2015R1A5A1037668) funded by
ment with theoretical values of 348 nm and 270 nm the Ministry of Science and ICT (MSIT) of the Korean govern-
respectively. ment. M. Q. M. acknowledges the research grant from HEC’s
NRPU (Award No. 10177). M. Q. M. and M. Z. acknowledge a
start-up research grant from ITU. I. K. acknowledges the
4. Conclusion Global Ph.D. fellowship (NRF-2016H1A2A1906519) from
NRF-MIST of the Korean government. M. S. A., M. S., and
In conclusion, we have designed, numerically simulated and A. A. acknowledge financial support from the Higher
experimentally demonstrated simple, highly efficient, polariz- Education Commission (NRPU 2028) and the LUMS Faculty
ation insensitive, all-dielectric meta-axicons that are capable of Initiative Fund (FIF-PHY-319).
generating zero and higher order Bessel beams in the visible
domain. It is observed that the propagation length and full
width at half maximum can be controlled via tailoring the Notes and references
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