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Abstract
The resistance switching behaviour of several materials has recently attracted considerable
attention for its application in non-volatile memory (NVM) devices, popularly described as
resistive random access memories (RRAMs). RRAM is a type of NVM that uses a material(s)
that changes the resistance when a voltage is applied. Resistive switching phenomena have
been observed in many oxides: (i) binary transition metal oxides (TMOs), e.g. TiO2 , Cr2 O3 ,
FeOx and NiO; (ii) perovskite-type complex TMOs that are variously functional, paraelectric,
ferroelectric, multiferroic and magnetic, e.g. (Ba,Sr)TiO3 , Pb(Zr x Ti1−x )O3 , BiFeO3 and
Pr x Ca1−x MnO3 ; (iii) large band gap high-k dielectrics, e.g. Al2 O3 and Gd2 O3 ; (iv) graphene
oxides. In the non-oxide category, higher chalcogenides are front runners, e.g. In2 Se3 and
In2 Te3 . Hence, the number of materials showing this technologically interesting behaviour for
information storage is enormous. Resistive switching in these materials can form the basis for
the next generation of NVM, i.e. RRAM, when current semiconductor memory technology
reaches its limit in terms of density. RRAMs may be the high-density and low-cost NVMs of
the future.
A review on this topic is of importance to focus concentration on the most promising
materials to accelerate application into the semiconductor industry. This review is a small
effort to realize the ambitious goal of RRAMs. Its basic focus is on resistive switching in
various materials with particular emphasis on binary TMOs. It also addresses the current
understanding of resistive switching behaviour. Moreover, a brief comparison between
RRAMs and memristors is included. The review ends with the current status of RRAMs in
terms of stability, scalability and switching speed, which are three important aspects of
integration onto semiconductors.
(Some figures may appear in colour only in the online journal)
6 Authors to whom any correspondence should be addressed.
0034-4885/12/076502+31$88.00 1 © 2012 IOP Publishing Ltd Printed in the UK & the USA
Rep. Prog. Phys. 75 (2012) 076502 D S Jeong et al
Contents
1. Introduction 3 4. Resistive switching materials and mechanisms 15
1.1. Semiconductor memory classification 3 4.1. Resistive switching in oxides 15
1.2. Limitations of the current memory technologies 3 4.2. Higher chalcogenides 18
1.3. Emerging memories 4
2. Basics of resistive switching 6 4.3. Carbon-based materials and other materials 18
2.1. Types of resistive switching 6 4.4. Mechanisms for resistive switching 19
2.2. Resistive switching measurements 7 5. Are RRAMs memristors? 24
3. Electroforming 7 6. Non-volatile memory application 25
3.1. Early mechanisms for electroforming 9 6.1. Scalability of RRAMs 26
3.2. Electrolysis (anodic) reactions and ion or
6.2. Stability of RRAMs 26
ionic defect migration 10
3.3. Resistance change during electroforming 13 6.3. Switching speed of RRAMs 27
3.4. Phase transition 14 7. Concluding remarks and outlook 27
3.5. Electroforming into unipolar or bipolar Acknowledgments 27
switching 14 References 27
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Rep. Prog. Phys. 75 (2012) 076502 D S Jeong et al
×
MM M ions on an M ion site, zero
charge (Kröger–Vink notation)
Mi·· doubly charged M ion interstitial
(Kröger–Vink notation)
e electron (Kröger–Vink notation)
e− electron (regular nomenclature)
h· hole
EF Fermi level
EC conduction band edge or minimum
φm work function of metal
V (0) voltage drop through the Helmholtz layer
Evac vacuum level
χTiO2 electron affinity of TiO2
G0f formation free energy at the standard state
Figure 1. Categories of standard semiconductor memories and
emerging memories, e.g. FRAM, MRAM, PRAM and RRAM.
1. Introduction
UVEPROM, all memory cells are simultaneously erased,
1.1. Semiconductor memory classification whereas in an EEPROM memory cells can be erased byte-
or block-wise. A schematic of the semiconductor memory
Sustained advances in integrated circuit technologies
classification is shown in figure 1. Since DRAMs and FLASH
over the past decades have given us computers with
memories constitute the biggest part of the semiconductor
powerful processing capabilities due to high-speed/high-
memory market, we will address the comparison of these
density memories and processors. Additionally, portable
two ‘giants’ and emerging memories that are seriously being
mobile electronic devices are heavily reliant on the
considered to replace the giants in terms of operation speed
development of high-density, high-speed and low-power
and storage density.
memories. Semiconductor memories are classified based on
DRAMs were traditionally used as technology drivers
how many times they can be rewritten into random access
for the semiconductor industry. However, beyond the one
memories (RAMs) and read-only memories (ROMs). In
gigabit generation, FLASH memories have caught up with
RAMs, as the name suggests, information can be written to
DRAMs and now are scaling ahead in terms of storage density
or read from any cells without read/write cycle limitations,
as well as minimum feature size [3]. For a further advance
whereas in ROMs read/write cycles are limited. In RAMs,
of information processing/storage technologies, we need new
writing and reading times are almost the same, whereas in
memory technologies with the possibility of meeting the
ROMs writing takes more time than reading. ROMs are non- integrated circuits’ mottos: small, cheap, fast and reliable.
volatile, that is, the stored information remains even if the A number of alternatives to DRAMs and FLASH memories
power is turned off. have been extensively studied to obtain more powerful
RAMs can be further classified based on the retention and functional memories, so-called emerging memories (see
of the stored information into volatile memories and non- figure 1). The focus of research on emerging memories
volatile memories (NVMs). Volatile memories lose the is on obtaining non-volatile, fast, high-density, low-power
stored information once the power is turned off. Dynamic consumption, high data transfer rate and reliable memories. If
RAMs (DRAMs) and static RAMs (SRAMs) are examples these emerging memories satisfy the positive points of RAMs
of volatile memories. SRAMs are very fast (write/erase and ROMs, then they can be universal future memories.
time: 0.3 ns/0.3 ns) compared with DRAMs (write/erase time:
<10 ns/<10 ns), but the density is very low due to the large
1.2. Limitations of the current memory technologies
unit cell size (six transistors in latched configuration with a
minimum cell size of 140F 2 , where F is the minimum feature FLASH memory is a class of EEPROM, as FLASH memories
size) compared with DRAMs, the unit cell of which is much are also electrically written and erased. However, each
smaller (one-transistor and one-capacitor (1T1C) stack with memory cell in a FLASH memory consists of only one metal–
a minimum cell size of 6F2 ) [1]. Hence, SRAMs are used oxide–semiconductor field-effect-transistor (MOSFET) with
as cache memories where the access time is critical, while an additional floating gate, unlike EEPROMs (two MOSFETs).
DRAMs are used as main memories where the capacity is The operation of FLASH memories is much slower
critical for temporary information storage and processing [2]. (write/erase time; 1 ms/0.1 ms) than DRAMs, and hence they
Depending on reprogrammability, ROMs are classified are used as secondary storage media. The primary limitation
as one-time programmable ROMs (OTPROMs) and erasable of FLASH memories is that while their design is superb
programmable ROMs (EPROMs). OTPROMs, as the name for 5 V operation, there is an international agreement within
suggests, are not reprogrammable, i.e. non-erasable. EPROMs the electronics industry that the standard Si-logic level will
can be erased either by exposing memory cells to ultraviolet decrease from 5 V to 3.3 V to 1.1 V and eventually to 0.5 V in
radiation (ultraviolet EPROMs: UVEPROMs) or by electrical the coming years. FLASH memories (based on the Fowler–
means (electrically erasable PROMs: EEPROMs). In a Nordheim tunnelling) will not reliably function at 0.5 V, and
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Rep. Prog. Phys. 75 (2012) 076502 D S Jeong et al
Table 1. Comparison of conventional and emerging memories. Most data other than those of RRAMs were taken from [1]. RRAMs have
not been demonstrated at the industrial level so some data, e.g. write/erase time and endurance, are of RRAMs at the laboratory level.
Volatile Non-volatile Emerging non-volatile
memory memory memory
Type SRAM DRAM NOR-FLASH NAND-FLASH MRAM PRAM FRAM RRAM
Cell 6T 1T1C 1T 1T 1(2)T1R 1T1R or 1T1C 1T1R or
elements 1D1Ra 1D1Ra
Cell Latch Stack/ Floating Floating Magnetoresistance Phase- Polarization- Resistance-
trench gate/charge gate/charge change change change
capacitor trap trap
Minimum 140F2 6F2 10F2 5F2 20F2 4.8(4)F2b 22F2 4F2c
cell size
Write/erase 0.3 ns/ <10 ns/ 1 ms/ 1 ms/ 10 ns/ 20 ns/ 10 ns/ 5 ns/5 ns
time 0.3 ns <10 ns 10 ms 0.1 ms 10 ns 50 ns 10 ns [48]
Endurance >3 × 1016 >3 × 1016 >105 >105 >3 × 1016 108 1014 >1010 [49]
(cycles)
Application Cache Main Storage Storage Storage Storage Storage Storage/Main
memory memory
a
1D1R (one-diode and one-resistor) unit cells are employed in passive PRAMs and RRAMs, which are based on crossbar-arrays.
b
Passive crossbar-array-based PRAMs satisfy a minimum cell size of 4F2 .
c
Similar to passive PRAMs, passive RRAMs satisfy a minimum cell size of 4F2 .
the remedy by the insertion of internal ‘charge pumps’ in In short, both DRAM and FLASH memory technologies
each cell will decrease yields, increase cost and increase will touch the miniaturization limit when the lateral feature
failure mechanisms [4]. In spite of the wide application size of DRAMs and FLASH memories shrinks down to 21 nm
of FLASH memories in commercial products, e.g. digital (for DRAM technology 2016 and for FLASH technology
cameras, memory sticks and mp3 players, the current FLASH 2013) [1]. Fortunately, there are emerging memories in
memory technology has obvious disadvantages: long write and the technology pipeline that may address this concern [1,
erase times as well as a limited cyclability of >105 write/erase 10, 11]. Developing a memory technology, which combines
cycles compared with DRAM (>3 × 1016 write/read cycles) the best features of the current memories with fabrication
(see table 1). Because of these drawbacks, FLASH memories that is compatible with the complementary-metal–oxide–
are not seriously considered as candidates for future secondary semiconductor (CMOS) process flow and can scale beyond
memories. the present limit of DRAMs and FLASH memories, is a big
Similarly, DRAMs, which are omnipresent in today’s challenge [1].
computers, have been meeting all the scalability requirements
since their introduction in the beginning of 1970s, but 1.3. Emerging memories
a further improvement in the density is a problem. In
2005, DRAM technology entered sub-100 nm technology, There are more than a dozen memories, based on different
and DRAM capacitor technology is slowly transitioning from concepts, which have been considered as emerging memories.
metal–insulator–semiconductor capacitors to metal–insulator– Examples are ferroelectric RAMs (FRAMs) [12], resistive
metal (MIM) capacitors with focus on the design of capacitors RAMs (RRAMs) [13–17], magnetic RAMs (MRAMs) [18],
and new high-k dielectrics. The requirements are twofold: (i) phase-change RAMs (PRAMs) [19, 20], electrochemical
from a material’s point of view, high-k dielectric films with metallization (ECM) memories or programmable metallization
low leakage current and high breakdown strength are of great cell (PMC) memories [14, 21], carbon nano-tube memories
importance, and (ii) from a process’s point of view, the uniform [22], millipede memories [23], molecular memories [24],
deposition of high-k dielectric films on three-dimensional (3D) nano-crystal floating-gate FLASH memories [25] and DNA
structures [5–9]. memories [26]. However, among these memories, FRAMs,
System memory power (DRAM power) and disk power RRAMs, MRAMs and PRAMs have been considered as
contribute as much as 40% to the overall power consumption, emerging memories to potentially overcome the limitations
and the current trends suggest that this will continue to increase of DRAMs and FLASH memories. The comparison
at a rapid rate. The energy efficiency therefore becomes between the conventional and emerging memories is given in
a critical aspect. Replacing DRAMs with NVMs may be table 1. PRAMs, MRAMs and RRAMs are resistance-based
the ultimate solution for energy efficiency. However, as an memories, whereas FRAMs are based on capacitance. We will
intermediate stage to save on storage energy, one can connect discuss these four memories rather briefly before moving onto
a disk to a DRAM via an NVM, or alternatively, extend the the topic of resistive switching materials.
refresh time of the DRAM. This energy efficiency extends the
battery lifetime of mobile systems, and thus the time-period 1.3.1. Ferroelectric memories. When a sufficiently strong
during which the systems are operational. This is an important electric field (E > Ec , Ec : coercive field) is applied
design issue in mobile computer systems. to a ferroelectric material, the consequent change in the
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Rep. Prog. Phys. 75 (2012) 076502 D S Jeong et al
ferroelectric polarization is hysteretic in nature. In an ideal these optical memories utilize the change in PCMs’ reflectivity,
case, a polarization versus electric field loop presents two rather than resistivity, depending on their phase change.
distinguishable polarization states. This bi-stability in the Currently, PRAMs are promising as emerging memories.
polarization forms the basis of FRAMs [12]. FRAMs, Some electronics companies have already fabricated 512 Mb
introduced in the late 1980s a couple of years after FLASH PRAMs using the 40 nm technology. PRAMs are expected
memories, offer a number of advantages, notably, low-power to replace NOR-FLASH memories in the memory market at
consumption, fast write speed and good cyclability (see present. Recent progress in PRAM technology has provided
table 1) [12]. a clear demonstration of the excellent scaling potential to and
Currently, Pb(Zr x , Ti1−x )O3 (PZT) and SrBi2 Ta2 O9 beyond the 16 nm generation [20].
(SBT) are used in FRAMs. FRAMs are still considered
as emerging memories, although the expected density in the 1.3.3. Magnetic memories. MRAMs have been considered
gigabit regime has not been achieved so far. It started out as possible candidates to replace several types of current
with great promise, a couple of generations behind mainstream memories, such as embedded SRAMs and NOR-FLASH
DRAMs and FLASH memories. Current FRAMs have a unit memories, and, in more advanced generations, perhaps
cell of 1T1C. However, difficulty in scaling up the density DRAMs and NAND-FLASH memories. Two main types
due to the large cell size (12–80F 2 ) compared with DRAMs of MRAMs have been developed: field-writing MRAMs and
and FLASH memories has pinned the density of FRAMs in the spin-transfer torque MRAMs (STTMRAMs). In a field-
megabit regime and is still a problem to circumvent. Therefore, writing MRAM, each memory cell is written by a magnetic
a consensus in the community is that high-density FRAM field around the current line. Field-writing MRAMs have been
architecture needs to feature 3D capacitors in order to increase around for more than 10 years and are currently in production
the capacitor area without increasing the lateral cell size to as stand-alone 16 megabit MRAMs and embedded memories.
obtain the required polarization to retain the signal strength. The primary issue with field-write MRAMs is their high write
Most ferroelectrics have polarization in the range current, which makes scaling difficult.
20–35 µC cm−2 , and thus there is no scope for the STTMRAMs which exploit spin-polarized current have
improvement of FRAM density without 3D capacitors. In this relatively good potential as a next-generation memory type,
context, multiferroic BiFeO3 (BFO) is of great importance as its combining advantages of SRAMs (high speed), DRAMs
polarization value is more than double that of a standard PZT. (scalability) and FLASH memories (non-volatility) [32].
Introducing BFO to 1T1C FRAMs can therefore lead to higher However, the OFF/ON ratio is of some concern since it must
densities than SBT- and PZT-based FRAMs. Additionally, by increase as the bit line voltage becomes lower. Also of concern
means of 3D capacitor architecture, the density of FRAMs is the energy dissipation during operation.
can be further improved, although this brings about additional
process complexity. 3D ferroelectric nano-capacitors have 1.3.4. Resistance memories. Resistance memories
been recently demonstrated by Miyake et al and by Fan et al nominally include all types of memories using two or more
[27, 28]. However, it is challenging to realize 3D ferroelectric distinctive resistance states as the binary numbers ‘0’ and
capacitors, which requires uniform ferroelectric film thickness ‘1’. Therefore, PRAMs and MRAMs in principle could be
on 3D structure with a high aspect ratio. considered as resistance memories but are relatively much
Also, there are other key integration issues in FRAMs that more clearly understood. When RRAMs were introduced,
still need to be addressed, such as etching technology to impose the mechanism was not well understood. Pioneers named
less plasma damage on the capacitors, stacking technology for this memory type RRAM without specifying the mechanism.
the preparation of robust ferroelectrics, capping technology Materials for RRAMs cover all materials exhibiting non-
to encapsulate the cell capacitors and vertical conjunction volatile resistive switching toggled by electric fields, other than
technology to connect cell capacitors to the plate line [29]. phase-change-type higher chalcogenides.
The resistive switch in each memory cell of a 1T1R-
type RRAM consists of a switching layer and top electrode
1.3.2. Phase-change memories. Phase-change materials (TE) and bottom electrode (BE) sandwiching the switching
(PCMs), which are typically higher chalcogenides, exhibit an layer. This capacitor-like switching cell is characterized by
ability for reversible phase transition between the amorphous two distinctive resistance states: a high resistance state (HRS)
and crystalline phases with the help of Joule heating. This and a low resistance state (LRS). By applying either a voltage
phase transition brings about a change in the resistance or a current to the cell, reversible switching between the HRS
as well as the reflectivity. An idea to use PCMs in and LRS can be achieved. Once switched, the cell retains the
memory devices dates back over four decades [30, 31]. particular resistance level for a long time.
However, material quality and power consumption issues have Reversible resistive switching was observed in various
prevented the commercialization of this technology. The binary oxides, such as Nb2 O5 , Al2 O3 , SiO2 and TiO2 , more
progress in semiconductor manufacturing technology and the than four decades ago [33–38]. Later in 1994, Blom et al
development of high-quality PCMs during the last few decades observed resistive switching in a different class of materials,
are the main reasons for the recent revival of PCM-based ferroelectrics. They reported a hysteretic current–voltage
NVMs, i.e. PRAMs. Optical memories employing PCMs, e.g. (I –V ) behaviour in ferroelectric PbTiO3 (PTO) sandwiched
CDs and DVDs, already exist in the memory market. However, between Au TE and La0.5 Sr0.5 CoO3 (LSCO) BE [39]. This
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Rep. Prog. Phys. 75 (2012) 076502 D S Jeong et al
system has the limitation that the signal level is weak, which is case can be seen in highly resistive dielectrics in which the dc
an obstacle to the application of this system in memory devices current flow is much lower than the ac current. Hysteretic
since sense amplifiers and discriminators cannot read the signal I –V behaviour with ac current relies on a voltage sweep
reliably. rate, i.e. with decreasing sweep rate, the hysteresis shrinks.
Current research on resistive switching started in the If the delay time of each step in a stair-case voltage sweep
early millennium [15–17, 40–42]. In 2000, Liu et al found is longer than the capacitance charging/discharging time, the
an electric-field-induced resistance-change (EPIR) effect in hysteresis disappears. Therefore, this I –V hysteresis should
perovskite-type Pr x Ca1−x MO3 (PCMO) [16]. In fact, in 1997, be distinguished from dc current versus voltage hysteresis.
Asamitsu et al demonstrated resistive switching in PCMO, Dietz and Waser have suggested a method to extract a dc current
toggled by not only a magnetic field but also an electric contribution out of mixed dc and ac current contributions in
field [43]. In 2000, resistive switching was also found in high-k dielectrics [50].
another perovskite-type oxide, Cr-doped SrZrO3 (SZO), and However, some MIM cells show ‘dc current’ versus
the application of this material in NVMs was demonstrated voltage hysteresis with characteristic threshold voltages, and
[15]. These findings triggered enormous interest in resistive some distinctive resistance states in the sub-threshold voltage
switching in oxides for application in RRAMs, which had been region. Namely, they are non-volatile resistive switches. The
out of the minds of researchers for more than three decades. available number of stable resistance states in the sub-threshold
This attention inspired much research on resistive switching region is at least two, which is enough to write binary values.
in various oxides, not only perovskite-type oxides but also This hysteretic behaviour makes the switch stay in the HRS or
simple binary transition metal oxides (TMOs) and wide band LRS unless the applied voltage exceeds the threshold voltages.
gap high-k dielectric oxides. Additionally, the switch locks onto these two stable states even
An enormous number of papers on resistive switching if a voltage is reduced to zero, making it remember the last
deal with a large number of materials with different action. More importantly, the switching between these HRS
functionalities, e.g. dielectric, paraelectric, ferroelectric, and LRS can be programmed by the application of appropriate
ferromagnetic and semiconducting materials. Materials with voltages many times. Hence, the term ‘resistive switching’
contrasting properties, i.e. different functionalities, show thereby forms the basis of the new rewritable non-volatile
universal resistive switching. This sort of universality makes RRAMs.
understanding of the phenomena complicated. There have A conducting filament (CF) that acts as a circuit
been more than 1000 publications in the last ten years on breaker/switch between two electrodes is believed to be
resistive switching according to the Web of Science7 . From responsible for most resistive switching phenomena. The
these publications it can be seen that the physics of resistive
breaking and forming of a CF occurs over a nanometre-scale
switching has not been fully understood. Moreover, there are
region within very short times at the nanosecond scale. In this
many publications addressing different switching behaviours
chapter, we briefly discuss the basics of resistive switching
even in the same systems, which make the understanding even
such as types of resistive switching behaviours and switching
more difficult.
measurement methods.
Resistance memories such as PRAMs and RRAMs are
inherently more free from scaling problems than capacitance-
based memories such as DRAMs and FRAMs. Crossbar- 2.1. Types of resistive switching
array-based passive RRAMs appear to achieve a design rule of
Currently, the scientific community on resistive switching has
4F 2 due to the lack of MOSFET cell selectors. Of course, some
agreed on the presence of unipolar and bipolar switching
critical issues, for instance, the prevention of sneak current
in various switching materials. Resistive switching can
for the worst-case pattern, should first be solved. When the
be classified into unipolar and bipolar switching by the
operation speed of RRAMs catches up, DRAMs could be
number of degrees of freedom for an operational input.
replaced, which would allow systems to power on and off
Unipolar switching involves only one degree of freedom:
without rebooting. Moreover, RRAMs could be substitutes
the amplitude of the applied input (voltage/current), whereas
for hard disks once they achieve comparable life spans.
bipolar switching involves two: the amplitude and the polarity.
There are a number of review papers on resistive switching
Unipolar and bipolar switching behaviours are given by
[13, 14, 38, 44–47]. However, most of them only partially deal
functions of a scalar and a vector variable, respectively.
with switching materials. In the present review, we address
Since unipolar switching does not rely on the polarity of the
almost all switching materials and the important basics of
applied input, I –V loci showing set (HRS→HRS) and reset
resistive switching.
(LRS→HRS) switching can be plotted in both the first and
third quadrants of an I –V graph.
2. Basics of resistive switching As illustrated in figure 2, we define I –V loci of set and
reset switching for voltage application as fset (V ) and freset (V )
Several insulating materials sandwiched between two
in the first quadrant of an I –V plane. Unipolar switching
electrodes (MIM) show hysteretic I –V characteristics. The
can present any combination of set and reset switching
origin of the I –V hysteresis appears to be twofold: time-
curves in a set of ((fset (V ) or −fset (−V )) and (freset (V )
dependent ac current and hysteretic dc current. The former
or −freset (−V ))), i.e. four combinations are possible. Note
7 wok.mimas.ac.uk that some combinations, (fset (V ) and −freset (−V )) and
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Rep. Prog. Phys. 75 (2012) 076502 D S Jeong et al
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Rep. Prog. Phys. 75 (2012) 076502 D S Jeong et al
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Rep. Prog. Phys. 75 (2012) 076502 D S Jeong et al
Table 2. Major electronic carrier types of several TMOs of various valence states. Blanks in the table mean either that the corresponding
TMOs are metallic or that they do not exist as stable phases.
Ti–O V–O Cr–O Mn–O Fe–O Co–O Ni–O
+1 (M2 O)
+2 (MO) p [60] p [60] p [60] p [60]
+2.66 (M3 O4 ) p [59]
+3 (M2 O3 ) n or p [61, 62] n [62]
+4 (MO2 ) n [62] n [63] n [62]
+5 (M2 O5 ) n [62]
Cu–O Nb–O Ta–O W–O
+1 (M2 O) p [62]
+2 (MO) n or p [62]
+2.66 (M3 O4 )
+3 (M2 O3 )
+4 (MO2 ) n [64]
+5 (M2 O5 ) n [65] n or p [66]
+6 (MO3 ) n [67]
binary TMOs, especially TiO2 and NiO, which are well-known impurity energy band, the model by Simmons and Verderber
n-type and p-type semiconductors, respectively [59]. differs from Hickmott’s model because they assumed metal
A large number of binary TMOs are resistance-switchable. ions injected from the anode to result in the impurity band [70].
Since transition metal ions can vary their valence states, a Although the authors did not explicitly mention a mechanism
number of point defects with a certain limitation can be for metal ion injection, in context it can be estimated that the
included in a TMO matrix without phase transition. This injection occurs in an electrical manner through electrostatic
leads to non-stoichiometry, which can be described as MOx+δ , forces on the ionized metal atoms. Basically, these two models
where ‘M’ and ‘O’ denote transition metal ion and oxygen ion, presume the electronic transport through the junction to be
respectively. Non-stoichiometric TMOs are classified as hypo- band conduction by delocalized electrons.
and hyper-stoichiometric oxides relying on the sign of the According to Barriac et al, metal ion injection from the
deviation δ, the former and latter take the negative and positive anode into the insulating layer was estimated to be a result
deviations, respectively. The introduction of charged point of the local fusion of the anode and insulator, induced by
defects in a TMO matrix leads to a change in the electronic the large power dissipation during electroforming [71]. This
carrier concentration so that this is effectively identical to an model differs from the model by Simmons and Verderber in
extrinsic doping effect (self-doping). The major electronic the mechanism for metal ion injection. Electric current in
carrier types of hypo- and hyper-stoichiometric TMOs are the model by Barriac et al is attributed to ionic as well as
electrons and holes, respectively. The major electronic carrier electronic current by quantum mechanical tunnelling through
type of several TMOs of different valence states is summarized the insulating barrier.
in table 2. Greene et al [72] approached an electroforming mecha-
Based on experimental observations, we can summarize nism from a different point of view from the aforementioned
remarkable phenomena occurring during electroforming: (i) mechanisms. In their model, the electrochemical reactions in
electrolysis (anodic) reactions and ion migration, (ii) resistance insulator ‘MX’, the oxidation of anion ‘X − ’ (X − → X + e− )
change, and (iii) phase transition and Joule heat. They will at the anode and the reduction of monovalent cation ‘M + ’
be separately discussed in detail in sections 3.2–3.4. Before (M + + e− → M) at the cathode were assumed to take place,
we go through recent observations in electroforming, we and anion vacancies are injected from the ‘cathode’. That is,
will give a brief overview on several early mechanisms for this model presumes phase separation in the insulator and gas
electroforming, which were mostly introduced in the 1960s evolution at the anode. However, it is hard to understand that
and 1970s. anion vacancies are injected from the ‘cathode’ because in
general anion vacancies are supposed to be introduced at the
3.1. Early mechanisms for electroforming anode as a result of an anodic reaction, X − → X + e− , that
×
is, XX → VX· + e in the Kröger–Vink notation [73]. Greene
Some mechanisms for electroforming, i.e. S-shaped I –V et al regarded electron hopping along ordered –M–vacancy–
behaviour, were suggested in the 1960s and 1970s by pioneers M– chains as the conduction mechanism in the electroformed
in the field. An overview on these mechanisms is nicely state.
presented in the review paper by Dearnaley et al [38]. Hickmott Dearnaley et al emphasized that electroforming leads to
saw electroforming from a purely electronic point of view CFs, i.e. localized conduction [74]. Earlier, Dearnaley had
[68, 69]. In this model, the ionization of immobile impurities pointed out that the CFs begin to grow at several points at the
at the electroforming leads to the evolution of an impurity insulator/anode interface, where the local electric fields are
energy band in the forbidden gap so that electrons in the high [56]. The growth direction of the CFs, which Dearnaley
cathode can inject into the impurity energy band without a suggested, is inconsistent with the models based on virtual
thermionic emission process. Regarding the origin of the cathode migration due to drift–diffusion of point defects.
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Rep. Prog. Phys. 75 (2012) 076502 D S Jeong et al
Figure 5. Scanning electron microscope (SEM) images of Pt/TiO2 /Pt switching cells electroformed by applying (a) a positive voltage and
(b) a negative voltage to the 10 nm thick TE, respectively. The inset is a cross-sectional SEM image along the dashed line in figure (b).
Reproduced with permission from [53]. Copyright 2009, Forschungszentrum Jülich.
Details of this model are discussed in section 3.2. Electron In a Pt/TiO2 /Pt cell, it has been identified that oxygen
hopping along one-dimensional chains was estimated to be the gas is evolved at the anode by measuring the dependence of
dominant conduction mechanism in the electroformed state. morphological changes on the polarity of the electroforming
Dearnaley et al also assumed an anodic reaction involving voltage (see figures 5(a) and (b)). When TE was used
oxygen gas evolution to occur at the anode. as the anode (figure 5(a)), the TE locally disappeared,
The mechanisms by Greene et al and Dearnaley et al which may result from the eruption of oxygen gas through
regard switching cells as open systems exchanging oxygen gas the TE. The formation of doughnut-shaped explosive spots
with atmosphere (oxygen reservoir). Greene et al introduced during electroforming and set switching was already found
a model of the incorporation of oxygen gas in air into in Au/ZrO2 /Zr unipolar switching cells more than 40 years
the insulator as a result of the cathodic reaction, 1/2O2 + ago (1970) [78]. When BE was used as the anode
2e− → O2− [72]. In terms of Greene’s and Dearnaley’s (figure 5(b)), the formation of bubbles was found underneath
hypotheses, the electrode dependence of electroforming can the switching cell. Similar observations have been reported
also be understood. These models consider possible oxidation in ferroelectric films: the local phase decomposition due to
reactions at the insulator/anode interface between the oxygen- repeated ferroelectric switching and numerous bubbles in 1010 -
reactive electrode and evolved oxygen gas, and point out that cycle-fatigued electrodes after re-annealing in oxygen [79].
these oxidation reactions lead to second oxide phases hindering Anodic reactions have also been found in the
the electroforming [72, 74]. electroforming of Cr-doped SZO [80]. X-ray absorption near-
Over more than two decades, Chudnovskii et al edge spectroscopy (XANES) at the Cr absorption K-edge, in
conjectured that electroforming in some anodic binary TMOs, fact, revealed that the electroforming leads to the oxidation of
such as TiO2 , V2 O5 , Fe2 O3 and Nb2 O5 , leads to phase doped Cr ions underneath the anode and no valence change of
transition from the highest oxides (most resistive) to lower those underneath the cathode [81]. However, XANES analysis
oxides (less resistive) [75]. Their prediction was based on on the area between the anode and cathode showed that oxygen
simple free energy calculations of lower oxide formation vacancies rather than Cr ions were responsible for the CF
reactions, for instance, Nb + 2Nb2 O5 → 5NbO2 . The formation [80]. More oxygen vacancies were found in the
calculated energies were found to be negative, i.e. spontaneous, vicinity of the anode than near the cathode, and hence the anode
and the Joule heat generated during the electroforming was is thought to be an oxygen vacancy source resulting from the
thought to accelerate these spontaneous reactions [75]. Note anodic reaction, 2O2− → O2(g) + 4e− , that is, O× ··
O → VO + 2e
that this calculation is only valid for a TMO (MOx ) film on an in the Kröger–Vink notation [73].
‘M’ electrode.
If a noble metal such as Pt or Au is used as the anode
of a switching cell, the oxygen gas can be incorporated into
3.2. Electrolysis (anodic) reactions and ion or ionic defect the anode, as a result of the anodic reaction, which then
migration forms chemisorption bonding with the anode metal. Noble
As observed by Greene et al [72] and Dearnaley et al [74], oxy- metals form very strong and dense chemisorption bonding with
gen gas formation and subsequent structural deformation have oxygen atoms at their surface within a few monolayers instead
been frequently observed in several switching oxides such as of metal-oxide phases [82]. Pt is especially regarded as a
SrTiO3 (STO) [76], Fe-doped STO [51] and TiO2 [53, 58, 77]. catalyst for oxygen gas decomposition [82]. The incorporation
The gas evolution most likely results from the electrolysis (ano- of oxygen into the Pt anode of a ferroelectric junction was first
dic) reaction, 2O2− → 4e− + O2(g) , implying that the number identified by Jung et al [83]. Subsequently, oxygen in the Pt
of anions in the oxides is not conserved and the electroforming anode of an electroformed Pt/TiO2 /Pt switching cell has been
is affected by the partial pressure of atmospheric oxygen gas identified by time-of-flight secondary ion mass spectrometry
because the reverse reaction also occurs. (TOF-SIMS) analysis by Jeong et al (see figure 6) [58]. The
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Rep. Prog. Phys. 75 (2012) 076502 D S Jeong et al
Figure 6. (a) Oxygen ion signal of TOF-SIMS analysis, integrated over depth on a 100 × 100 µm2 Pt TE. This switching cell was
electroformed by applying a positive voltage to the TE. The depth profiles of each element at a dark point (A) and a bright point (B) are
plotted in (b) and (c), respectively. The depth profile of oxygen in the TE at B shows a higher concentration of oxygen than A, which is
almost identical to that in the pristine. Reprinted with permission from [58]. Copyright 2008, American Institute of Physics.
distribution of oxygen in the TE over the TE area was found to by thermodynamic and/or electrochemical reduction. As
be non-uniform as shown in figure 6(a). However, if the anode shown in equations (1) and (2), both defects introduce two
metal is oxygen-reactive, the evolved oxygen gas perhaps delocalized (free) electrons and thus serve as donors. The
reacts with the anode metal, introducing a second metal-oxide population of free electrons therefore increases so that MOx−δ
phase(s) at the interface between the anode and switching oxide is an n-type semiconductor. The defect structure of non-
layers. For instance, an Al anode would form a very thin but stoichiometric TiO2 was controversial, whether the hypo-
highly insulating oxide layer at the interface, and thus this layer stoichiometry arises from equation (1) [85–88] or equation (2)
probably hinders the transition into the electroformed state as [89–91]. However, as Marucco et al have demonstrated,
expected by Greene et al [72] and Dearnaley et al [74]. the dominant defect type in TiO2 is believed to depend on
Many hypo- and hyper-stoichiometric TMOs, shown in temperature; oxygen vacancy and Ti interstitial are low-
table 2, are resistance-switchable. Dealing with detailed and high-temperature-stable defect types, respectively [87].
electroforming mechanisms of all the switching TMOs is Therefore, the major defect type in TiO2 at room temperature,
beyond the scope of this review paper. TiO2 and NiO concerned with electroforming, is most likely oxygen vacancy
are examples of hypo- and hyper-stoichiometric TMOs, rather than Ti interstitial.
respectively [59], and their electroforming mechanisms will On the other hand, hyper-stoichiometry (MOx+δ , δ > 0)
be discussed in detail. Before we begin to go through arises from the formation of (iii) oxygen interstitials or (iv)
the mechanisms, it will be helpful to discuss the basic cation vacancies [84]. Again let us regard the transition metal
defect chemistry of non-stoichiometric binary TMOs. Hypo- ion to be divalent. The formation reactions for (iii) and (iv) are
stoichiometry (MOx−δ , δ > 0) results from the formation of (i) written in the Kröger–Vink notation [73] as
oxygen vacancies or (ii) cation interstitials [84]. For simplicity,
let us consider divalent transition metal ion, M 2+ , i.e. x = 1 in 1
O2(g) → Oi·· + 2h· (3)
MOx−δ . The formation reactions for (i) and (ii) are expressed 2
in the Kröger–Vink notation [73] as and
1
1 O2(g) → OO× + VM + 2h· , (4)
O×
O → VO··
+ 2e + O2(g) (1) 2
2
respectively. These defects are the results of thermodynamic
and and/or electrochemical oxidation. They serve as acceptors
× 1
MM + O× ··
O → Mi + 2e + O2(g) , (2) so that MOx+δ is a p-type semiconductor. Several transition
2 metal monoxides with divalent transition metal ion, e.g. NiO,
respectively. These defects are inherently present in hypo- CoO, MnO and FeO, are known to be cation-vacancy-dominant
stoichiometric MOx−δ , and additional ones can be introduced hyper-stoichiometric TMOs [60].
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Rep. Prog. Phys. 75 (2012) 076502 D S Jeong et al
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Rep. Prog. Phys. 75 (2012) 076502 D S Jeong et al
Figure 9. Schematic of CF growth in (a) hyper-stoichiometric NiO and (b) hypo-stoichiometric TiO2 . The red arrows indicate the migration
direction of oxygen vacancies and the navy that of Ni vacancies.
hypo-stoichiometric TMO, CF growth procedures in hypo- 3.3. Resistance change during electroforming
stoichiometric TiO2 are also illustrated in figure 9(b). These
CFs can be ruptured and reformed during the subsequent In hypo-stoichiometric TiO2 , the charge neutrality condition is
switching operation. For TiO2 and NiO, the location of the fulfilled by reduced Ti ions following the reduction reaction,
active regions where the CF rupture and reformation occur Ti4+ + ne− → Ti(4−n)+ . This reaction increases the population
will be discussed in section 4.4.2. of free electrons in the conduction band, which consists
From the electroforming mechanisms of these prototypi- of 3d orbitals of the Ti ions. The oxygen-deficient phase
cal hypo- and hyper-stoichiometric TMOs, we can draw gen- growing from the cathode during the electroforming contains
eral conclusions about the features of electroforming behaviour a large number of reduced Ti(4−n)+ ions, and thus the
of TMOs, which have CFs consisting of lower oxide phases or phase’s conductivity is much higher than the stoichiometric
even metallic phases, as follows: (i) the transition into a lower phase. Moreover, the role of the cathode/TiO2 interface in
valence state is a result of the electrochemical reduction of the electron blocking may become less obvious with increasing
highest (pristine) valence state, and (ii) the reduction reaction concentration of oxygen vacancies. Details of this relationship
most likely occurs at the cathode, and thus CFs grow from the will be dealt with in section 4.4.1. It can be estimated that the
cathode to the anode. migration of the virtual cathode of the TiO2 switching cell leads
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Rep. Prog. Phys. 75 (2012) 076502 D S Jeong et al
Figure 10. High-resolution TEM image of (a) a cone-shaped CF of a Magnéli phase (Ti4 O7 ) in a TiO2 matrix [98] and an hourglass-shaped
CF of two Magnéli phases (Ti4 O7 and Ti5 O9 ) [99]. Reprinted with permission from [98, 99]. Copyright 2010, Nature Publishing group, and
2011, American Institute of Physics, respectively.
to the shrinkage of the effective length of the TiO2 resistor, figure 11). They also demonstrated that the oxygen-deficient
implying a decrease in the resistance. CF consists of two different Cu–O phases, CuO and Cu2 O,
For NiO, the phase boundary between Ni and NiO serves using Raman spectroscopy, which is shown in figure 11(c).
as the virtual cathode, and also moves towards the anode. The Electroforming is therefore generally understood in terms
effective length of the NiO resistor also decreases as the virtual of nano-short (nano-filamentary conductive path of a different
cathode moves. One can therefore draw the conclusion that the phase(s) from the host pristine phase). Nano-short generally
resistance degradation during electroforming arises from the involves a dendrite-shaped ‘moving (virtual) cathode’, which
migration of the virtual cathode towards the anode regardless was first studied in detail by Plumlee at Sandia in 1967 [102].
of the non-stoichiometry types, hypo- or hyper-stoichiometry. Nano-shorts in ferroelectric PZT are thought to be caused by
When the virtual cathode reaches the anode, abrupt degradation the phase transition of PZT. Micro-Raman spectroscopy with
of the resistance occurs, as shown in figure 4. Then, the a spatial resolution of 1 × 1 µm2 on fatigued regions of a PZT
electroformed state is eventually achieved. film identified the chemical decomposition of PZT into litharge
Resistance degradation in ferroelectric perovskite-type and massicot forms of PbO, together with the production
complex TMOs, e.g. PZT, has been found to exhibit of rutile TiO2 [79]. This was the first direct verification
complicated phenomena including phase separation into of phase transition in nano-shorts. Fatigued ferroelectrics
several phases. For instance, in PZT, ‘nano-shorts’, meaning share several aspects with electroforming-induced phenomena,
the formation of CFs at the nanoscale, is thought to be such as the formation of CFs (nano-shorts), phase transition
responsible for resistance degradation [97]. or phase separation, and evolution of gas bubbles [79, 97].
Annealing fatigued Pt TEs on a PZT film results in gas
3.4. Phase transition bubbles, which are probably oxygen gas from volatile Pb or
PbO [79]. Although direct correlation between ferroelectric
After the theoretical expectation of electroforming-induced fatigue and electroforming has not yet been clarified, there
phase separation in some binary TMOs by Chudnovskii et al, are phenomenological similarities between the two seemingly
CFs in TiO2 were directly observed by Kwon et al by means of unrelated processes.
TEM in 2010 [98]. They found CFs consisting of the Magnéli For the phase transition of TMOs, a certain amount
phase (Tin O2n−1 , n = 4), implying that phase transition is also of thermal energy is necessary. The Joule heat generated
involved in electroforming as well as resistive switching. Kim during electroforming is most likely responsible for this
et al later observed another Magnéli phase (Tin O2n−1 , n = 5) thermal energy. Electroforming results in morphological
in CFs [99]. Figures 10(a) and (b) show the cross-sectional changes (demolition) (see figure 5). The volcano-like shapes
TEM images of a cone-shaped CF (Ti4 O7 ) and an hourglass- indicate that melting and gas (most likely oxygen) eruption
shaped CF (Ti4 O7 and Ti5 O9 ), respectively. Strachan et al simultaneously occurred during electroforming. The changes
also found a phase transition, from TiO2 to Ti4 O7 , in TiO2 by imply that the cell became very ‘hot’ during the electroforming
a scanning transmission x-ray microscope (STXM) as well as and the cell’s temperature was high enough to melt the Pt
a TEM [101]. STXM analysis identified multivalent Ti ions, electrode. The melting temperature of Pt is approximately
Ti3+ and Ti4+ , in CFs, which does not necessarily imply phase 2041 K.
transition. However, TEM analysis with STXM measurement
could identify the phase transition.
3.5. Electroforming into unipolar or bipolar switching
Phase transition in Pt/CuO/Pt unipolar switching cells
has been reported by Yajima et al [100]. They showed the For both unipolar and bipolar switching, almost the same
electroforming-induced formation of an oxygen-deficient CF electroforming process is used. However, what activates only
connecting the anode and cathode by SIMS analysis (see one of the two different types can be found in switching
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Rep. Prog. Phys. 75 (2012) 076502 D S Jeong et al
Figure 11. Oxygen, (a) 16 O and (b) 18 O, distribution in an electroformed lateral Pt/CuO/Pt device, measured by two-dimensional SIMS
analysis. An oxygen-deficient CF connecting the anode and cathode can be seen in the figures. (c) Raman spectra of the CF and
non-filamentary area, which identify the presence of the cuprous oxide phase (Cu2 O) in the CF. Reprinted with permission from [100].
Copyright 2010, The Japan Society of Applied Physics.
systems in which both switching types coexist, e.g. Pt/TiO2 /Pt. 4.1. Resistive switching in oxides
Jeong et al regarded a programmed compliance current in
4.1.1. Binary TMOs. Resistive switching and negative
the electroforming as the factor determining switching type
differential resistance phenomena in binary TMOs, e.g. TiO2
in Pt/TiO2 /Pt [103]. Low compliance currents (<0.1 mA)
[36], NiO [104] and Nb2 O5 [105], were already reported in
activated bipolar switching rather than unipolar switching,
the 1960s. Although some related publications had been
whereas high compliance currents (>1 mA) led to unipolar
published following these early findings, vigorous research
switching [103]. Moreover, programming higher compliance
had not been performed until 2000, when several researchers
currents for set switching of the bipolar switching led to a
initiated active investigations on resistive switching materials
bipolar-to-unipolar transition. These observations suggest that
for RRAM application. Diverse TMOs, e.g. period 4 element
higher power dissipations resulting from higher compliance
oxides such as TiO2 [17, 98, 103], VO2 [106], Cr2 O3 [107],
currents might activate unipolar switching.
MnOx [108], FeOx [109], CoOx [110], NiO [111, 112] and
Electroforming into bipolar switching may be a process
Cux O [100], period 5 element oxides such as Nb2 O5 [113],
introducing asymmetric interfaces in a two-terminal switching
and period 6 element oxides such as TaOx [49, 114] and
cell, which are beyond the asymmetry due to asymmetric
WOx [115–118], have been found to show characteristic non-
electrodes, i.e. different TE and BE. Thus, the electroforming
volatile resistive switching behaviour. The d block element
may take one of the two interfaces as an active interface,
oxide ZnO that does not belong to the TMO category also
depending on the polarity of the electroforming voltage. appears to be resistance-switchable [119]. Some binary TMOs
The interface may be electrochemically active so that redox such as TiO, VO, MnO, FeO, CoO and NiO are regarded
reactions, e.g. equations (1)–(4), taking place in the vicinity as Mott insulators exhibiting Mott transitions (insulator-to-
of the interface are probably responsible for the subsequent metal transitions) [120–122]. However, the Mott transition is
bipolar switching. Indeed, in a symmetric Pt/TiO2 /Pt cell, it attributed to a purely electronic phenomenon due to electron–
has been reported that the polarity of the electroforming voltage electron correlation, so that it differs from the microstructure-
determines the consequent bipolar switching behaviour, or defect-related resistive switching discussed in this review.
whether eightwise or counter eightwise [58]. We will review binary TMOs in periods 4, 5 and 6 in the
sequence of their atomic numbers. The first element among the
4. Resistive switching materials and mechanisms transition metals in the periodic table is Ti. This element has
been most widely investigated. Argall’s first finding in 1968
Resistive switching is observable in various functional did not tell the polarity of the applied switching voltage, so
materials, e.g. dielectric, ferroelectric, ferromagnetic and that the observed switching could not be classified as unipolar
semiconducting materials, which are basically oxides and or bipolar. In 2007, almost 40 years after the first report,
higher chalcogenides. Most switching materials show Jeong et al found bipolar switching behaviour in Pt/TiO2 /Pt
filamentary-type switching behaviour. Non-filamentary- cells and the coexistence of bipolar and unipolar switching
type switching has also been observed in a few systems. behaviours [103]. Recently, researchers at Hewlett-Packard
Mechanisms for filamentary- and non-filamentary-type labs have found ‘the missing circuit element’ memristor (the
switching phenomena have not been clarified, although fourth passive circuit element that was predicted theoretically
up to now some experimental evidence supporting several nearly 40 years ago [123]), which triggered great interest in the
hypotheses has been revealed. In the following sections, we application of TiO2 -based memristors to RRAMs, as well as
survey various switching materials categorized into oxides synapse-mimic analogue switches for neuromorphic systems
(section 4.1), higher chalcogenides (section 4.2), and carbon- [124–128].
based and other materials (section 4.3). In section 4.4, several When one looks at the phase diagram of V–O compounds,
mechanisms for resistive switching will be reviewed. it can be seen that the phase diagram is almost identical to that
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Rep. Prog. Phys. 75 (2012) 076502 D S Jeong et al
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Rep. Prog. Phys. 75 (2012) 076502 D S Jeong et al
WO3 may be the best choice as a switching material for In the case of resistive switching in multiferroics, the
its compatibility with conventional tungsten via structure in diode-like forward-to-backward current ratio can exceed
semiconductor devices. WO3 has been demonstrated as a 100 : 1, parallel or antiparallel to the polarization; some act as
solid electrolyte in ECM cells [141]. In this case, WO3 is ferroelectric Schottky-diodes where the Schottky barrier height
a cation-diffusion medium rather than an intrinsic switching (SBH) at the metal/multiferroic interface is altered by the
material. Similar to Ti–O and V–O compounds, W–O remnant polarization. However, the situation is complicated.
compounds are able to accommodate oxygen deficiency by The mechanism is neither intrinsic nor clearly understood even
forming crystallographic shear planes, i.e. Magnéli phases. though there are a number of reports on resistive switching in
However, microscopic investigations seeking the correlation multiferroics [152–155]. Very recently, these devices have
between microstructure and resistive switching have not yet had a breakthrough using multiferroic BFO; switched current
been conducted. WO3 has been known to exhibit bipolar densities of >5 A cm−2 were achieved, which is about 1000×
switching with various combinations of TE/BE, e.g. Pt/W greater than those in PZT, and sufficient for any memory sense
[116], Au/(fluorine-doped tin oxide (FTO)) [118] and Al/FTO amplifier to discriminate +P from −P, i.e. ‘1’ from ‘0’. Very
[115]. When W is employed as a BE material, WO3 can good retention was another breakthrough realized (>3 months
be formed by thermal oxidation without additional deposition in 720 specimens tested) [156]. And perhaps most important,
processes. Kim et al have demonstrated excellent switching the fabrication process is CMOS-compatible with a real TE,
reliability in Pt/WO3 /W cells scaled down to 50 nm [142]. rather than a CAFM tip.
4.1.2. Perovskite-type complex TMOs. Perovskite- 4.1.3. Large band gap high-k dielectric oxides. Owing to the
type complex TMOs exhibit various functionalities, e.g. need for high-k and low leakage current materials in DRAM
paraelectric, ferroelectric, colossal magnetoresistance (MR), and CMOS, high-k dielectrics of large band gaps (highly
multiferroic, and, of course, resistive switching. As briefly insulating) have been intensively investigated. There have
stated earlier, perovskite-type paraelectric Cr-doped SZO is been some efforts to detail the nature of resistive switching
one of pioneer materials [15, 40]. Several other paraelectric in such dielectrics including Al2 O3 [34, 157–163], and Gd2 O3
perovskite-type complex TMOs such as STO [76, 143] and [164–166]. Al2 O3 films are employed in switching cells in
(Ba,Sr)TiO3 (BST) [144, 145] have also been found to exhibit various ways: Al2 O3 in contact with (i) inert electrodes, e.g.
resistive switching. Pt and Au (ii) Al electrodes, and (iii) in other oxygen-reactive
Resistive switching in ferroelectric complex TMOs is electrodes, e.g. Ti.
believed to have first been reported in Au/PTO/LSCO (i) Al2 O3 films with some inert electrode materials, for
ferroelectric Schottky diodes by Blom et al [39]. They instance, Pt/Al2 O3 /Ru and Au/Al2 O3 /Au, exhibit unipolar
believed that ferroelectric switching alters the carrier-depletion switching [157, 163]. However, a comparative study on
width and thus the conductivity of delocalized electrons in the unipolar switching behaviour of Pt/Al2 O3 /Ru and
PTO. Another type of ferroelectric-related resistive switch is Pt/TiO2 /Ru shows poor stability of set and reset switching
ferroelectric tunnel junction (FTJ) [146, 147]. In an FTJ, the voltages as well as low HRS-to-LRS ratios of Pt/Al2 O3 /Ru
tunnelling matrix element, i.e. tunnelling probability, varies compared with Pt/TiO2 /Ru [157].
with the ferroelectric switching so that ferroelectric-resistive (ii) When Al electrodes are used in Al2 O3 -based switching
switching can be achieved. BaTiO3 (BTO)/SrRuO3 (SRO) cells, both unipolar and bipolar switching natures could be
[148] and PZT/Lax Sr 1−x MnO3 (LSMO) [149] systems observed. Karthäuser et al have found bipolar switching in
without TE have recently shown FTJ behaviour, which were ZnO/Al2 O3 /Al cells with 50 nm thick Al2 O3 films [161].
measured using conductive atomic force microscope (CAFM). Anodic aluminium oxide (AAO) has also been identified
Discussions on FTJs in detail will be given in section 4.4.4. as a resistive switching material [158, 159]. Interestingly,
Memories based on tunnel junctions with ultrathin Kato et al and Yalishev et al respectively reported unipolar
ferroelectric barriers would enable non-destructive resistive switching and bipolar switching in Ag/AAO/Al cells.
read-out, contrary to the sub-micrometre thick ferroelectric This may mean that AAO has both unipolar and bipolar
films currently used in FRAMs with destructive capacitive switching natures. However, as discussed in section 2.1,
read-out. Recent studies on highly strained BTO observed set and reset switching occurring in different quadrants
the electroresistance effect that scaled exponentially with on an I –V plane do not necessarily indicate bipolar
ferroelectric film thickness, reaching ∼75 000% at 3 nm [150]. switching. One should therefore confirm the polarity
This resistive read-out of the polarization state can also result dependence of resistive switching in AAO carefully before
in density beyond the gigabit regime through its influence on drawing the conclusion that unipolar and bipolar switching
the tunnel current. coexist in this system.
In 2000, the MR material PCMO was found to exhibit (iii) There have been some publications on resistive switching
EPIR behaviour [16]. This finding was somewhat surprising phenomena in Al2 O3 films in contact with a Ti electrode,
because the applied electric field was solely able to toggle which is oxygen-reactive [160, 167]. Sometimes, the Ti
the resistance states at room temperature; the application of electrode is formed on an Al2 O3 film using an ex situ
a magnetic field was unnecessary. Nian et al identified that deposition process. An Al2 O3 film exposed to humid air
the EPIR effect arises from the oxygen vacancy migration and most likely forms a thin aluminium hydroxide layer at
redistribution rather than the MR effect [151]. the surface [168]. The aluminium hydroxide layer may
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Rep. Prog. Phys. 75 (2012) 076502 D S Jeong et al
turn to an Al2 O3 layer with oxidizing the subsequently was very unstable [170]. Single-crystalline ZnTe films grown
deposited oxygen-reactive metal layer [169]. Therefore, on Ge substrates also exhibited bipolar switching [173].
the Ti electrode grown on the aluminium hydroxide layer Jeong et al have reported unipolar switching found
is probably oxidized to either TiO2 or lower Ti oxide. in amorphous selenides, GeSe and GeSex Te1−x [174].
As discussed earlier, TiO2 and lower Ti oxides are also Filamentary conduction in the LRS was observed, implying
resistive switching materials, so that the interfacial Ti that CFs were involved in the observed unipolar switching.
oxide layer in this switching cell may contribute to Amorphous GeSe also exhibits volatile resistive switching, i.e.
resistive switching. threshold switching [175], meaning the coexistence of volatile
and non-volatile (unipolar) switching in this system. Se itself
Mechanisms for resistive switching in Al2 O3 have been appears to be a bipolar switching material as Matsushita et al
proposed including the phase transition of Al2 O3 due to Joule have reported [176]. However, since the authors used diffusive
heat [162], the trapping and detrapping of electronic carriers Cu electrode which is often used in ECM cells [14], it is not
[162], and the formation and rupture of CFs [163]. certain whether the switching was attributed to the Se film or
Gd2 O3 is also a resistive switching material. Cao et al the electrode. Okushi et al have shown that single-crystalline
have successfully measured unipolar switching in Pt/Gd2 O3 /Pt ZnSe films on Ge substrates show bipolar switching [52].
cells [164]. They used a Gd2 O3 film grown in oxygen- Recently, Mott insulators AM4 X8 (A = Ga, Ge; M = V,
deficient atmosphere, and thus the film was initially quite Nb; X = S, Se) have been found to exhibit the coexistence of
leaky. The leaky switching cells worked well even without volatile and non-volatile resistive (unipolar) switching [177].
electroforming. However, a Gd2 O3 film deposited under high The mechanism has been speculated to be an electric-field-
oxygen pressure was highly insulating, so that electroforming induced insulator-to-metal transition without changes in the
is required for subsequent resistive switching [164]. Not microstructure of the Mott insulators. These phenomena were
only Pt but also other electrode materials such as Ti and considered from a purely electronic point of view. However,
transparent indium-tin-oxide (ITO) were used in Gd2 O3 -based this point of view is controversial because of a voltage–time
switching cells [165, 166]. ITO/Gd2 O3 /ITO cells are optically dilemma [178]. This will be discussed in detail in section 4.4.3.
transparent, and thus they can be basic elements of transparent
RRAMs. An interesting point is that ITO/Gd2 O3 /ITO cells 4.3. Carbon-based materials and other materials
represent the coexistence of unipolar and bipolar switching
natures. In terms of stability, bipolar switching is preferable Several recent papers have reported resistive switching in
to unipolar switching [166]. However, the HRS-to-LRS ratio graphene oxide films [179, 180]. It should be noted that these
of bipolar switching is much smaller than unipolar switching. systems have either (i) diffusive electrodes such as Cu, or (ii)
oxygen-reactive electrodes such as Al.
4.2. Higher chalcogenides (i) In this case, most insulating films allowing Cu ions
to diffuse through them may show bipolar switching
This section is dedicated to resistive switching in higher attributed to the formation and rupture of Cu CFs.
chalcogenides, i.e. chalcogenides excluding oxides. This Therefore, in this system the graphene oxide film serves
review will not cover phase-change-type higher chalcogenides as a cation diffusion medium and a spacer separating
because they fall into the category of PCMs. the two electrodes so that the observed bipolar switching
A number of higher chalcogenides, e.g. sulfides, tellurides cannot be regarded as an intrinsic property of the graphene
and selenides, are known as resistive switching materials. We oxide film.
refer to these higher chalcogenides as ‘resistive switching (ii) Resistive switching in this case is most likely attributed to
materials’ rather than PCMs because their behaviour cannot an interfacial Al2 O3 layer, generally AlOx , between the
be understood in terms of phase-change. Some amorphous Al electrode and graphene oxide.
sulfides, e.g. As2 S3 and Sb2 S3 [170], and crystalline sulfides, In the 1970s, the ‘polarized memory effect’ in amorphous
e.g. CdS and PbS [171], exhibit bipolar switching, known carbon films was investigated, but is now known as bipolar
as ‘polarized memory effect’. The phase-change results switching [181, 182]. The bipolar switching could be observed
in unipolar switching as the Joule heat bringing about the in a carbon-based cell employing an Al electrode as at
phase-change hardly depends on the polarity of the applied least one of the two electrodes [182]. Otherwise, neither
voltage/current. Therefore, this bipolar switching should be electroforming nor switching was achieved [182]. Similar to
distinguished from phase-change-type switching. Doughnut- the aforementioned bipolar switching in graphene oxides with
shaped explosive spots over the surface of these sulfides were Al electrode, this switching effect is perhaps attributed to the
observed after set switching as resistive switching oxides [170]. resistive switching of the interfacial AlOx layer. A diamond-
Resistive switching characteristics of amorphous tel- like carbon film with W electrode has also been studied as a
lurides, e.g. In2 Te3 and As2 Te3 [170, 172], and crystalline unipolar switching material [183]. The suggested mechanism
tellurides, e.g., ZnTe [173], have been reported in some pub- is the formation and rupture of conductive sp2 -type CFs in the
lications. A mechanism for the set switching of In2 Te3 was insulating sp3 -type carbon matrix.
proposed to be the electrothermal effect [172]. However, the Several organic materials, e.g. Rose Bengal [161],
switching-type (bipolar or unipolar switching) was not eluci- 2,3-dichloro-5,6-dicyano-1,4-benzoquinone [184], p-phen
dated in this paper. As2 Te3 showed bipolar switching, but it ylenevinylene [185], conjugated copolymer containing
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Rep. Prog. Phys. 75 (2012) 076502 D S Jeong et al
fluorine and chelated europium complex [186], also exhibit electrons and oxygen vacancies, or cation interstitials,
resistive switching natures and are potential candidates for depending on the dominant defect formation reaction (either
RRAMs. However, many switching organic materials are very equation (1) or (2)), serve as major charge carriers, whereas
often in contact with Al electrodes [161, 184, 185]. In fact, in hyper-stoichiometric oxides, delocalized holes and cation
Karthäuser et al have pointed out that switching cells utilizing vacancies, or oxygen interstitials, depending on the dominant
Al electrodes probably show the resistive switching effect of reaction (either equation (3) or (4)).
the interfacial AlOx layers rather than these organic films [161]. It is known that the I –V behaviour of metal/SE/metal
cells heavily relies on the electrode materials [145, 193, 194].
4.4. Mechanisms for resistive switching This implies the importance of property of the anode/SE (n-
type) and cathode/SE (p-type) interface for electronic carrier
We overviewed a number of resistive switching materials in injection. The Schottky barrier formed at the metal/SE
the previous sections. In spite of the variety of possible interface plays an important role in the electronic transport,
switching materials, the number of materials that are actually mostly injection through the SBH. Ideally, the SBH is defined
responsible for resistive switching seems to be not as many as as the difference between the electron affinity of the SE and
that of nominal switching materials. Namely, second phases work function of the metal. The SBH is therefore supposed to
that are interfacial, unintentionally formed and known to be be proportional to the work function of the metal. However,
resistance-switchable by themselves are perhaps in charge of in reality there may be an interfacial layer between the metal
the resistive switching in many systems, as discussed in the and SE, which is equivalent to a thin-slab-shaped capacitor.
previous section. However, there are still too many switching A certain voltage drop through the layer occurs, leading to
materials left to figure out the mechanism of each. Fortunately, a deviation of the SBH from the ideal value as suggested by
there is the general and system-independent consensus that Cowley and Sze [195].
CFs play a key role in resistive switching. Of course, there are Yang et al identified a role of the interfacial layer in
exceptions, i.e. switching systems showing scaling resistance the current injection through the metal/SE interface in TiO2
with pad size. A few of these are, e.g., Fe-doped STO [51], Nb- in contact with various electrode metals [193]. The SBH
doped STO [187] and WO3 [188], implying non-filamentary at the metal/TiO2 interface is strongly affected by the oxide
conduction and switching. Non-filamentary switching is formation free energy, rather than the work function, of the
sometimes known as interface-type switching [45]; it does metal as shown in figure 13 [193]. This suggests that the TE
not involve electroforming and both set- and reset-switching metal works as a reducing agent, resulting in the reduction
behaviours are gradual rather than abrupt, unlike filamentary of TiO2 . Moreover, a lower free energy of oxidation of a
switching cases. deposited metal results in a lower free energy of an oxygen
It is worth noting that filamentary conduction does not ion transfer reaction between the deposited metal and TiO2 .
necessarily lead to non-scaling resistance because resistance The reduction of TiO2 may introduce oxygen vacancies in
scaling is a matter of the distributional uniformity of CFs. the vicinity of the TiO2 surface while keeping the original
Consider the uniform distribution of CFs over the pad area of crystal structure. Otherwise, the reduction may lead to the
a switching cell. In this case, the resistance of the cell scales phase transition of TiO2 into its lower oxide. Either method
with the pad size, although the conduction is still attributed results in the lowering of the interfacial resistance so that the
to the CFs. Therefore, one cannot conjecture conduction and overall resistance decreases.
switching types from pad-size dependence. In the case of non- The Helmholtz and diffuse double layers need to be
scaling resistance of a switching cell, a few CFs whose number employed in a description of metal/SE interface [196–198].
is not proportional to the pad size probably contribute to the When a metal/SE junction is formed, the electron transfer
conduction. Indeed, this hypothesis is quite probable because between the metal and SE takes place due to an inherent
the growth of the CFs probably follows the winner-take-all difference in the electrochemical potential of electrons
procedure [57] as discussed in section 3. between the metal and SE. The electron transfer causes space
The interface between an electrode and a switching layer charge leading to an interfacial dipole layer and is equivalent
is perhaps of great importance for the conduction in the to a capacitor, as illustrated in the schematic in figure 14.
bi-stable states and the switching between the states. The Owing to the very high electron concentration in the metal,
interfacial resistance of several switching systems appears the electric field screening length on the metal side is very
to control the overall resistance and its change likely leads short. On the SE side, however, the electric field is screened
to resistive switching [189–192]. Therefore, it is worth by both electronic carriers and ions/defects through the diffuse
discussing some basic theories on the interface between an double layer. The number of charged carriers in the SE is
electrode and a switching layer with particular emphasis on generally not as great as that of electrons in the metal so
hypo-stoichiometric TiO2 . that the screening length is much longer. The ions on the
Helmholtz plane are responsible for the first screening and the
4.4.1. Interface between electrode and switching materials. electronic carriers and ions/defects in the diffuse double layer
Many switching oxides including binary and complex TMOs the second screening [196, 197]. The diffuse double layer in
are solid electrolytes (SEs) where not only electronic carriers SE differs from that in the liquid electrolyte where no electronic
but also mobile ions or ionic defects contribute to the carriers exist. Note that in SE the diffuse double layer of the
current transport. In hypo-stoichiometric oxides, delocalized conventional meaning may not be present because of the very
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Rep. Prog. Phys. 75 (2012) 076502 D S Jeong et al
Figure 13. Resistances at a read-out voltage of ±1 V of several metal/TiO2 /metal cells with the same Pt BEs and various TEs, Ti, W, Ni, Pt,
Ag and Au. The measured resistance values are plotted with respect to (a) the work function of the TEs and (b) the oxide formation free
energy of the TEs. Reproduced with permission from [193]. Copyright 2011, Springer.
through the Helmholtz layer, and thus the SBH, which the
electrons injecting from the metal see, decreases [53, 199].
The numerical calculation of I –V curves for Pt/TiO2 /Pt
junctions, where TiO2 has various profiles of oxygen vacancy
concentration, elucidated the aforementioned relationship
between the SBH and defect (oxygen vacancy) concentration
[199]. As shown in figure 15, the calculation results
indeed identify the change of the SBH with respect to the
concentration of oxygen vacancies in the diffuse double layer.
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Rep. Prog. Phys. 75 (2012) 076502 D S Jeong et al
Figure 15. (a) Calculated I –V curves for various profiles of oxygen vacancy concentration in TiO2 in a one-dimensional Pt/TiO2 /Pt
junction. A voltage is applied to the right Pt electrode while the left one is grounded. The oxygen vacancy concentration in the left (right)
diffuse double layer was assumed to be 1.28 × 1020 cm−3 (1.28 × 1020 cm−3 ) for A1, 1.28 × 1020 cm−3 (5 × 1020 cm−3 ) for A2,
5 × 1020 cm−3 (1021 cm−3 ) for A3, 2 × 1021 cm−3 (1021 cm−3 ) for A4, 2 × 1021 cm−3 (5 × 1021 cm−3 ) for A5, 8 × 1021 cm−3 (5 × 1021 cm−3 )
for A6, 8 × 1021 cm−3 (1022 cm−3 ) for A7, respectively. (b) Calculated electron energy band diagram in the Pt/TiO2 /Pt junction for A7 at
0 V. φm , V (0), Evac , χTiO2 , EF and EC denote the work function of Pt, a voltage drop through the left Helmholtz layer, the vacuum level, and
the electron affinity, the Fermi level, and the conduction band minimum of TiO2 , respectively. Reprinted with permission from [53].
Copyright 2009, Forschungszentrum Jülich.
the current through the CF is not prominent. According different behaviours can simultaneously take place depending
to Münstermann et al, an example of this case has been on the range of the applied voltage.
recently found in an Fe-doped STO film on a Nb-doped STO However, the interface responsible for the unipolar
[51]. They identified the coexistence of filamentary and non- switching in NiO is controversial. Kinoshita et al have
filamentary conduction behaviours in the system, as shown in estimated the anode/CF interface to be in charge of unipolar
figure 16(b). Moreover, they have also identified that non- switching [191]. This conclusion was drawn from the
filamentary conduction and switching can be dominant or observation that the HRS, programmed by applying a positive
at least comparable to filamentary conduction and switching voltage to the surface of the NiO film, was vulnerable to
so that the non-filamentary event is measureable in the sputtered Pt atoms on the surface. This may suggest that the
10 × 10 µm2 MIM junction. programmed region was located in the vicinity of the anode.
For TiO2 and BST, it can be seen that (i) the LRS of In contrast, Kim et al have conjectured that unipolar switching
unipolar switching shows metallic behaviour, whereas the takes place at the cathode from the results of switching
other states ((ii) the HRS of unipolar switching and both measurements on two series of NiO resistors [202].
(iii) LRS and (iv) HRS of bipolar switching) show thermally Baikalov et al performed switching measurements on
activated conduction behaviour with particular activation PCMO films exhibiting bipolar switching [189]. In their
energies [103, 201]. This implies that for the last three states, experiment, many switching cells were in series connections,
(ii), (iii) and (iv), the electronic conduction along CFs takes and each cell consisted of Ag/PCMO/YBa2 Cu3 O7 . Basically,
place by overcoming energy barriers whose heights correspond the measurement configuration was the same that Kim et al
to activation energies. By analogy with the conduction in used for TiO2 unipolar switching measurements [192]. It
pristine MIM junctions as discussed in the previous section, turned out that the Ag/PCMO interface was responsible for
the energy barrier for the three states, (ii), (iii) and (iv), may the resistance change, although they did not clarify whether
be placed at the cathode/CF interface; this means RCFM1 or the interface was the anode or cathode.
RCFM2 is a dominant resistor, depending on the polarity of the
applied voltage. However, no indication obviously identifying 4.4.3. Mechanisms for unipolar switching. Up to now
the interface-controlled conduction has been experimentally many different mechanisms for resistive switching have been
observed so far. introduced since the 1960s. Several prototypical models were
There has been indirect evidence pointing out what already suggested in the 1960s and 1970s by Hickmott [68, 69],
resistor(s) is responsible for resistive switching in several Simmons and Verderber [70], Barriac et al [71] and Dearnaley
switching cells. For instance, Kim et al have noticed anode- et al [74]. These models are universal rather than material-
induced unipolar switching in Pt/TiO2 /Pt cells, suggesting that specific, and thus they can be employed for many different
the anode interface is an active switching component [192]. switching materials. Note that all these models deal with only
For bipolar switching in Pt/TiO2 /Pt cells, Jeong et al indirectly unipolar switching.
found that both interfacial resistors of a CF(s) (RCFM1 and Hickmott [68, 69], and Simmons and Verderber [70] have
RCFM2 ) can be active, and each resistor is in charge of one of the attempted to explain N-shaped negative differential resistance
two different bipolar switching behaviours, i.e. eightwise and effects, i.e. reset switching, in terms of the interaction between
counter eightwise switching curves [190]. Moreover, the two electronic carriers and immobile impurities leading to localized
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Rep. Prog. Phys. 75 (2012) 076502 D S Jeong et al
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Rep. Prog. Phys. 75 (2012) 076502 D S Jeong et al
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Rep. Prog. Phys. 75 (2012) 076502 D S Jeong et al
TMO, which is driven by the electrochemical potential gradient An FTJ, another type of ferroelectric-resistive switch,
of oxygen vacancies, leads to the reduction of transition metal differs from the above-mentioned MFM junctions in its
ions. That is, the charge neutrality condition is satisfied by the mechanism for current transport through the ferroelectric,
reduction. The valence change may be assisted by the Joule which is quantum mechanical tunnelling [146, 147]. The
heat introduced during the ion/defect and electronic carrier change of a ferroelectric’s conduction band profile with
migration [214]. respect to the polarization direction results in the alternation
Set switching in a VCM cell arises from the reduction of the tunnelling matrix element and thus the resistive
of transition metal ions, which results in an increase in switching. However, resistive switching in some ferroelectrics
electron population in the d-band, i.e. the conduction band. is not caused by the ferroelectric switching [217, 218].
This implies that the reduction increases the number of free One possible way to distinguish resistive switching from
electrons and the conductivity. Reset switching can be ferroelectric switching is the simultaneous acquisition of
achieved by altering the applied voltage polarity. The altered electric currents and ferroelectric-switching-related responses,
polarity leads to the re-oxidation of the reduced transition e.g. piezoelectric response, with respect to the applied voltage.
metal ions, emptying the conduction band and decreasing the Kohlstedt et al have simultaneously obtained currents and
conductivity. These redox reactions are thought to occur at piezoelectric responses of PZT with voltage (see figure 18(a))
the active metal/SE interface(s) with the help of the Helmholtz [217]. This figure clearly shows that the resistive and
layer giving discrete Galvani potential distribution through the ferroelectric switching behaviours are not coupled. More
interface [53, 199]. precisely, the simultaneous switching of the ferroelectric
The VCM effect may be coupled with the change of the polarization and resistance at the same electric field would
SBH [45, 53, 199]. The higher the concentration of reduced be a precondition (but not sufficient) for ferroelectric-resistive
transition metal ions or oxygen vacancies in the diffuse double switching.
layer, the lower the SBH at the interface. Therefore, VCM-type Resistive switching in such nominal ferroelectric-resistive
bipolar switching is also explained in terms of the SBH change systems is perhaps attributed to a generic property of TMOs:
with respect to the polarity of the applied voltage [53, 199]. the inclusion of intrinsic defects. It is worth noting that
Some higher dimensional defects may be involved in the most perovskite-type TMOs (ABO3 ) are hypo-stoichiometric
VCM effect. For instance, one-dimensional extended defects compounds, and transition metal ions on ‘B’ sites can vary
(dislocations) in STO have been regarded to be involved in the their valence state [76, 219–221]. Therefore, the switching
VCM effect [76]. Moreover, two-dimensional defects (shear perhaps falls into the VCM class. The same is true for some
planes) in TiO2 have been found to be related to the VCM nominal MR materials such as PCMO exhibiting the EPIR
effect, as they result in phase transition into its lower oxides effect [16, 151].
such as Magnéli phases [98, 99, 101, 214]. Nevertheless, ‘true’ ferroelectric-resistive switching has
An electronic mechanism for bipolar switching has been been recently found in a BTO film on a blanket SRO electrode
recently revisited by Kim et al [209, 215]. They regarded that [148]. This switching was measured by directly applying a
the asymmetric distribution of electron traps in TiO2 brings voltage to the BTO film surface through a CAFM tip. In this
about asymmetric I –V curves while bipolar switching. Space- study, the authors found bi-stable states (low and high direct
charged-limited conduction (SCLC) was taken as a mechanism tunnelling currents) corresponding to ferroelectric up (+P) and
for the dominant conduction in the bi-stable states. In this down (−P) polarization, respectively (see figure 18(b)). In the
model, the trapping and detrapping of electrons are estimated to same year, the same coupling was reported for a PZT thin film
occur during set and reset switching, respectively, and thus the grown on an LSMO electrode by Maksymovych et al [149].
SCLC, strongly affected by the distribution of empty and filled By employing CAFM, they successfully measured the resistive
traps, exhibits resistance change with respect to the polarity of switching and piezoelectric response of the ferroelectric at the
the applied voltage. same electric field, implying ferroelectric-resistive switching.
Ferroelectric-resistive switching in a metal/ferroelectric/ Ferroelectric-resistive switching seems to be hindered by TE
metal (MFM) junction, another class of bipolar switching, deposition in the FTJ junction fabrication. In the TE deposition
is believed to be a result of the change of a ferroelectric’s process, physical and/or chemical damage may be imposed on
conduction band profile by the ferroelectric polarization the ferroelectric film, introducing CFs, so that ferroelectric-
reversal [146–148, 216]. The alternation of carrier-depletion resistive switching could not be achieved.
width in ferroelectric PTO by ferroelectric switching is the first
model attempting to explain ferroelectric-resistive switching 5. Are RRAMs memristors?
[39]. Meyer and Kohlstedt assumed the existence of a gap at
the metal/ferroelectric interface, which separates the induced After Chua’s suggestion of the missing circuit element
charge on the metal from the surface charge on the ferroelectric ‘memristor’ in 1971 [123], the concept had not attracted
[216]. Namely, a high depolarization field was assumed in great attention for more than three decades. In 2008,
their model. This interfacial gap is placed at one interface, i.e. Strukov et al at the Hewlett-Packard labs came out with
asymmetric interface. This asymmetry leads to polarization- the idea that TiO2 -based resistive switches are examples of
dependent profiles of the ferroelectric’s conduction band and the missing fourth circuit element [124]. This finding drew
thus the polarization-dependent conductivity of delocalized considerable attention to many resistive switching systems that
electrons in the ferroelectric. have been widely referred to as ‘memristors’ or ‘memristive
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Rep. Prog. Phys. 75 (2012) 076502 D S Jeong et al
Figure 18. (a) Simultaneous measurements of current and piezoelectric response of a MFM cell with a 6 nm thick PZT film. The
ferroelectric switching appears at about 170 kV cm−1 (0.5 V) and −170 kV cm−1 (−0.5 V) applied electric fields, while the resistive
switching can be observed at about 330 kV cm−1 (0.9 V) and −330 kV cm−1 (−0.9 V) applied electric fields. Reprinted with permission
from [217]. Copyright 2008, American Institute of Physics. (b) The same measurement on a 30 nm thick PZT film on a LSMO electrode.
This measurement was conducted using a CAFM tip. The curves show the correlation between the piezoelectric and current responses at a
tip bias of approximately −3.3 V, suggesting ferroelectric-resistive switching. Reprinted with permission from [149]. Copyright 2010,
American Association for the Advancement of Science.
systems.’ Considering the literal meaning of ‘memristors’, energetically stable and distinctive states, are ‘thermodynamic
i.e. ‘memory + resistors’, this terminology properly describes memories’. FRAMs and MRAMs belong to this category. +P
resistive switching (memory switching) systems. However, if and −P in FRAMs are two stable states at zero electric field,
this terminology is invoked with the original meaning that Chua and the transition from one to the other can be achieved by
introduced, one should carefully judge whether ‘memristors’ applying an electric field that differentiates the free energy of
correctly account for the resistive switching systems being one state from the other. In MRAMs, spin-up and down states
studied. The change in the memristance of a memristor correspond to the binary values. They are also energetically
is caused by the cumulative number of charges q flowing stable at zero magnetic field, and spin flip is done by applying
through the memristor. However, considering several bipolar a magnetic field.
switching systems, for instance, VCM systems, the change in ‘Kinetic memories’ have two different states: one in the
the resistance results from electrochemical reactions, which are configuration of the ultimate minimum energy or a local
given by functions of the applied ‘voltage’ rather than charge. minimum (‘0’) and the other in the meta-stable configuration
Memristance actually defines the relationship between with a higher energy (‘1’). Therefore, there is a difference
charge and magnetic flux [123]. In his comment on the paper in energy between the two states even without an external
by Strukov et al, Mathur said that memristance corresponds bias. The stability of these two states is a matter of the energy
to the magnetoelectric coupling constant of a magnetoelectric barrier height (E10 ) for the transition from ‘1’ to ‘0’. The
system (see [222] and references therein). The first finding of reaction rate constant is likely given by ∼ exp(−(E10 /kT )),
the magnetoelectric effect dates back to the 19th century and where k and T denote the Boltzmann constant and temperature,
the history is very nicely overviewed in the review paper by respectively. If E10 is sufficiently high, a written ‘1’ is able
Fiebig [223]. to be retained for a sufficiently long time. FLASH memories,
PRAMs and RRAMs are regarded to belong to this ‘kinetic
memories’ category. The categorization is illustrated in
6. Non-volatile memory application figure 19 with a schematic of a free energy versus configuration
diagram for each NVM.
With benefits of low power and high speed, RRAM is a In PRAMs, the amorphous phase corresponding to ‘1’
potential candidate for the next-generation NVM. Apart from is less stable than the crystalline phase ‘0’. However, the
the viable parameters, e.g. on-to-off ratio, on-state current, amorphous state can be retained for a sufficiently long time.
retention time and cycling endurance, main concerns for For RRAMs, a mechanism for the resistive switching is not
the technological application are the scalability, stability and very well understood at this moment so that the categorization
switching speed. In the near future, RRAMs may become of RRAMs is not very certain. Nevertheless, we conjecture
universal memories that could replace FLASH memories, that the bi-stability of RRAMs is defined by kinetics rather
DRAMs, and even hard disks, if the aforementioned concerns than thermodynamics from the configuration of CFs embedded
are addressed. in the host insulating matrix, which is unlikely stable.
Concerning the working principle of NVMs allows them Regarding some experimental results of electroforming and
to be classified as either thermodynamic or kinetic memories. resistive switching features, e.g. the non-uniform distribution
Memories having the two binary values ‘0’ and ‘1’, defined by of conductivity in a switching material, and Joule-heat-induced
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Rep. Prog. Phys. 75 (2012) 076502 D S Jeong et al
to endure more than 1010 operation cycles [49]. Although electroforming is not seriously taken into consideration in
many different switching materials share more or less common many publications. Indeed, when one surveys papers on
working principles, each material should have a different resistive switching, one can often find that the quantitative
degree of operational stability. The detailed understanding explanation of the electroforming procedures is missing.
of switching mechanisms is perhaps able to suggest guidelines Therefore, to better our understanding, emphasis on systematic
for a choice of switching and electrode materials as well as electroforming studies is necessary.
switching cell design. By means of this understanding, the From a technological point of view, this complicated
high stability of RRAMs can be achieved. initialization procedure should be avoided: electroforming-free
RRAMs are preferable. Recent progress in electroforming-
free RRAMs was demonstrated in RTJs by Jeong et al
6.3. Switching speed of RRAMs
[167]. The RTJs showed great uniformity of bipolar switching
RRAMs as universal memories should catch up with DRAMs behaviour and no obvious structural change during the
in terms of switching speed (DRAM write/erase time; switching operation.
<10 ns/<10 ns). Switching speed measurement has been Considering other dielectric- or ferroelectric-related or
intensively conducted on the prototypical resistive switching hybrid-type emerging memories, the observation of room
material TiO2 [48, 230–232]. The results have demonstrated temperature electronic conductivity at ferroelectric domain
very fast switching speed of TiO2 -based switching cells, which walls in insulating multiferroic BFO opens the door for logic
is now comparable to or even faster than the operation speed and memory applications [234, 235]. The extremely small
of DRAMs. Hermes et al successfully measured both set size of such domains and the possibility of control with
and reset switching of Pt/Ti/TiO2 /Pt cross-point junctions applied electric fields are of great interest in realizing high-
using voltage pulses of 2 ns rise-, 1 ns plateau- and 2 ns density memories. However, device applications of such
fall-time [48]. The voltage pulses that they applied for conducting nanoscale features are in their infancy and hence
the measurement and the corresponding current responses have to be investigated in detail. At present, there are
are clearly seen in [48]. Note that caution should be used four contenders for the next generation of RAMs based on
in switching speed measurements, especially since applied dielectrics: magnetoelectric RAMs [236], RRAMs, MottFETs
voltage/current pulses are very short. Due to several effects [237] and domain-wall RAMs [238]. The most recent
mainly caused by impedance mismatch, e.g. the ringing effect breakthrough in RRAMs is the demonstration by Jiang et al
[233], programmed voltage/current pulses in fact differ from that such switching materials need not be highly insulating,
their actual shapes. The shorter the programmed pulse width, and that true ferroelectric-resistive RAMs can be based not on
the more obvious is such a pulse distortion. Therefore, CFs but on homogeneous SBH over the entire pad area [156].
it is of importance to monitor the shape of applied pulses The work by Jiang et al gives reversible switched currents of
simultaneously. >1000× that of the early devices of Blom et al (which were
Pt/Ti/TiO2 /Pt junctions have been found to exhibit multi- a few mA cm−2 ). Magnetoelectric RAM was first proposed
level switching behaviour depending on the width of applied by Bibes et al in 2008 as a development of magnetic tunnel
voltage pulses [232]. Kügeler et al have examined voltage- junctions [236]. More recently Hu et al have shown how to
pulse-driven switching in Pt/Ti/TiO2 /Pt junctions with two make magnetoelectric NOR, NAND and NOT gates in addition
different pulse widths, 10 and 50 ns, and observed different to memories [239]. These gate designs may have a large
LRSs relying on the pulse width [232]. commercial impact on some niche markets. MottFET is a kind
of metal-gate FET in which the gate material can be driven
to a metal-to-insulator phase transition via an applied electric
7. Concluding remarks and outlook field. The favoured materials are nickelates, on which Catalan
has a recent review [237]. Finally, the use of ferroelectric
We reviewed the technological status of RRAMs as emerging
nano-domain walls, which can be highly conducting [234]
NVMs, some basics of resistive switching phenomena,
and ferromagnetic when surrounded by non-ferromagnetic
candidate materials and mechanisms for electroforming and
domains [240], has been recently discussed for nanoelectronics
resistive switching with particular emphasis on binary TMOs.
in a review paper [238].
There are many more switching materials and mechanisms
that are not covered by this review. The first reason
for the variety of the mechanisms is that our current Acknowledgments
understanding of these scientifically and technologically
DSJ would like to acknowledge research grants from the Korea
important phenomena is not quite clear. The second reason
Institute of Science and Technology (grant nos 2V02410 and
is the lack of consistent experimental data reported in different
2E22123). The authors thank Professor Rainer Waser for
publications. The result is various switching mechanisms
fruitful comments.
for even the same switching materials. This may be due to
different electroforming procedures or the stochastic nature
of electroforming itself. As the initialization process of References
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