chip_design_lecture2

Chip Design
Professor: Sci.D., Professor

Vazgen Melikyan
Synopsys University Courseware

Copyright © 2018 Synopsys, Inc. All rights reserved.
Chip Design
Lecture - 2
1 Developed By: Vazgen Melikyan
Course Overview
 Introduction to Chip Design  Physical Data Preparation

 1 lecture  3 lectures
 IC Manufacturing Process  Liberty Format
 Phases of IC Design  Liberty NCX Introduction
 1 lecture  1 lecture
 Cell-Level Digital Design Flow  Transistor level description
 2 lectures  1 lecture
 Digital Design Flow  Physical Design Formats
 2 lectures  2 lectures
 Library/IP design  Functional Description
Chip Design
Lecture - 2
Developed By: Vazgen Melikyan
2
IC Manufacturing Process

Chip Design
Lecture - 2
3 Developed By: Vazgen Melikyan
Largest IC Foundries
TSMC Taiwan Semiconductor Manufacturing Corporation
UMC United Microelectronics Corporation
CSM Chartered Semiconductor Manufacturing
IBM IBM Foundry Services
MXIC Micronics Foundry Services
TS Tower Semiconductor
SMIC Semiconductor Manufacturing International Corporation
LSI LSI Logic Foundry Services

Chip Design
Lecture - 2
4
Evaluation of Technological
Processes
Technological processes are defined by the minimum length (L) of transistor channel
90nm technology – Lmin=90nm

Examples of technological processes:

 TSMC 90nm G Logic 1.0V/3.3V G – generic
 SMIC 90nm LL Logic 1.2V/3.3V LL – low leakage
 SMIC 130nm LV Logic 1.0V/3.3V LV – low voltage
 Samsung 32nm LP Logic 1.2V/3.3V LP – low power
 UMC 32nm LL Logic 1.2V/2.5V
 UMC 14nm LL Logic 0.8V/1.8V

Chip Design
Lecture - 2
5
IC Fabrication at a Glance
1. Growing of a giant crystal of silicon
2. Slicing it up into round wafers and polish them

3. Coating of a wafer with a photographic chemical
that hardens when exposed to light
4. Taking a picture of a pattern to embed in the silicon

Chip Design
Lecture - 2
6
IC Fabrication at a Glance (2)
10. Connection of chip parts to the pins

of the package with tiny gold wires
11. Putting of the chip on a tester machine and test
running
12. Assembly of different kinds of chips onto a board
13. Installation of the board into a phone, computer...

Chip Design
Lecture - 2
7
Examples of Devices Used During IC
Fabrication
Photolithography stepper Gas cabinet
Wire bonder system Wafer probe Wafer Dicing, Sawing

Chip Design
Lecture - 2
8
Steps of Photolithography
Photoresist coating
Photoresist
Etching
SiO 2
Substrate
Exposure Substrate
Mask
Exposed Photoresist removal

Unexposed
Substrate
Substrate
Development
Substrate

Chip Design
Lecture - 2
9
Design Rules, Necessity
 Interface between the circuit designer and

process engineer
 Guidelines for constructing process masks
 Rules constructed to ensure that design
works even when small fabrication errors
occur

Chip Design
Lecture - 2
10
Design Rules Example (1)
Resolution
min. width rule
min. spacing
Alignment min. poly width
min. poly overlap of diffusion

exact contact size
min. contact overlap
min. gate to contact spacing

Chip Design
Lecture - 2
11
Design Rules , Example (2)
 Minimum enclosure in the result of combination of dopant or

overhead layers (a)
 Minimum spaces between objects on the same layer to ensure they
will not short after fabrication (b)
 Provision of minimum overlap of layers (c)
 Minimum dimensions of objects on each layer to maintain that object
after fabrication (d)
d
b c

Chip Design
Lecture - 2
12
Design Rules , Example (3)
N Well
c
h P Well
f N+ Active
b
e P+ Active
a g Deep N Well
d
a – minimum width
b, e, g, h – minimum spacing
c, f – minimum enclosure
d – minimum overlap
Chip Design
Lecture - 2
13
Design Rules, Transistor
Layout
Transistor

Chip Design
Lecture - 2
14
Design Rules, Vias and Contacts
Metal to DIFF Contact Metal to Poly Contact Metal1 to Metal2 Via

Chip Design
Lecture - 2
15
No Image = No Product
Layout 0.25µ 0.18µ
0.13µ 90nm 65nm

Chip Design
Lecture - 2
16
Lithography: Printability Issues
180nm 130nm 90nm and Below
Design
OPC PSM
0°
Mask
180° 0°
OPC 180°
Wafer
Wavelength: 193nm
Chip Design
Lecture - 2
17
Optical Proximity Correction (OPC)
Conventional (no
OPC) Silicon image without OPC
Original layout
0.18 m
OPC layout Silicon image with OPC
Optimal proximity correction (OPC) is a corrective technique that adds small

objects to photomask that will not print frequently by enlarging corners or
adding bias lines to the edge of a feature

Chip Design
Lecture - 2
18

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Chip Design

Professor: Sci.D., Professor

Synopsys University Courseware

 Introduction to Chip Design  Physical Data Preparation

Synopsys University Courseware

TSMC Taiwan Semiconductor Manufacturing Corporation

UMC United Microelectronics Corporation

CSM Chartered Semiconductor Manufacturing

IBM IBM Foundry Services

MXIC Micronics Foundry Services

SMIC Semiconductor Manufacturing International Corporation

LSI LSI Logic Foundry Services

Synopsys University Courseware

90nm technology – Lmin=90nm

Examples of technological processes:

Synopsys University Courseware

1. Growing of a giant crystal of silicon

2. Slicing it up into round wafers and polish them

4. Taking a picture of a pattern to embed in the silicon

Synopsys University Courseware

10. Connection of chip parts to the pins

12. Assembly of different kinds of chips onto a board

13. Installation of the board into a phone, computer...

Synopsys University Courseware

Photolithography stepper Gas cabinet

Wire bonder system Wafer probe Wafer Dicing, Sawing

Exposed Photoresist removal

Synopsys University Courseware

 Interface between the circuit designer and

Synopsys University Courseware

Alignment min. poly width

min. poly overlap of diffusion

min. contact overlap

min. gate to contact spacing

 Minimum enclosure in the result of combination of dopant or

Synopsys University Courseware

Synopsys University Courseware

Metal to DIFF Contact Metal to Poly Contact Metal1 to Metal2 Via

Synopsys University Courseware

Layout 0.25µ 0.18µ

0.13µ 90nm 65nm

Synopsys University Courseware

OPC layout Silicon image with OPC

Optimal proximity correction (OPC) is a corrective technique that adds small

Synopsys University Courseware

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