LPCVD

PECVD
- IPS
-
Dry Cleaning -
- Wafer Edge Cleaning PR Strip
ALD - -
RTP - IPS
- AP - CMP Foup PR Coater Dry Etcher
- IPS - - - - -

CMP Slurry (PR) SiC Ring

Sub - - - - -
- - - SK - -
- - SKC - -
- PR
- / - Si/Quartz Ring
CCSS - - -
- - - Blank Mask - QnC
- Si/Quartz Tube, Boats - QnC - -
/ - - QnC -
- - SKC ( SKC) Pellicle (gas)
- GST - (* Shower head - - SK
/ ) - -
- -
Ceramic Heater, ESC -
Plasma (RPS)
(PPS) -
-
- - (Etchant)
-
-

Pin/Socket
Annealing -
- - ISC
(DRAM 1z) -

Sawing

Diffusion Quartz Wafer Test Dicing Bonder Tester

- QnC - - - -
-
Vision Placement OSAT Packaging -
- -
- OSAT Test
(* VP - SFA -
Sawing. Dicing - -
)
- -
- SFA
-
-
-
-