Technical Specification Tube Furnace for CVD, CVT and Crystal Growth application

Grade Custom
Working Temp (oC ) Multi Zones (minimum 3) with uniform temperature stability
Working temperature is 1200 deg C for very long
duration of 10-15 days
Hot Zone Size (mm) 250mm each
Uniformity +/- 1 deg C in hot zones
Construction in Steel with Dual Body
Anti Corrosion Coating Fan Cooling
Work Tube Replaceable
Work Tube Type 99.8 % Alumina, OD: 70mm, ID: 60mm, L: 700mm
99.8 % Alumina, OD: 70mm, ID: 60mm, L: 1200mm
Insulation Non Carcinogenic Crystal Fiber insulation at hot face
Multi layer insulation with backing up insulation having
thermal conductivity of 0.03 watt/mK at 600 deg C
Heater Type Free radiating
Heater Sic Heaters (silicon carbide)
Standard Features

SS Flange for Gas Purging + High Vacuum8 Double viton o-ring, SS flanges with KF 25 port for gas connection, 1/4"
port for gas purging with ball valves and an analogue vacuum gauge

Avg. Rate of Heating7 5 oC/Min

Thermocouple Type2 4 number movable S Type thermocouple for use during CVT &
TC Protection Sheath CVD. Rails attached to furnace for TC loading during CVT
Control Panel Programmable Controller with self diagnostic feature
IoT compatible / enabled
Inbuilt removable SDHC Memory Card based Data Logger
Alphanumeric four line backlit LCD screen
Robust feather-touch keypad
PC Visualization and control software
RS485 Communications Port, Ethernet Communications Port
Three (3) Limit Switches configuration
Inbuilt Thyristor Triggering, Phase angle fired
Soft Start Soft Stop, Power Tuned, Solid State Relay
Step Down xformer, Special Thyrister
MFC For Hydrogen and Nitrogen (50-500 SCCM) with electropolished SS 304
pipeline from MFC to Flange
Vacuum System Rotary vacuum pump, 250 LPM, Dual Stage, 2 liter oil capacity with trap,
throttle valve, bellow, digital and analogue gauge, clamps and fitting, with
a stand
Spares Sample placement rod, 2 Alumina Boat (30ml)
Spare K thermocouple 750mm long for profiling + reader
Safety Features TC Break
Over Current
Over Temp

2: Calibration Certificate of Control Thermocouple from NABL Accredited Furnace

7: Rate of heating with quartz and metal tubes can be as high as 25 C/Min. With ceramic tube the
recommended heating rate is 8 C/Min upto 800 C and 5 C/Min for temperature above 800 C
8: Mild vacuum is vacuum upto 1 mbar, Medium Vacuum is upto x 10-2 mbar and High Vacuum is upto x 10-5 mbar

With Regards

Prof. Tanmoy Maiti

Professor
Department of Materials Science and Engineering
Indian Institute of Technology Kanpur
Kanpur-208016, (U.P.) India