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Adarsh sensor and acc.
Adarsh sensor and acc.
A R T I C LE I N FO A B S T R A C T
Keywords: A sensor for highly sensitive, selective, and rapid determination of the trace amount of toxic Hg2+ ions is
AlGaN/ GaN HEMT developed for the first-time using molybdenum disulfide (MoS2) functionalized AlGaN/GaN high electron mo-
MoS2 bility transistor (HEMT). The vertically aligned, flower-like MoS2 structures are synthesized through a simple
Hg2+ions hydrothermal route and applied on the gate region of AlGaN/GaN HEMT. The scanning electron microscopy,
Sensitivity
Raman spectroscopy, and X-ray diffraction are performed for structural characterization of MoS2. Further, the
Selectivity
sensing of Hg2+ ions is performed by electrical characterizations of MoS2 functionalized AlGaN/GaN HEMT. The
sensor showed an excellent sensitivity of 0.64 μA/ppb and detection limit of 0.01152 ppb with the rapid re-
sponse time of 1.8 s. The sensor exhibits the linear range of detection from 0.1 ppb to 100 ppb and highly
selective behavior towards Hg2+ ions. The results demonstrated that the MoS2 possess excellent Hg2+ ions
capture property, that could be attributed to the complexation of Hg2+ ions with sulfur and the electrostatic
interaction between MoS2 and Hg2+ ions alters the drain to source current (IDS) of the HEMT at a constant drain
to source voltage (VDS). Therefore, the MoS2 based AlGaN/ GaN HEMT devices have a huge potential for next-
generation ion sensing applications.
1. Introduction advantages that they can provide higher sensitivity and good detection
limit for different ion sensing applications. However, these Au elec-
Mercury (Hg) has been recognized as one of the most known toxic trodes need a specific configuration, a filling solution, and a reference
metal as its trace amount also potentially dangerous. It causes both the electrode. This configuration limits its extensive use in the ion sensing.
chronic and acute poisoning, and excessive exposure causes some se- The Si-based ion-sensitive field-effect transistors (ISFETs) were utilized
vere health problems such as irreversible neurological damage, cancer, to solve the portability and robustness problems related to Au elec-
and motion disorders that can lead to death also [1,2]. To prevent the trodes [9]. However, the chemical instability in ionic solutions and the
toxicity of Hg2+ ions in water, the concentration of Hg2+ ions should necessity of the reference electrode not only limits the performance of
be below the guideline values of WHO (1 ppb), and EPA (2 ppb) [3,4]. the Si-ISFETs but restricts the miniaturization of the device as well [10].
Thus, it is necessary to monitor mercury at trace levels in the drinking AlGaN/GaN HEMTs with its superior material characteristics like
water and other water bodies rapidly and efficiently. higher chemical and thermal stability, wide bandgap, and piezoelectric
The significant efforts have been made for the detection of the and spontaneous polarization properties provides an efficient way for
mercury at trace levels by various analytical approaches. These the development of the AlGaN/ GaN HEMT based ion sensors. AlGaN/
methods include optical analysis like colorimetric, and spectroscopic GaN HEMTs possess two-dimensional electron gas (2DEG) at the het-
techniques [3,5], electrochemical techniques such as amperometry, and erointerface of AlGaN and GaN, due to their spontaneous and piezo-
voltammetry [6,7]. These approaches show good sensitivity but are electric polarization properties [11]. The presence of 2DEG at the
expensive, time-consuming complicated, and laboratory-based ap- channel region makes the device normally on, which makes it a re-
proaches, which requires specific operators for analysis [8]. Methods ference electrode free device and favors further miniaturization of the
like ion-selective electrodes (ISE) using gold (Au) as an electrode have device. In comparison to Si-ISFETs, AlGaN/GaN HEMTs have several
⁎
Corresponding author.
E-mail address: mkumar@iitj.ac.in (M. Kumar).
https://doi.org/10.1016/j.snb.2020.127832
Received 28 November 2019; Received in revised form 20 January 2020; Accepted 5 February 2020
Available online 05 February 2020
0925-4005/ © 2020 Elsevier B.V. All rights reserved.
A. Nigam, et al. Sensors & Actuators: B. Chemical 309 (2020) 127832
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A. Nigam, et al. Sensors & Actuators: B. Chemical 309 (2020) 127832
Table 1 attributes the E2 g1, and A1g vibration modes of MoS2, respectively
Concentration analysis of Hg2+ ions. [34–37]. In the observation of MoS2, the vibrational modes E2 g1 and
Concentration of Hg2+ ions in as prepared Concentration observed by AAS A1g signifies in-plane vibration and out-of-plane vibration of Mo and S
solutions (ppb) (ppb) atoms [16,32,34]. It can be observed from Fig. 1 (d) that A1g vibration
mode has higher intensity than E2 g1 mode, which demonstrates that the
0.1 0.103
nature of as-deposited MoS2 layers is vertically standing [38–40].
1 1.061
10 10.049
3.3. Structural characterization of MoS2 functionalized layer on AlGaN/
GaN HEMT
3.1. Preparation of MoS2 functionalized AlGaN/GaN HEMT ion sensor
The structural characterizations such as field emission scanning
The HEMT fabrication process was described in detail in our earlier electron microscopy (FESEM), AFM, and Raman spectroscopy were
reports along with structural analysis [28,29]. For the contact forma- performed to observe the evidence of the MoS2 on the gate region of
tion on AlGaN/GaN HEMT, the drain and source terminals were fab- AlGaN/GaN HEMT. These characterizations were executed after drop-
ricated by the deposition of Au (200 nm) /Cr (30 nm)/Al (150 nm) casting the MoS2 on the gate region of AlGaN/GaN HEMT and has
metals. The metal stack was further patterned by optical lithography to shown in Fig. 2. The FESEM was performed to analyze the morphology
form the drain and source contacts. The separation between source and of MoS2 on the gate region. Fig. 2 (a) and (b) shows the lateral and
drain was 100 μm. Further, the annealing of these contacts was per- cross-sectional view of MoS2 functionalized AlGaN/GaN HEMT. Fig.2
formed (850 °C, 60 s). Then, the source and drain contacts were en- (a) demonstrates the flower-like structure on the gate terminal of
capsulated by Si3N4. For this process, the silicon nitride (Si3N4) with AlGaN/GaN HEMT, where the petals of the flower-like structures are
250 nm thickness was deposited using RF sputtering process, which is looking vertically standing. The cross-sectional view is shown in Fig. 2
further patterned by photolithography. Since the adhesiveness of Au is (b) also confirms the vertical alignment of the petals of the flower-like
very poor on the GaN surface, thus a thin film of Ni has been deposited structure of MoS2. Moreover, AFM analysis was further performed on
prior to Au deposition because Ni has superior adhesion to GaN as well the device, and the topographical AFM image has been shown in Fig. 2
as the work function of the Ni is close to Au [30,31]. Hence, the gate (c). The AFM image also reveals the quantitative height and flower-like
region was fabricated by the deposition of Au/Ni with the 50/10 nm morphology on the surface of the Au-gated AlGaN/GaN HEMT. The
thickness, which was further patterned by optical lithography. The presence of MoS2 on the AlGaN/GaN HEMT was further confirmed by
length of the gate was 50 μm. utilizing Raman spectroscopy analysis, as shown in Fig. 2 (d). In this
After the fabrication of AlGaN/GaN HEMT and synthesis of MoS2, observation, the presence of E2 g1 and A1g vibrational modes was si-
the gate region of HEMT was functionalized by self-assembled MoS2 milarly observed as Fig. 1 (d), which confirms the presence of MoS2 on
layers. In this approach, the as-synthesized MoS2 powder was grind for Au-gated AlGaN/GaN HEMT. Based on the Raman spectra and the
30 min. After grinding, a solution of 20 mg/ml was prepared in IPA FESEM images, it can be said that the flower-like MoS2 structures
(isopropyl alcohol) of MoS2 powder. This solution was ultrasonicated possess the rich few-layers structures in the form of petals, which
for 2 h. Subsequently, this solution was drop cast on the gate region of provides a large number of active edge sites.
the HEMT. After that, the device was annealed for 15 min at 80 °C. In
this process, when MoS2 forms layer on the gate terminal, it adsorbed 3.4. Electrical characterization of MoS2 functionalized AlGaN/GaN HEMT
on the Au – gated HEMT. for Hg2+ ion sensing
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A. Nigam, et al. Sensors & Actuators: B. Chemical 309 (2020) 127832
Fig. 1. (a), (b) SEM images of MoS2 flower like structure (c) XRD pattern of the flower-like MoS2 (d) Raman Spectrum of as-deposited MoS2.
functionalized surface of the gate. Here the concentration of the ionic LoD= 3σ/m (3)
solution of Hg2+ was varied from 0.1 ppt (parts per trillion) to 10 ppm.
The sensing response was observed for 300 s for each Hg2+ ion con- Here σ, and m are the standard deviation (SD) of least concentration of
centration. After applying different concentrations of Hg2+ ions, the the Hg2+ ions, and the sensitivity of the sensor respectively. The sen-
apparent variation in the IDS was observed. This alteration in IDS reflects sitivity (m) of the sensor was calculated as the slope of the fitting curve,
the detection of Hg2+ ions. Interestingly, it was found that initially, the and it was observed as 0.64 μA/ppb. The values of parameters such as σ
IDS was increased by applied Hg2+ ion concentration from blank to 10 and linear regression coefficient were derived from the Fig. 3(c) as
ppt, and it starts decreasing by applying a higher concentration of Hg2+ 0.00246 and 0.9997 respectively, and hence the limit of detection was
ions from 100 ppt to 1 ppm. The reason behind the increment in the determined from Eq. (2) as 0.01152 ppb or 11.52 ppt. This limit of
drain current could be the electron transfer from MoS2 to Hg2+ due to detection of the Hg2+ ions on MoS2 functionalized AlGaN/GaN is suf-
the chemical adsorption phenomenon. In general, Hg2+ ions possess a ficiently below than the standard limit set by WHO for drinking water
high binding affinity toward sulfur. When Hg2+ ions interact with the standards for Hg2+ ions (1 ppb). The linear detection range of the
sulfur group on the MoS2 surface, the S2− group may donate electrons sensor was observed from 0.1 ppb to 100 ppb. The response time of the
to the adsorbed Hg2+ ions and makes the Hg-S complex with it [25,26]. sensor was also derived by employing a similar process used in our
In this process, the negative surface charges get decreases, which in previous report. By this process, the sensor demonstrated an ultra-fast
turn increases the VG, and hence the IDS increase initially by Eq. (2). By response of 1.8 s at 1 ppt. It is the fastest response time observed by
further increment in Hg2+ ion concentration, the drain current starts MoS2 functionalized AlGaN/GaN HEMT at low concentration of Hg2+
decreasing. The decrement in the drain current may be observed due to ions. Thus, the ultra-low-level detection of Hg2+ ions with rapid re-
electrostatic interaction at the gate terminal, which induces negative sponse can be realized using MoS2 functionalized AlGaN/GaN HEMTs.
charges towards the MoS2 functionalized gate region, which can make The selectivity of MoS2 functionalized AlGaN/GaN HEMT towards
the gate potential more and more negative and hence drain current Hg2+ ions, and other heavy metal ions were further examined by se-
starts decreasing. It can also be seen from Fig. 3(b) that after applying a parate solution method, [41] and the results are shown in Fig. 3(d), (e).
higher concentration of Hg2+ ions of 10 ppm, no change was observed In this method, the response of the sensor for Hg2+ and other heavy
in the IDS, implies that the saturation of MoS2 functionalized surface metal ions like Cd2+, Ni2+, Cu2+, Pb2+, Zn2+, and Cr3+ were observed
due to the higher concentration of Hg2+ ions. at the concentration range from 1 ppt to 10 ppm. For efficient se-
The sensing parameters like the limit of detection (LoD) and sensi- lectivity study, the observed current response for Hg2+ ions and other
tivity were calculated by observing IDS vs. Hg2+ ion concertation plot, interfering metal ions were subtracted from the base current i.e. the IDS
as depicted in Fig. 3(c). Here, the limit of detection was calculated by observed in deionized water termed as IDS0. Thus, the selectivity coef-
the standard 3-sigma approach. The limit of detection was calculated by ficient for separate solution approach (also termed as response ratio)
the following expression: RHg2+
, j can be given as [41]:
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A. Nigam, et al. Sensors & Actuators: B. Chemical 309 (2020) 127832
Fig. 2. (a) FESEM (b) cross-sectional FESEM and (c) AFM images of MoS2 functionalized surface of AlGaN/GaN HEMT (d) Raman spectra of the MoS2 functionalized
Au-gated AlGaN/GaN HEMT.
(|IDS 0 − IDSj |) C Hg 2 + more activation energy is required [45]. Hence, the PBS buffer was
R Hg 2 +, j =
(|IDS 0 − IDSHg 2 + |) Cj (4) heated at 150 °C and applied to the sensor for rinsing. The developed
sensor was rinsed in hot PBS buffer for 100 s to recover from the
Where IDSjis drain to source current of interfering metal ion at con- bounded Hg2+ ions. During this process, the recovery was achieved by
centration Cj, and IDSHg2+ is drain to source current at concentration 99.15 %. The optimization of the recovery process was performed si-
CHg2+. Here, the sensing response of interfering heavy metal ions and milarly to our previous report [14]. Thus, it can be said that the utili-
Hg2+ ions were measured at identical concentration of 1 ppm. Hence, zation of hot PBS buffer provides sufficient activation energy to remove
the response ratio from Eq. (4) can be rewritten as: Hg2+ ions from the MoS2 surface, and hence excellent recovery of the
|IDS 0 − IDSj | sensor was observed. Furthermore, the repeatability of the sensing re-
R Hg 2 +, j = sponse was also observed by keeping all the operating conditions as
|IDS 0 − I Hg 2 + | (5) same as 1 st sensing response. It has been seen from Fig. 3(g) that the
The calculated response ratio from Eq. (4) at 1 ppm concentration is sensor showed excellent repeatability of the sensing response under the
shown in Fig. 3(e), reveals that, lower the value of RHg2+
, j , higher the
same operating conditions. Moreover, the reproducibility of the sensor
selectivity. It can be seen from Fig. 3(d) that MoS2 functionalized was realized by the fabrication of another AlGaN/GaN HEMT device
AlGaN/GaN HEMT sensor showed the measurable response for Hg2+ with the same device dimension as a proposed device and keeping the
ions whereas no other meal ions gave any significant response. Further, same MoS2 functionalization process. The sensing analysis was also
Fig. 3(e) also confirms that the selectivity of the sensor is very high performed under the same operating conditions as the proposed sensor.
towards Hg2+ ions. The high selectivity towards Hg2+ ions is observed The response of the new device has been shown along with the response
mainly because of the strong soft–soft interactions between Hg2+ ions of the proposed sensor in Fig. 3(h). The slight change in the drain to
and S as the metal ions with higher softness have a stronger affinity to source current in the new device can be due to the internal resistance of
sulfur [42,43]. There was slight interference of Pb2+ ions and Cu2+ the device. The analysis of the reproducibility of the sensor was con-
ions, indicates that they are softer than other cations such as Cd2+, ducted by the coefficient of variation (CV) method. The coefficient of
Ni2+, and Zn2+ ions [44]. However, Hg2+ ions possess significantly variation for both the senor was calculated as [46]:
higher softness than Pb2+and Cu2+ ions [43,44], which preferably Standard Daviation of the values of IDS
adsorb on the S binding sites and makes the sensor highly selective CV=
Average of the values of IDs (6)
towards Hg2+ ions.
Subsequently, the recovery, repeatability and reproducibility of the Table 2 shows the average and standard deviation (SD) of the values
AlGaN/GaN HEMT sensor were also explored. Fig. 3(f) shows the re- of IDS for both the sensors. Here the sensor-1 and sensor-2 are termed as
sponse and recovery of the sensor. In the sensing process, the Hg2+ ions the proposed device and the newly fabricated device, respectively. The
were chemically adsorbed on the MoS2 surface by strong Hg-S bonding. calculated values of CV for both the sensor are very close to each other,
Thus, in order to remove adsorbed Hg2+ ions from the surface of MoS2, which indicates the excellent reproducibility of MoS2 functionalized
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A. Nigam, et al. Sensors & Actuators: B. Chemical 309 (2020) 127832
Fig. 3. (a) IDS-VDS characteristics of the device after different steps of functionalization and sensing. (b) Real time Hg2+ ion sensing on MoS2 functionalized AlGaN/
GaN HEMT. (c) Sensor response and calibration curve for Hg2+ ion detection using MoS2 functionalized AlGaN/GaN HEMT (inset: sensor response at lower
concentration) (d) Relative sensing response of the sensor for various heavy metal and Hg2+ ions from 0.01 ppt to 10 ppm concentration (e) Response ratio of the
sensor for Hg2+ ions and other interfering heavy metal ions for selectivity analysis (f) Response and recovery of the proposed sensor (g) Repeatability and (h)
Reproducibility of the MoS2 functionalized AlGaN/GaN HEMT sensor.
Table 2 ions to form Hg-S complex [22,26]. Hence, the formation of Hg-S
: Reproducibility of the MoS2 functionalized AlGaN/GaN HEMT. complex ultimately reduces the electrons from MoS2 surface, which in
Device Average IDS (μA) SD of IDS (μA) CV CV (%) turn increase the gate potential of the device and hence the IDS rises.
By further increment in Hg2+ ions concentration, the binding sites
Sensor-1 144.1428 1.50863 1.05E-02 1.05 on the top of the first Hg2+ ion layer can be further engaged by Hg2+
Sensor-2 157.2251 1.42724 9.08E-03 0.91
ions, which can also form second Hg2+ ions layer. It is because the
MoS2 may still have negative charges due to higher S atoms and n-type
behavior, and the physical electrostatic interaction phenomenon causes
AlGaN/GaN HEMT sensor for Hg2+ ion detection.
further Hg2+ ions adsorption as depicted in Fig. 4(c). The electrostatic
interaction further induces negative charges towards MoS2 surface.
3.5. Sensing mechanism of Hg2+ ions by MoS2 functionalized AlGaN/GaN Thus, while increasing more Hg2+ ion concentration, more negative
HEMT charges induce towards MoS2 surface. This process decreases the gate
potential simultaneously, and hence, IDS starts reducing by a further
The sensing mechanism of MoS2 functionalized AlGaN/GaN HEMT increase in Hg2+ ion concentration. Some reports have reported that
for Hg2+ ions is shown in Fig. 4. The functionalized MoS2 on the Au the MoS2 layer was negatively charged in the complete sensing process;
gated AlGaN/GaN HEMT has exposed Sulfur atoms to attract the Hg2+ only the potential associated with MoS2 would be less or more negative
ions, as shown in Fig. 4(a). When the device was exposed to Hg2+ ion [25,26]. Thus, these two-adsorption mechanisms which can happen one
solution, Hg2+ ions were strongly adsorbed on the surface of MoS2. after other to unwrap the role of MoS2 for ultra-low-level determination
Initially, Hg2+ ions adsorb on the most sites on the MoS2 surface and of the Hg2+ ions. In addition to the affinity of Hg2+ ions to MoS2
form Hg–S complexation, as shown in Fig. 4 (b). This formation of surface, the ultrahigh surface to volume ratio, and the electronic
chemical complexion is kept going on until Hg2+ ions fully occupy the transport properties of MoS2 may also fasten the Hg-S complex for-
binding sites of MoS2 functionalized surface. In this process, the re- mation and electrostatic interaction appearing over the gate terminal.
duction of Hg2+ ions may occur on the surface of MoS2 by Sulfur (S) as Hence the AlGaN/GaN HEMT with MoS2 functionalization provides an
Hg2+ ions are the strong oxidizing agent while S is a natural reducer. ultra-fast response for detection of Hg2+ ions.
Thus, the S2− in MoS2 can donate its electrons to interact with Hg2+ The performance of proposed MoS2 functionalized AlGaN/GaN
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A. Nigam, et al. Sensors & Actuators: B. Chemical 309 (2020) 127832
Fig. 4. Sensing mechanism of MoS2 functionalized AlGaN/ GaN HEMT for Hg2+ ion detection (a) HEMT with MoS2 functionalization (b) Hg-S complex formation on
the gate region of HEMT at low concentration of Hg2+ ions (c) electrostatic interaction between Hg2+ ions and MoS2 layer at high concentration of Hg2+ ions.
4. Conclusion
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by surface-enhanced Raman scattering spectroscopy based on thiol-functionalized
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[2] S.M. Sayyah, M. Shaban, M. Rabia, A high-sensitivity potentiometric mercuric ion
fully synthesized using hydrothermal process. The morphology, struc-
sensor based on m-Toluidine films, IEEE Sens. J. 16 (2016) 1541–1548.
tural properties, and quality of synthesized MoS2 were characterized [3] Y. Cho, S.S. Lee, J.H. Jung, Recyclable fluorimetric and colorimetric mercury-spe-
through microscopic and spectroscopic measurements. Moreover, we cific sensor using porphyrin-functionalized Au@SiO2 core/shell nanoparticles,
have proposed, for the first time, hydrothermally prepared MoS2 Analyst 135 (2010) 1551–1555.
[4] M.B. Gumpu, S. Sethuraman, U.M. Krishnan, J.B.B. Rayappan, A review on detec-
flower-like structure functionalized AlGaN/GaN HEMT for toxic Hg2+ tion of heavy metal ions in water – an electrochemical approach, Sens. Actuators B
ion detection. Interestingly, the device shows a rapid response time of Chem. 213 (2015) 515–533.
1.8 s and excellent detection limit of 11.52 ppt. The proposed sensor [5] S. Bettini, R. Pagano, L. Valli, G. Giancane, Spectroscopic investigation of the se-
lective interaction of mercuric and cupric ions with a porphyrin active layer, J.
demonstrates excellent selectivity towards Hg2+ ions. The possible Phys. Chem. C 118 (2014) 12384–12390.
reasons of the outstanding sensitivity were the formation of Hg-S
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A. Nigam, et al. Sensors & Actuators: B. Chemical 309 (2020) 127832
Md Tawabur Rahman received the bachelor’s and master’s Sudhiranjan Tripathy received the B.Sc. degree from
degrees in electrical and electronic engineering from the Maharaja Purna Chandra College, Baripada, Odisha, India,
Khulna University of Engineering and Technology, the M.Sc. degree from the Indian Institute of Technology,
Bangladesh, in 2011 and 2014, respectively. He is currently Delhi, India, and the Ph.D. degree from the Indian Institute
pursuing the Ph.D. degree in electrical engineering with of Technology, New Delhi, India. His doctoral research fo-
South Dakota State University, USA. His research interests cused on the optical properties of novel semiconductor
include sensors for precision agriculture materials. In 2002, he joined the Institute of Materials
Research and Engineering (IMRE), Agency for Science,
Technology, and Research (A*STAR), Singapore. At IMRE,
he is currently a senior Scientist and a Project Leader en-
gaged in research and development of GaN-on-silicon
technologies. He has collectively contributed to 230 re-
search papers in various international journals. His current
research projects include manufacturing of 150 and 200 mm diameter GaN epitaxial
wafers for high frequency and high power applications.
Surani Bin Dolmanan received his B.Sc. (Honours) degree
and M. Sc. Degree in Materials Science and Engineering
from National University of Singapore. He was a senior Mahesh Kumar received the M. Tech. degree in solid state
engineer with the Systems on Silicon Manufacturing materials from IIT Delhi, New Delhi, India, and the Ph.D.
Company (SSMC), Singapore, where he specializes in thin degree from the Indian Institute of Science, Bangalore,
film processing technology, new technology development, India. He is currently an Assistant Professor with the
and optimization of silicon wafer processing at various Department of Electrical Engineering, IIT Jodhpur,
technology nodes. During the initial years at SSMC, he had Jodhpur, India. His current research interests include
successfully managed and oversaw qualification and tran- electronic materials, semiconductor devices, ferroelectric
sition of new equipment and processes from pilot produc- thin films, and wide band gap semiconductors.
tion to full manufacturing capability. He is currently with
the Institute of Materials Research and Engineering, Agency
for Science, Technology, and Research, Singapore, where
he is involved in R & D of wide bandgap semiconductors. His research interests include
GaN on Si epitaxy, nano-fabrication, and structural characterization of semiconductor
materials