Vacuum Pre-Bake Oven

MKR－VC

Ver.1 2009 7．29

MINAMI.CO.LTD
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Outline of the equipment

This is an in-line type cure oven with vacuum function for

preheating and bubble releasing in under-fill process
１．Work pieces are placed on JEDEC tray for batch process.
２．Voids are eliminated by placing the tray received from the previous
process into the heating zone where preheating and vacuuming are
performed.
３．Then the works on the tray are taken out of the heating zone and
transferred to the next process. （Typical production time：60sec)
４．The oven is designed for clean room use and certified to the industry
standard SEMI S2/S8 specifications.

※S2：Guideline for environment, health and safety of semiconductor

manufacturing equipment.
S8：Safety guideline for ergonomic engineering of semiconductor
manufacturing equipment

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Features of the equipment

１．Heating section

Special far infrared panels are placed on top and underneath the
works for heating them without contacting.

２．Vacuum process
Vacuuming speed can be set in 2 stages.
Vacuum time and vent switching time can be freely set.
Vacuum level of 10pa or less can be achieved.

※Based on the above settings, optimum conditions for void elimination

can be found.

※Cause of voids
When flip chip bonding, it is common to apply underfill after bonding
for protection and reliability of the bonded area. When underfilling,
voids will be generated by air traps.

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Photos showing void elimination effect by vacuum cure oven

SAMPLE

Void Eliminated
void

Void Eliminated
void

Before using MKR-VC After using MKR-VC

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Equipment configuration

3 Equipment configuration

3-1 JEDEC tray size

3-4 Electronics specifications

NO Item Specifications NO Item Specifications

1 JEDEC tray size 33mm 3by8
135mmX315mm 1 Control method PC for FA MPC200（Portwell Japan）

3-2 Carrier 2 External I/F 32 points isolation Input/Output board

MKIO-32
NO Item Specifications
1 Carrying method Input/output conveyor ： Flat balt transfer
Camber : Chain transfer 3 Monitor Monitor for operation (touch panel)：
2 Carrying direction Right → Leht or Left → Right
AV7629N02W (Gunze)
Operation keyboard
3 Carrying speed Input/output conveyor ： 33.7mm/sec 4 Alarm function 1. Interlock
Camber : 40.8mm/sec
2. Time out
4 Carrying height 900mm±15mm from floor surface 3. Sensor error

3-3 Main chamber

Item Specifications
1 Vacuum level 10pa or less

2 Thermocouple Ｋ thermocouple

3 Heatinｇ method Space heater×２ pieces placed at the top and the bottom
３１６×１２６×４ｍｍ １３５０Ｗ

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Equipment configuration

3-5 Vacuum gauge 3-7 Temperature control

NO Item Specifications NO Item Specifications

1 Vacuum gauge SW1-2（ULVAC) 1 Digital controller DMC10 （Yamatake）
PID control
2 Measured range Atmosphere～0.5pa 2 Sampling cycle 500ms

3 Measured accuracy 0.1pa - 100000pa：±2% 3 Input accuracy ±0.5％FS

(reproducibility)
4 Open collector output Rated 30VMAX, 50mAMAX, 70mW

5 Displayed range Atmosphere～1ｐａ 3-8 Signal tower

NO Item Specifications
1 Red flash Emergency stop, heater error, disconnection,
3-6 Hydraulic rotary pump （for local vacuum） vacuum pump error, air error
2 Yellow ON Interlock, time out, sensor, each error
NO Item Specifications
1 Hydraulic pump VP-RS-A1450 （Mitsubishi Electric made） 3 Green ON Manual, pre-production mode

Vacuuming speed 1400/50Hｚ 1700/60Hｚ L/min 4 Green flash Production （including １ cycle） mode

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Equipment configuration
4 General specifications

3-9 Safety specifications 4-1 External appearance of the equipment

NO Item Specifications NO Item Specifications
1 Emergency stop Push-return type switch installed on the back and forth
1 Dimensions W： 830mm
When stopped Buzzer alarm, signal tower red flash
for emergency Heater, vacuum pump power OFF D： 1440mm
All cylinders initial position H： 1430mm （without signal tower）
Reset operation 1 Buzzer stop
2 Correction of error
3 Emergency stop button cancel There is a possibility for a change.
4 Reset （touch panel）
2 Weight Approximately 250kｇ
5 External Interface There is a possibility for a change.
3 Power supply Voltage： Three phase ＡＣ208Ｖ
5-1 Signal Interface Power consumption： Approximately 6ＫＶＡ
Frequency： ５０/６０Ｈｚ common
24V 24V
2 2
4 Supplied air Air pressure 0.49Mpa or higher
Air inlet High coupler 20PM
GND 1 GND 1

Previous process Vacuum Cure Oven Next process

5-2 Interface connector specifications

Previous process side (JEDEC tray request output) Molex 1625-02R
Next process side (JEDEC tray request input) Molex 1625-02R
※ Caution
JEDEC tray yrequest signal to the previous process is output as no-voltage siganal.
Input voltage shall be at 24V or less.
JEDEC tray request signal from the next process shall be received as no-voltage signal.
Input voltage shall be at 24V or less.

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MKR-VC MINAMI
Equipment overview

Main chamber

MKR-VC overview Carrier

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Thank you very much !!

http://www.ho-minami.co.jp