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应力工程对PZT负电容的调控
应力工程对PZT负电容的调控
Acta Materialia
journal homepage: www.elsevier.com/locate/actamat
a r t i c l e i n f o a b s t r a c t
Article history: Negative capacitance (NC) in ferroelectric materials has been proposed to overcome the fundamental lim-
Received 25 August 2020 itation on the energy efficiency of electronics. Understanding the impact of mechanical strain on the NC
Revised 4 December 2020
of ferroelectrics is of scientific significance and technological importance because the strain-polarization
Accepted 23 December 2020
coupling could substantially influence the multifunctional properties of epitaxial ferroelectric thin films.
Available online 3 January 2021
Based on time-dependent Ginzburg-Landau equation and Kirchhoff’s law, we reveal that a tensile strain
Keywords: decreases the magnitude and duration time of the transient NC of PbZr(1-x) Tix O3 (PZT) thin films while a
Negative capacitance compressive strain increases it in a resistor-ferroelectric capacitor circuit. In particular, the tensile strain
Ferroelectric materials makes the transient NC completely disappear near the morphotropic phase boundary (MPB), whereas the
Phase-field simulation compressive strain can maintain it up to a temperature higher than Curie temperature. The detailed en-
Strain engineering ergy analysis reveals that the change of transient NC with strain and composition is attributed to the
change of the negative curvature of energy landscape, which is the origin of NC in ferroelectric materials.
The work gives considerable new insight into the mechanical control of ferroelectric transient NC, and
offers guidance in searching for large transient NC in the widely used PZT thin films through strain and
composition engineering.
© 2020 Published by Elsevier Ltd on behalf of Acta Materialia Inc.
https://doi.org/10.1016/j.actamat.2020.116607
1359-6454/© 2020 Published by Elsevier Ltd on behalf of Acta Materialia Inc.
C. Liu and J. Wang Acta Materialia 206 (2021) 116607
Fig. 1. (a). The schematic diagram of a ferroelectric thin film in a resistance-ferroelectric capacitor circuit, in which VS , VF and R represents the input source voltage, the
voltage across the capacitance, and the resistor, respectively. The coordinate of thickness direction of the ferroelectric capacitor is denoted by x3 . (b) The epitaxial PZT
ferroelectric thin film grown on a perovskite substrate with electrode, the biaxial strain of ε11 = ε22 = ε exhibits in the PZT thin film due to the lattice mismatch of the thin
film and substrate/electrode.
2
Fig. 2. Transient responses of VF and ∂ 2U /∂ P 3 of PZT capacitance when an initially negative input voltage (VS = −10V ) becomes a positive one (VS = −10V ). (a) with the
composition x = 1 and the misfit strain ε = −1%, 0, 1%, respectively. (b) with the strain of ε = 0 and the composition x = 0.1, 0.5 and 1, respectively. The areas between
two dash lines with same color denote the durations with negative capacitance. A negative input voltage is initially applied on the capacitor to set the polarization in the
negative direction.
films has not been studied yet. In particular, the effect of strain on FEC circuit under different temperatures. The temperature versus
the transient NC of the widely used PbZr(1-x) Tix O3 (PZT) thin films composition phase diagrams of transient NC are constructed and
near the morphotropic phase boundary (MPB) where the anoma- an anomalous transient NC are found near the MPB. The underly-
lous behaviors often exhibit is still unknown. ing physics on the anomalous transient NC with different strains
In this paper, based on the time-dependent Ginzburg-Landau and compositions is discussed in terms of the negative curvatures
equation and Kirchhoff’s law, a phase-field model with constant- of energy landscape.
strain assumption is developed to describe the evolution of free
charge and polarization in a R-FEC circuit. The phase-field model is 2. Method
employed to investigate the transient response of free charge and
polarization in ferroelectric phase PZT (0.1 ≤ x ≤ 1 ) [25] thin films For the R-FEC circuit of Fig. 1(a), the current flowing through
with different strains. The effect of strain and composition on the the resistor R can be determined by i=∂ QF /∂ t, where QF denotes
magnitude and duration time of transient NC is obtained for the R- the free charge density per area and t is time. The current in this
2
C. Liu and J. Wang Acta Materialia 206 (2021) 116607
Fig. 3. The ferroelectric hysteresis loops of P 3 − VF in (a) and (c), and the free energy profiles of U − P 3 in (b) and (d) in the ferroelectric capacitor when the input voltage
Vs switches back and forth from -10 V to 10 V in the R-FEC circuit. (a) and (b) With the composition x = 1 and the misfit strains of −1%, 0 and 1%. AB and CD in (a) denote
the segments where the negative capacitance appears for ε = 1%. (c) and (d) With the strain ε = 0 and the compositions of x = 0.1, 0.5 and 1. A B and C D in (c) represent
the segments where the negative capacitance exists for x = 1.
circuit is governed by Kirchhoff’s law as total free energy density includes the Helmholtz free energy den-
sity fLD , the polarization gradient energy density fG , and the elec-
∂ QF
RA =VS −VF (1) tric energy density fE . The Helmholtz free energy density takes the
∂t form as
in which R and A represent the resistance and area of the ferro-
fLD = α1∗ P12 + P22 + α3∗ P32 + α11
∗
P14 + P24 + α33
∗ 4
P3 + α12
∗ 2 2
P1 P2
electric capacitor, respectively. Vs and VF are the input voltage and
the voltage across the ferroelectric capacitor, respectively. + α13
∗ 2
P3 P12 + P22 + α111 P16 + P26 + P36
Following pervious work on ferroelectric thin films [26], the
+ α112 P14 P22 + P32 + P24 P12 + P32 + P34 P14 + P24
polarization components Pi (x3 )(i = 1, 2, 3 ) are assumed dependent
only on the coordinate of thickness direction of the ferroelectric ε2
+ α123 P12 P22 P32 + , (3)
capacitor, as shown in Fig. 1(a). The epitaxial strain of ε11 = ε22 = ε s11 + s22
is employed in ferroelectric capacitor and other strain components
in which α1∗ , α ∗3 , α ∗11 , α ∗33 , α ∗12 and α13
∗ are the renormalized
are assumed zero. In previous studies, the Landau-Khalatnikov
Landau coefficients [26]. For simplicity, the epitaxial strain is as-
model (L-K model) is commonly adopted to predict the tempo-
sumed uniform and is included in the renormalized Landau coeffi-
ral evolution of polarization in ferroelectric capacitor [27,28], in
cients as [26,29]
which only the polarization component P3 is concerned. Thus, the
rotation of polarization during the polarization switching process 2(Q11 + Q12 )ε
α1∗ = α1 − , (4a)
cannot be determined in the L-K model. To precisely describe the s11 + s12
polarization evolution, the time-dependent Ginzburg-Landau equa-
tion (TDGL equation) is used to predict the temporal evolution of 2Q12 ε
α3∗ = α1 − , (4b)
polarization in ferroelectric capacitor in the present work: s11 + s12
1 ∂ Pi ∂U ∂U 2
− = − , (2) 1
L ∂t ∂ Pi ∂ Pi,3 α11
∗
= α11 + Q11 2
+ Q12 s11 − 2Q11 Q12 s12 , (4c)
2 s211 − s212
in which L is the dynamics coefficient andU = fLD + fG + fE is
the total free energy density. The comma after the variable rep- 2
Q12
resents the derivative with respect to the spatial coordinate. The α33
∗
= α11 + , (4d)
s11 + s12
3
C. Liu and J. Wang Acta Materialia 206 (2021) 116607
QF = 0 EF + P 3 (7)
Based on Eqs. (1)–(7), the free charge on the capacitor and
the polarization in ferroelectric capacitor are coupled via the elec-
tric field EF = VF /tF in the ferroelectric capacitor. The response of
the polarization Pi in the ferroelectric capacitor and the voltage VF
across it can be obtained by solving the Eqs. (1) and (2) numeri-
cally when an input voltage Vs is applied in the R-FEC circuit. To
solve the Eqs (1) and (2), the finite difference method and Runge-
Kutta method are employed for spatial discretization and time in-
tegration, respectively. In the present work, 20nm-thick PZT capac-
itor with different Ti compositions x are selected as examples to
demonstrate the strain effect on the ferroelectric negative capaci-
tance. The material coefficients used in the simulations are listed
in Supplementary Materials. In all the present simulations, a neg-
ative input voltage is initially applied on the capacitor to set the
polarization in the negative direction.
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C. Liu and J. Wang Acta Materialia 206 (2021) 116607
2 2
Fig. 5. (a). The temperature-strain phase diagram of ∂ 2U /∂ P 3 for the PbTiO3 thin films with x =1; (b)–(d) the temperature-composition phase diagrams of ∂ 2U /∂ P 3 for the
PZT thin films with the misfit strains of ε = −1%, 0 and 1%, respectively. The solid black lines in (c) denotes the Curie temperature and MPB, respectively. The tensile strain
or zero strain makes the transient NC completely disappear near the MPB at all range of temperature, whereas the compressive strain maintains it up to a temperature
higher than the Curie temperature of PZT bulk.
metal and the bound charge in a ferroelectric capacitor during the (d), respectively. It is found that the compressive and tensile
polarization switching. Therefore, the polarization switching be- in-plane misfit strains increase and decrease, respectively, the
havior in the present work is different from those of the previous energy barrier and the negative curvature in the energy profile, as
ferroelectric thin films without the R-FEC circuit [32,33.34]. shown in Fig. 3(b). The results suggest that the negative curvature
When the input voltage Vs switches back and forth from - of the energy profile is the origin of transient NC in ferroelectric
10 V to 10 V, the average polarization P 3 and voltage VF in the materials, which is consistent with previous work [6,15]. The
ferroelectric capacitor form hysteresis loops with different strains material composition x has the same impact as strain on the
and compositions as shown in Fig. 3(a) and (c), respectively. The energy density profile when the composition x increases, as is
transient NC of ferroelectric capacitor can be confirmed by the shown in Fig. 3(d). With the increase of x, the both the energy
negative slope of the hysteresis loops as shown by the segments barrier and the negative curvature in the energy profile becomes
AB and CD in Fig. 3(a) and by the segments A B and C D in more significant, which is consistent with Fig. 2(b).
Fig. 3(c). The voltage range with negative slope in the P 3 − VF To obtain a whole picture on the transient NC with different
hysteresis loops is reduced as the epitaxial strain changes from strains and compositions, the strain-composition phase diagram of
2
compressive to tensile in Fig. 3(a), which is consistent with the ∂ 2U /∂ P3 at 300 K is constructed in Fig. 4(a). For the PZT capac-
results of Fig. 2(a). It is interesting that all P 3 − VF loops with itor with 0.1 ≤ x < 0.2, the transient NC does not exist with the
different strains have the identical coercive field. The coercive epitaxial strain ranging from −1% to −1%. A larger compressive
fields are also the same for the P 3 − VF loops with different com- epitaxial strain is required near the MPB with x ∈ (0.4, 0.5 ) to
positions in Fig. 3(c). This phenomenon can be explained from 2
maintain the NC. Notice that the magnitude of ∂ 2U /∂ P 3 changes
Eqs. (2) and (7). When the polarization is zero in the ferroelec-
abruptly around MPB when the tensile strain ε > 0.4%, which is
tric capacitor, the right side of Eq. (2) equals −EF = VF /tF , hence
due to the strain induced phase transition from monoclinic phase
−∂ P3 /(L · ∂ t ) = VF /tF . Considering 0 EF is much smaller than P 3 ,
to orthorhombic phase. As a result, the double well energy profile
QF ≈ P 3 is hold in Eq. (7). Substitute QF ≈ P 3 into Eq. (1), one
of U − P 3 in Fig. 3(b) becomes a single well energy profile, which
can obtain
makes the negative curvature of the double well energy profile
−1
tF tF disappears. Thus, there is an abrupt change in the magnitude of
VF |P=0 = RA + VS (8) 2
L L ∂ 2U/∂ P3 where the phase transition occurred. For PTO capacitor
The Eq. (8) shows that, for a certain R-FEC circuit, the mag- (x = 1 ), the negative capacitance maintains until the tensile strain
nitude of VF at P = 0 is independent of strain and composition, is larger than 0.4%. The PTO capacitor exhibits the best transient
which is proportional to the input voltage and thus makes the NC among different compositions for all the investigated strains.
coercive field identical. To understand the origin of transient NC In addition to the magnitude of transient NC, the duration of tran-
in ferroelectric capacitor, the energy curves with double-well are sient NC is also important in practice since the NC often works at
plotted for different strains and compositions in Fig. 3(b) and high frequency in an integrated circuit. Given that the switching
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C. Liu and J. Wang Acta Materialia 206 (2021) 116607
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C. Liu and J. Wang Acta Materialia 206 (2021) 116607
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