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Munish JTAP 2022
Munish JTAP 2022
Abstract
An E × B plasma is important for various applications including Hall thrusters and magnetic nozzle for long-lasting
space propulsion. Such a cross field arrangement in inductively coupled plasma plays vital role in film deposition
and etching that are the basic ingredients in semiconductor industries; though in these applications, only the
electrons are magnetized which enhance the plasma production and hence, ultimately control the etching aspect
ratio and film quality. In the present work, an E × B plasma is considered where ionization takes place and
finite temperature gradient also exists. Specifically, a theoretical model is developed for analysing the effect
of magnetic field on the density gradient driven instability. The growth rate of the instability is evaluated as a
function of plasma background density, scale length of density gradient, ionization frequency, charge on ions, ion
temperature gradient, temperatures of plasma species and magnetic field. To generalize the situation, case of
different masses of the ions is also reviewed by considering both the electrons and the ions to be magnetized.
Keywords
E × B plasma, Ionization, Temperature of plasma species, Ions’ mass, Density gradient driven instabilities.
1 PlasmaScience and Technology Laboratory, Department of Physics, Indian Institute of Technology Delhi, New Delhi, India
2 Departmentof Physics, Gargi College, University of Delhi, Delhi, India
*Corresponding author: hkmalik@physics.iitd.ac.in
2251-7227/2022/16(4)/162234 [http://dx.doi.org/10.30495/jtap.162234]
Munish et al. JTAP16(2022) -162234 3/7
2Te 2Te 2
− · ∂x ne0 − · ∂x ne1 − ∂x Te − αUx1 (2)
me n e me n e me 2P1 2Ti P1 ZeB0 2P1 ZeB0
− ∂x Ti − ∂x ni0 − ∂x Ti
(iii) y-component of the equation of motion Q1 mi Ωi Q1 m2i Ω2i ni0 Q1 m2i Ω2i
∂t ni1 +ni0 ∂xVx1 +Vx1 ∂x ni0 +ni0 ∂yVy1 +Vy0 ∂y ni1 = αni0 +αni1
(4) 2V1 Te 2P1 Ti ikωi 2V1 Te ikB0 e
+ ∂x ne0 − + ] = 0 (8)
W1 X1 me ne0 ωe Q1 mi Ω2i W1 X1 m2e ωe2
(v) x-component of the equation of motion
In the acceleration channel, the electron density, ion density,
Ze Ze
∂t Vx1 +Vy0 ∂yVx1 = − ∂x ϕ1 + · (Vy0 +Vy1 )(B0 ) electron drift velocity and ion drift velocity are taken to follow
mi mi the expression
2Ti 2 x 2
− · (∂x ni0 + ∂x ni1 ) − ∂x Ti − αVx1 (5) F0 = F00 e−10( d ) (9)
mi n i mi
(vi) y-component of the equation of motion Here, the peak value of ne0 , ni0 , U0 and V0 is represented by
F00 . Using the above velocities and densities profiles, the
Ze Ze un-perturbed part of Eq. (9) has been solved to calculate
∂t Vy1 +Vx1 ∂xVy0 +Vy0 ∂yVy1 = − · ∂y ϕ1 − ·Vx1 (B0 )
mi mi the growth rate of the instabilities. This led to the following
2Ti dispersion equation
− · ∂y ni1 − αVy0 − αVy1 (6)
mi n i
G1 ω 6 +G2 ω 5 +G3 ω 4 +G4 ω 3 +G5 ω 2 +G6 ω +G7 = 0 (10)
In Eqs. (1)-(6), ∂t , ∂x and ∂y are the first-order derivatives
with respect to t, x and y, respectively. α is the ionization The coefficients and the constants used in Eq. (10) are shown
frequency. Take Ωi = ZeB0 /mi and Ωe = eB0 /me as the ion- in appendix
cyclotron and electron-cyclotron frequencies, respectively,
Á = iω − α − ikUy0 , B́ = 1 + (2Te k2 /Áme ω) and ωe as the
electron-plasma frequency, given by (ne0 e2 /me ε0 )1/2 . Also
take A1 = iω −α −ikVy0 , B1 = 1+2Ti k2 /A1 mi ω and ωi as the
ion-plasma frequency, given by (ni0 e2 /mi ε0 )1/2 . Poisson’s
equation which reveals the relationship between the densities
of the plasma species and the electric potential is stated as
follows
ne0 e2 Z 2 e2 ni0
(∂x2 ϕ1 − k2 ϕ1 ) + ∂x2 ϕ1 [ − ]
X1 ÁB́ε0 me ωe S1 A1 B1 mi ωi ε0
2251-7227/2022/16(4)/162234 [http://dx.doi.org/10.30495/jtap.162234]
Munish et al. JTAP16(2022) -162234 4/7
2251-7227/2022/16(4)/162234 [http://dx.doi.org/10.30495/jtap.162234]
Munish et al. JTAP16(2022) -162234 5/7
N = α − ikVy0
Ω2 2ZeB0 Ωi Ωi Z 2 e2 B20
S1 = 1 + i2 + + 2 ∂ x Vy0 + ,
ωi mi ωi2 ωi2 m2i ωi2
2Ti ikΛ
Q=
Q́mi Ω2i
ikne0 e2 B0 2ikne0 e2 B0 ikne0 e3 B20
T1 = ∂xUy0 + + ,
ÁB́me Ω2e ε0 ÁB́me Ωe ε0 ÁB́m2e Ω2e ε0
Zeαni0 2Ti Zeik
M= + ∂x ni0
ε0 mi Ωi ε0
eB0 2eB0
U1 = 1 − 2
∂xUy0 + ,
me Ωe me Ωe
2ikZ 2 e2 Ti B0 2ikni0 Ze
+ 2 2
∂x ni0 + ∂x Ti
mi Ωi ε0 mi Ωi ε0
ne0 eΩe 2 ne0 B0 e2 2
T1 = ∂x Uy0 + ∂x Uy0
ÁB́ε0 ωe2 ÁB́ε0 me ωe2
2Z 2 e2 ikni0 B0 2ikni0 Ze
+ 2 2
∂x Ti + ∂xVy0 ∂x Ti
mi Ωi ε0 mi Ω2i ε0
4Ω2e 2Ωe
W1 = 1 + − 2 ∂xUy0
ωe2 ωe
2Ti 2Ti ZeB0
+Λ[− ∂x ni0 −
Q́mi ni0 Ωi Q́m2i Ω2i ni0
4Ω2e eB0
X1 = 1 + − ∂xUy0 ,
ωe2 me ωe2
2 2ZeB0
− ∂x Ti − ∂x Ti ]
Q́mi Q́m2i Ω2i
G1 = QLiF, G2 = B2 iLF + QLX́ + QKiF,
2ZeB0 Z 2 e2 B20 ZeB0
Q́ = 1 + + 2 2 + ∂xVy0 ,
G3 = A2 LFi + B2 LX́ + B2 KFi + QLÝ + QK X́ + RC2 Fi, mi Ωi mi Ω i mi Ω2i
2251-7227/2022/16(4)/162234 [http://dx.doi.org/10.30495/jtap.162234]
Munish et al. JTAP16(2022) -162234 6/7
2251-7227/2022/16(4)/162234 [http://dx.doi.org/10.30495/jtap.162234]
Munish et al. JTAP16(2022) -162234 7/7
2251-7227/2022/16(4)/162234 [http://dx.doi.org/10.30495/jtap.162234]