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Microelectronics Journal 39 (2008) 802806 www.elsevier.com/locate/mejo

A MEMS-based piezoelectric power generator array for vibration energy harvesting

Jing-Quan Liua,, Hua-Bin Fanga, Zheng-Yi Xub, Xin-Hui Maob, Xiu-Cheng Shena, Di Chena, Hang Liaob, Bing-Chu Caia
a

National Key Lab of Micro/Nano Fabrication Technology, Key Lab for Thin Film and Micro-fabrication Technology of Ministry of Education, Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, Shanghai 200030, PR China b ACS Sensors Lab, Honeywell, Shanghai 201203, PR China Received 13 September 2007; accepted 15 December 2007 Available online 20 February 2008

Abstract Piezoelectric power generator made by microelectromechanical system (MEMS) technology can scavenge power from low-level ambient vibration sources. The developed MEMS power generators are featured with xed/narrow operation frequency and power output in microwatt level, whereas, the frequency of ambient vibration is oating in some range, and power output is insufcient. In this paper, a power generator array based on thick-lm piezoelectric cantilevers is investigated to improve frequency exibility and power output. Piezoelectric cantilevers array has been designed and fabricated. The cantilevers array can be tuned to the frequency and expanded the excited frequency bandwidth in ambient low frequency vibration. Serial connection among cantilevers of the array is investigated. The prototype generator has a measured performance of 3.98 mW effective electrical power and 3.93 DC output voltage to resistance load. This device is promising to support networks of ultra-low-power, peer-to-peer, wireless nodes. r 2007 Elsevier Ltd. All rights reserved.
PACS: 84.60.Bk; 85.85.+j; 85.50.n Keywords: Energy harvesting; MEMS; Cantilevers array; Vibration frequency; Serial connection; Low frequency

1. Introduction With the recent advances in wireless and microelectromechanical system (MEMS) technology, sensors have the ability to be placed almost anywhere [1,2]. Due to the nature of these wireless sensors, it is urgent that they contain their own power supply. In most cases this power supply is the conventional battery. However, the battery has a nite lifespan and once extinguished of its power, the sensor must be retrieved and the battery replaced. With these sensors being placed in remote location it can become an expensive task to obtain and replace the battery. Energy harvesting from ambient vibration by MEMS technology is one of the promising alternatives. The vibration can be converted to electric energy using three
Corresponding author.

E-mail address: jqliu@sjtu.edu.cn (J.-Q. Liu). 0026-2692/$ - see front matter r 2007 Elsevier Ltd. All rights reserved. doi:10.1016/j.mejo.2007.12.017

types of electromechanical transducers: electromagnetic [1], electrostatic [1], and piezoelectric [216]. Piezoelectric vibration-to-electricity converters have high electromechanical coupling, require no external voltage source and are particularly attractive for use in MEMS especially for volume-limited wireless sensor node [11]. Glynne-Jones et al. [9,10] and Shu and Lein [11] provided an approach to design, model and optimize the conversion efciency of the vibration generator. Jeon developed a thin lm piezoelectric power generator based on MEMS using a d33 mode. Its resonant operation frequency is at 13.7 kHz [12]. Roundy reported a kind of prototype of tiny, piezoelectric cantilever (925 mm in length) with a relatively heavy mass on the free end, which can generate 375 mW from a vibration source of 2.5 m/s2 at 120 Hz. The scale of the device, however, is larger than that of most MEMS devices [13]. duToit et al. [14] proposed a prototype for lowlevel ambient MEMS harvester. Another MEMS-based

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J.-Q. Liu et al. / Microelectronics Journal 39 (2008) 802806 803

piezoelectric power generator designed to harvest low frequency vibration energy by adding nickel proof mass based on UV-LIGA technology [15,16]. So far, the developed MEMS power generators are featured with xed or narrow operation frequency and power output in microwatt level, whereas the frequency of ambient vibration is oating in some range, and microwatt is insufcient to power current sensing node. In this paper, a power generator array based on thick-lm piezoelectric cantilevers is investigated to improve power output and frequency exibility. Also, since many sources in the ambient vibration are in the low frequency (o1000 Hz), the cantilevers are designed working under low frequency range.

2. Structure design and prototype fabrication Cantilever beam conguration is chosen for its simplicity, compatibility with MEMS manufacturing processes, and its low structural stiffness. The beam conguration is a structure consisting of a silicon base frame, a single piezoelectric element (layer sandwiched between a pair of metal (Pt/Ti) electrodes), and a proof metal mass in free end, as illustrated in Fig. 1. The cantilever device operates as follows. When base frame of the device is vibrated by environmental groundwork, simultaneous input force feeds into this second-order mechanical system, then some parts of the cantilever will move relatively to the base frame. That relative displacement causes the piezoelectric material in the system to be tensed or compressed, which in turn induces charge shift and accumulation due to piezoelectric effect. Magnitude of the electric charge voltage is proportional to the stress induced by the relative displacement. It is well known that resonant vibration can amplify the relative displacement remarkably. Thus, the micro generators mechanically resonate at a frequency of the ambient vibration can generate maximum electrical power. Natural p frequency of structure is approximately given as $ k=m by its stiffness (k) and mass (m). This indicates that varying structure dimension of the cantilever can regulate the natural frequency of the power generator. A single cantilever power generator device [10] reveals the performance of its output voltage under different excited frequency in Fig. 2. It shows that the output voltage drops off dramatically when the excited frequency p deviates from resonant point. To locate in range of X1= 2 maximum output voltage, the available bandwidth is just within 723 Hz. The narrow available bandwidth of the device extremely restricts its practical application in ambient vibration. Under many circumstances, the driving frequency will be known before the device is designed and fabricated. In other situations, however, this frequency will not be known a prior, or it may change over time. It is also relevant to consider the mass fabrication of such devices. So it would clearly be advantageous to create a device that can operate effectively over a range of vibration frequencies.

Fig. 1. Schematic conguration of single cantilever beam.

Fig. 2. Output voltage as a function of excited frequency.

Fig. 3. Fabrication process of micro power generator array: (1) functional lms preparation: SiO2/Ti/Pt/PZT/Ti/Pt, (2) functional lms pattern, (3) silicon slot etching by RIE, (4) back silicon deep etching by KOH solution, (5) cantilever release by RIE, and (6) metal mass micro fabrication and assemblage.

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Roundy et al. [13] developed two solutions to tune resonance frequency of beam. One is to apply an axial preload by set-screws or other devices that push on the clamps at either end of the beam, which passively control the stiffness (k) of the beam to tune its resonance point. The second active tuning method is to design device with a wider bandwidth that connects N springmassdamper systems in one long cantilever. The two solutions are effective to address resonance frequency issue, but they are not available in MEMS fabrication due to its relative complicated structure. The overlapping effect of resonance frequency is introduced in our design. A MEMS array with multicantilevers is designed with its single cantilever behaving closer resonance frequency one after another. Each cantilever is one springmassdamper system with one

degree of freedom. When cantilevers with closer resonance frequency connected together as an array, the available bandwidth will cover the range of minimum to maximum resonance value of the cantilevers in the array. On the other hand, MEMS fabrication technology ensures the advantage of mass production of cantilevers with various structure parameters in an array. The techniques of micro fabrication used here mainly involve functional lms preparation and pattern, bulk silicon micromachining, structure release and mass assemblage [15,16]. Firstly, cantilevers with closer resonance frequency are designed with proper structure parameter. The center level of resonance frequency is determined by the target vibration frequency level. And the structure parameters can be selected through mature modal simulation such as using ANSYS software. Based on the design for structure parameters selection and cantilevers distribution in array, mask layout for MEMS fabrication can be prepared. The detail of fabrication process can refer in Ref. [16,17]. Although Ref. [15,16] only introduces one single cantilever, the process of cantilevers-array is similar with Ref. [15,16]. Fig. 3 illustrates the fabrication process. A made-up power generator array is shown in Fig. 4. The size of the cantilevers is of 12 mm silicon layer thickness, 3.2 mm PZT layer thickness, the length and width are in range of 20003500 and 7501000 mm respectively. And the natural frequency is in 200400 Hz range. 3. Testing and analysis The vibration-electricity measurement is executed with the fabricated power generator standing in a controllable vibration source (the vibration frequency is adjustable and the vibration acceleration is 0.5 g). The metal pads on top and bottom electrodes are connected to the load (resistor) through the down-lead, using oscilloscope to monitor and record the load voltage signal. Fig. 5 shows the schematic

Fig. 4. Picture of power generator array prototype.

Fig. 5. Performance testing of piezoelectric power generator: (1) natural frequency and AC output voltage, (2) AC power output delivered to adjustable resistor, (3) voltage after bridge rectication (4) capacitor charge.

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J.-Q. Liu et al. / Microelectronics Journal 39 (2008) 802806 Table 1 Respective performance of the three cantilevers in the array Cantilever no. C1 C2 C3 Cantilever geometry (mmmm) (different Ni mass) Length3000 mm; width1000 mm Natural frequency (Hz) 229 234 226 AC output voltage (V) 2.01 1.86 1.75 DC voltage across capacitor (V) 1.57 1.43 1.22 Maximum power output (mW) 2.55 2.1 1.87 805

Fig. 6. Performance of one single cantilever power generator: (1) AC output voltage on oscillograph, (2) output voltage after full wave rectication, (3) voltage on a charging capacitor.

Fig. 7. AC output of three cantilevers in an array and their direct serial connection.

conguration of testing methods and measurements for each single cantilever. Three cantilevers (C1, C2, and C3) as an array are taken as measurement sample in the testing and analysis. The related information is listed in Table 1. The bandwidth covers from 226234 Hz, which indicates the cantilevers array has wider bandwidth than that of single cantilever. The respective performances are measured, including natural frequency, output voltage, rectication property and capacitor charge. Fig. 6 illustrates the performance of cantilever C1. As an array, these three cantilevers are electrically connected. When they are connected directly, the AC electrical power from different cantilevers can be counteracted as they have different phases. Fig. 7 shows the array excited under frequency of 229 Hz, and the AC output voltages of each cantilever are 2.01 V (C1), 1.64 V (C2) and 1.606 V (C3), respectively. The AC output voltage after direct serial connection is about 3.06 V, which is far less than the value of 2.01+1.64+1.606 5.256 V. As shown in Fig. 7, there exists phase difference of nearly 1201 between C2 and C1. The phase difference impairs the electrical accumulation of three cantilevers. And the DC voltage across capacitor after rectication is only 2.51 V, and the maximum DC power output is about 3.15 mW. One approach to this problem is provided by the following. One DC output voltage can be attained by rectifying an AC output voltage from each cantilever, and DC output voltage terminals are connected in series to

Fig. 8. Electrical connection after ACDC rectication.

achieve a higher voltage, just like serial connection of the batteries. The output voltage from different cantilevers cannot be counteracted. Fig. 8 shows the serial connection method. After ACDC rectication and serial connection of all cantilevers together, the DC voltage goes up to 3.93 V and the maximum DC power output is about 3.98 mW. Although the rectication circuit consumes some electrical energy, it still takes advantage compared with the direct connection under AC signal. On the other hand, the cantilevers in the array connected after ACDC rectication show wider bandwidth than that of single one. It seems that the overlapping/accumulation effect is effective to expand bandwidth of power generator.

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806 J.-Q. Liu et al. / Microelectronics Journal 39 (2008) 802806 [5] R. Amirtharajah, A.P. Chandrakasan, Self-powered signal processing using vibration-based power generation, IEEE J. Solid State Circuits 33 (1998) 687695. [6] S. Meninger, J.O. Mur-Miranda, R. Amirtharajah, A.P. Chandrakasan, J.H. Lang, Vibration-to-electric energy conversion, IEEE Trans. Very Large Scale Integr. VLSI Syst. 9 (1) (2001) 6476. [7] R. Tashiro, N. Kabei, K. Katayama, Y. Ishizuka, F. Tsuboi, K. Tsuchiya, Development of an electrostatic generator that harnasses the motion of a living body, JSME Int. J. Ser. C 43 (4) (2000) 916922. [8] S. Roundy, P.K. Wright, J. Rabaey, A study of low-level vibrations as a power source for wireless sensor nodes, Comput. Commun. 26 (2003) 11311144. [9] P. Glynne-Jones, S.P. Beeby, E.P. James, N.M. White, The modeling of a piezoelectric vibration powered generator for microsystems, in: Proceedings of the 11th International Conference on Solid-State Sensors and Actuators, Transducers 2001 and Eurosensors XV, Munich, Germany, 2001, pp. 4649. [10] P. Glynne-Jones, et al., Towards a piezoelectric vibration powered microgenerator, IEE Sci. Meas. Technol. 148 (2) (2001) 6872. [11] Y.C. Shu, I.C. Lien, Efciency of energy conversion for a piezoelectric power harvesting systems, J. Micromech. Microeng. 16 (2006) 24292438. [12] Y.B. Jeon, R. Sood, J.H. Jeong, S.G. Kim, MEMS power generator with transverse mode thin lm PZT, Sensors Actuators A 122 (2005) 1622. [13] S. Roundy, E.S. Leland, J. Baker, E. Carleton, E. Reilly, E. Lai, B. Otis, J.M. Rabaey, P.K. Wright, V. Sundararajan, Improving power output for vibration-based energy scavengers, IEEE Pervasive Comput. 4 (2005) 2836. [14] N.E. duToit, B.L. Wardle, S.G. Kim, Design considerations for MEMS-scale piezoelectric mechanical vibration energy harvesters, Integr. Ferroelectr. 71 (2005) 121160. [15] H.B. Fang, J.Q. Liu, Z.Y. Xu, D. Chen, B.C. Cai, A MEMS-based piezoelectric power generator for low frequency vibration energy harvesting, Chinese Phys. lett. 23 (2006) 732734. [16] H.B. Fang, J.Q. Liu, Z.Y. Xu, D. Chen, B.C. Cai, Fabrication and performance of a MEMS-based piezoelectric power generator for vibration energy harvesting, Microelectron. J. 37 (2006) 12801284.

4. Conclusion In summary, a micro-power generator array has been investigated by utilizing PZT lm as the transducer to harvest ambient low-level vibration. It is fabricated successfully by the MEMS process. The prototype generator has a measured performance of 3.98 mW of effective electrical power and 3.93 DC output voltage. The experimental results show that the arrayed device is promising in improving operation bandwidth and power output of power generator. It is indicated that a potential in the development of the power generator meets applications in wireless/embedded sensor networks. Acknowledgements This work is supported by Honeywell Company. The authors also would like to thank Professor Jinrong Cheng of Shanghai University for PZT lm material preparation. References
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