Section 3.

1 Device Structure Input Statements

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PROFILE
The PROFILE statement denes proles for impurities and other quantities to be used in the device structure.
PROFILE [REGION=<c>] [X.MIN=<n>] [ {WIDTH=<n> | X.MAX=<n>} ] [Y.MIN=<n>] [ {DEPTH=<n> | Y.MAX=<n>} ] Output Doping File [OUT.FILE=<c>] Uniform Profile { ( UNIFORM {N-TYPE | P-TYPE | IMPURITY=<c> | OTHER=<c>} N.PEAK=<n> ) Analytic Profiles | ( {N-TYPE | P-TYPE | IMPURITY=<c> | OTHER=<c>} {N.PEAK=<n> | DOSE=<n>} {Y.CHAR=<n> | Y.JUNCTI=<n>} {X.CHAR=<n> | XY.RATIO=<n>} [X.ERFC] ) Analytic Polygonal Profiles | ( POLYGON {N-TYPE | P-TYPE | IMPURITY=<c> | OTHER=<c>} N.PEAK=<n> X.POLY=<a> Y.POLY=<a> N.CHAR=<n> [N.ERFC] ) Analytic Rotated Profiles | ( ROTATE {N-TYPE | P-TYPE | IMPURITY=<c> | OTHER=<c>} N.PEAK=<n> X.CENTER=<n> Y.CENTER=<n> R.INNER=<n> R.OUTER=<n> R.CHAR=<n> [R.ERFC] ) One-Dimensional Profiles from Data Files | ( IN.FILE=<c> [N.OFFSET=<n>] [Y.OFFSET=<n>] { ( 1D.PROC [N-TYPE] [P-TYPE] ) | ( SUPREM2 [N-TYPE] [P-TYPE] ) | ( 1D.ASCII [Y.COLUMN=<n>] { ( [N.COLUMN=<n>] [P.COLUMN=<n>] ) | ( D.COLUMN=<n> {IMPURITY=<c> | OTHER=<c>} ) } ) } {X.CHAR=<n> | XY.RATIO=<n>} [X.ERFC] )
(PROFILE statement continued on next page)

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PROFILE

(PROFILE statement continued from previous page)

Two-Dimensional Profiles from Data Files | ( IN.FILE=<c> [N.OFFSET=<n>] [X.OFFSET=<n>] [Y.OFFSET=<n>] { ( 2D.PROC [N-TYPE] [P-TYPE] ) | ( SUPRA [N-TYPE] [P-TYPE] ) | ( TSUPREM4 [N-TYPE] [P-TYPE] ) | ( 2D.ASCII [X.COLUMN=<n>] [Y.COLUMN=<n>] { ( [N.COLUMN=<n>] [P.COLUMN=<n>] ) | ( D.COLUMN=<n> {IMPURITY=<c> | OTHER=<c>} ) } ) | ( TIF [ {IMPURITY=<c> | ( [N-TYPE] [P-TYPE] )} ] [OTHER=<c>] ) | ( MEDICI [ {IMPURITY=<c> | ( [N-TYPE] [P-TYPE] )} ] [OTHER=<c>] ) } [X.CHAR=<n>] [X.ERFC] [Y.CHAR=<n>] [Y.ERFC] ) }

Parameter
REGION

Type
char

Denition
The names of the regions to which the prole is to be added. If more than one name is given, they should be enclosed within parentheses and separated with commas (for example, (silicon-1,silicon-2)). The minimum x location of the prole. synonyms: X.LEFT, X.PEAK The x extent of the prole.

Default
All semiconductor regions.

Units

X.MIN

number number

The minimum x location in the structure. The maximum x location in the structure minus X.MIN. The maximum x location in the structure. The minimum y location in the structure for input from a le or if UNIFORM is specied; otherwise, 0.0. The maximum y location in the structure minus Y.MIN for input from a le or if UNIFORM is specied; else 0.0.

microns microns

WIDTH

X.MAX

number number

The maximum x location of the prole. synonym: X.RIGHT The minimum y location of the prole. synonyms: Y.TOP, Y.PEAK

microns microns

Y.MIN

DEPTH

number

The y extent of the prole.

microns

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Parameter
Y.MAX

Type
number

Denition
The maximum y location of the prole. synonym: Y.BOTTOM

Default
The maximum y location in the structure for input from a le or if UNIFORM is specied; otherwise, Y.MIN. false

Units
microns

N-TYPE

logical

Species that the impurity prole is n-type (donors). If the 1D.PROC, SUPREM2, 2D.PROC, SUPRA, TIF, or MEDICI parameter is specied, then the donor impurity prole is read from the data le. If the TSUPREM4 parameter is specied, the donor impurity prole is reconstructed from the doping in the data le using N(donor)=[N(total)+N(net)]/2. synonym: N.TYPE Species that the impurity prole is p-type (acceptors). If the 1D.PROC, SUPREM2, 2D.PROC, SUPRA, TIF, or MEDICI parameter is specied, then the acceptor impurity prole is read from the data le. If the TSUPREM4 parameter is specied, the acceptor impurity prole is reconstructed from the doping in the data le using N(acceptor)=[N(total)-N(net)]/2. synonym: P.TYPE The name of an impurity for which a prole is being dened or read. The chemical name of the impurity should be specied here (such as B or As). Medici assumes all impurities specied with this parameter are electrically active. If the TIF or MEDICI parameter is specied, multiple impurities may be read (separate their names with commas and enclose the entire list with parentheses). The name of an arbitrary quantity for which a prole is being dened or read. If the TIF or MEDICI parameter is specied, multiple OTHER quantities may be read (separate their names with commas and enclose the entire list with parentheses).

P-TYPE

logical

false

IMPURITY

char

none

OTHER

char

none

Output Doping File

OUT.FILE char The identier for the data le to which the prole information is to be written. This le is used only in conjunction with the REGRID statement. synonym: OUTFILE none

Uniform Prole
UNIFORM N.PEAK logical number Species that the prole has a uniform distribution. The peak impurity concentration for an impurity prole or the peak value for OTHER proles. synonym: CONCENTR false none #/cm3 for impurities

Analytic Proles
DOSE Y.CHAR number number The dose of the impurity prole assuming a full Gaussian distribution. The y characteristic length of the prole outside the range of Y.MIN < y < Y.MAX. synonym: CHAR none 0.0002 for data read from a le; otherwise, none #/cm2 microns

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PROFILE

Parameter
Y.JUNCTI

Type
number

Denition
The y location under the center of the prole where the magnitude of the prole being added equals the magnitude of the background prole. synonym: JUNCTION The horizontal characteristic length of the prole outside the range X.MIN < x < X.MAX. synonym: LAT.CHAR The ratio of the horizontal characteristic length to the vertical characteristic length for an analytic prole. If the vertical prole is input from a data le, XY.RATIO is the factor which multiplies the extent of the prole when the prole is rotated to the horizontal direction. synonym: RATIO.LA Species that the x variation of the prole is described by a complementary error function. If this parameter is false, then the horizontal variation is uniform from X.MIN to X.MAX with Gaussian tails outside of this region. synonym:ERFC.LAT

Default
none

Units
microns

X.CHAR

number

microns 0.0002 for data read from a le; otherwise, XY.RATIO*Y.CHAR, 1.0 none

XY.RATIO

number

X.ERFC

logical

false

Analytic Polygonal Proles

POLYGON X.POLY Y.POLY N.CHAR logical array array number Species that the prole is a polygon. The polygon vertices are dened by a pair of arrays: X.POLY and Y.POLY. Species an array of x coordinates of the polygon vertices. The number of the vertices should not exceed 40. Species an array of y coordinates of the polygon vertices. The number of the vertices should not exceed 40. The characteristic length of the prole outside of the polygon. synonym: R.CHAR Species that the lateral variation of the polygonal prole outside of the polygon is described by a complimentary error function. synonym: R.ERFC false none none none microns microns microns

N.ERFC

logical

false

Analytic Rotated Proles

ROTATE X.CENTER Y.CENTER R.INNER R.OUTER R.CHAR logical number number number number number Species that the prole is rotated around a rotation center. Species the x location of the rotation center. Species the y location of the rotation center. The inner radius (distance from the rotation center) of a circular prole. The outer radius (distance from the rotation center) of a circular prole. The characteristic length of the prole outside of the R.INNER to R.OUTER rotation range. synonym: N.CHAR false none none none none none microns microns microns microns microns

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Parameter
R.ERFC

Type
logical

Denition
Species that the radial variation of the rotated prole outside of the R.INNER to R.OUTER range is described by a complimentary error function. synonym: N.ERFC

Default
false

Units

One-Dimensional Proles from Data Files

IN.FILE N.OFFSET char number number logical logical logical The identier for the data le containing the prole. synonyms: INFILE and FILE The concentration to be subtracted from both the donor and acceptor impurity proles obtained from a data le. The y direction shift of a prole obtained from a data le. Species that the data le containing an impurity prole was generated by TMA SUPREM-3. Species that the data le containing an impurity prole was generated by SUPREM-2. Species that prole data is read from a formatted le. One column of the le should correspond to depth (in microns) and should be identied with Y.COLUMN. The le should also contain one or more columns of prole data that can be identied with the parameters N.COLUMN, P.COLUMN, or D.COLUMN. The column of the formatted data le corresponding to the y coordinate. none 0.0 0.0 false false false atoms/ cm3 microns

Y.OFFSET 1D.PROC SUPREM2 1D.ASCII

Y.COLUMN

number

1 if 1D.ASCII is specied; 2 if 2D.ASCII is specied.

none

N.COLUMN

number

The column of the formatted data le corresponding to net donor impurity concentration. Data with values less than zero are considered to correspond to net acceptor impurity concentration.

None if P.COLUMN is none specied; otherwise, 2 if 1D.ASCII is specied and 3 if 2D.ASCII is specied. none none

P.COLUMN

number

The column of the formatted data le corresponding to net acceptor impurity concentration. Data with values less than zero are considered to correspond to net donor impurity concentration. The column of the formatted data le corresponding to either IMPURITY or OTHER prole values.

D.COLUMN

number

none

none

Two-Dimensional Proles from Data Files

X.OFFSET 2D.PROC number logical The x-direction shift of a two-dimensional prole obtained from a data le. Species that the data le is in a format generated by TMA SUPRA with a revision code of 8501 or later. This parameter is used to read a data that was saved by using TMA SUPRAs SAVEFILE statement with the DEVICE parameter specied. Species that the data le is in a format generated by a version of TMA SUPRA with a revision code earlier than 8501. 0.0 false microns

SUPRA

logical

false

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PROFILE

Parameter
TSUPREM4

Type
logical

Denition
Species that the data le is in a format generated by TSUPREM-4. This parameter is used to read a data that was saved by using TSUPREM-4s SAVEFILE statement with the MEDICI parameter specied. Species that prole data is read from a formatted le. Two columns of the le should correspond to the x- and y coordinates (in microns) and should be identied with X.COLUMN and Y.COLUMN, respectively. The le should also contain one or more columns of prole data that can be identied with the parameters N.COLUMN, P.COLUMN, or D.COLUMN. The column of the formatted data le corresponding to the x coordinate. Species that the data le is in TIF. Species that the data le is a standard Medici mesh le.

Default
false

Units

2D.ASCII

logical

false

X.COLUMN

number logical logical

1 if 2D.ASCII is specied false false

none

TIF MEDICI

Description
The PROFILE statement can be used to describe both impurity proles and other arbitrary two-dimensional proles for the structure. Proles may be dened either analytically or through input from a data le. The data le can be a formatted le containing columns of data representing coordinates and values, the output generated by a process simulation program, or a Medici mesh le containing prole information.

See Also

To further illustrate the PROFILE statement, refer to input le mdex1 in N-Channel MOSFET Examples, Chapter 4, Impurity Proles on page 4-5.

Prole Types
The prole type is specied with one of the parameters N-TYPE, P-TYPE, IMPURITY, or OTHER. The parameters N-TYPE and P-TYPE are used with impurity proles and merely classify them as either donors or acceptors.

Specifying Individual Impurity Proles

The IMPURITY parameter is used to specify individual impurities for the structure (such as B or As). This parameter can be used to specify the name of an impurity that is being dened analytically or the names of the impurities to be read from ASCII, Medici, or TIF les. The use of the IMPURITY parameter is illustrated in the following examples. Dene an analytic boron prole:
PROFILE + IMPURITY=B N.PEAK=1E18 Y.MIN=0 Y.MAX=0 Y.CHAR=.2 X.MIN=0 X.MAX=0.5 X.CHAR=0.2

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Read an arsenic prole from a 2D ASCII le:

PROFILE + IMPURITY=As IN.FILE=cool_data 2D.ASCII X.COLUMN=1 Y.COLUMN=2 D.COLUMN=3

Read multiple proles from a TIF le:

PROFILE IMPURITY=(B,As,P,In) IN.FILE=cool.tif TIF

Note:
When using the IMPURITY parameter, impurities should be specied with their chemical name. All impurities specied with IMPURITY are assumed to be electrically active and their names are stored internally with the letter a appended to their chemical name. When reading impurities from TIF les, specifying IMPURITY=(B,AS,P,...) will cause the program to look for Ba, Asa, Pa,... in the TIF le.

Specifying Proles for Other Quantities

The OTHER parameter is used to specify spatial distributions of arbitrary quantities other than electrically active impurities. As with impurities, OTHER quantities can be dened analytically or read from ASCII, Medici, or TIF les. Some uses of the OTHER parameter are illustrated in the following examples. Dene an analytic density of states for use with the TRAP statement:
PROFILE + OTHER=DOS N.PEAK=1E19 Y.MIN=0 Y.MAX=0 Y.CHAR=.1

Read a lifetime prole from a 2D ASCII le for use on EXTRACT or TRAP statements:
PROFILE + OTHER=Lifetime IN.FILE=life.dat 2D.ASCII X.COLUMN=1 Y.COLUMN=2 D.COLUMN=3

Read the chemical boron concentration from a TIF le:

PROFILE OTHER=B IN.FILE=stuff.tif TIF

Read the stress components from a TIF le:

PROFILE OTHER=(Sxx,Syy,Sxy) IN.FILE=stuff.tif TIF

Analytic Proles
Specifying UNIFORM creates a uniform prole of concentration N.PEAK. Otherwise, the prole has a constant concentration of N.PEAK only in the region X.MIN < x < X.MAX and Y.MIN < y < Y.MAX. Outside this region, the prole varies vertically as a Gaussian with a characteristic length of Y.CHAR. The horizontal prole outside this region can either vary as a Gaussian (the default) or as the difference of two complementary error functions (if X.ERFC is specied). In either case, a characteristic length of X.CHAR or XY.RATIO*Y.CHAR is used in the x direction. The mathematical description of an analytic prole is given by

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PROFILE

N ( x, y ) = N.PEAK a ( x ) b ( y )

Equation 3-3

Vertical Variation

The function b ( y ) describes the vertical variation of the prole and is given by

y Y.MIN 2 exp ------------------------ Y.CHAR b( y) = 1 y Y.MAX 2 exp ------------------------ Y.CHAR

y < Y.MIN
Y.MIN y Y.MAX
Equation 3-4

y > Y.MAX

Lateral Direction Variation

The function a ( x ) describes the lateral variation of the prole and is given by

a ( x) a( x) = 1 a2 ( x )
where

X.ERFC not specified X.ERFC specified

Equation 3-5

x X.MIN 2 exp ------------------------ X.CHAR a1 ( x ) = 1 x X.MAX 2 exp ------------------------ X.CHAR

and

x < X.MIN
X.MIN x X.MAX
Equation 3-6

x > X.MAX

x X.MIN x X.MAX erfc ------------------------ erfc ------------------------ X.CHAR X.CHAR a 2 ( x ) = ------------------------------------------------------------------------------------2

Equation 3-7

Junction Depth

The Y.JUNCTI parameter may be used to specify the p-n junction depth as a y location where the magnitude of the impurity prole equals the magnitude of the current background impurity concentration. Y.JUNCTI is used to dene the vertical characteristic length which otherwise must be specied with the Y.CHAR parameter.

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Impurity Dose

The DOSE parameter may be used to specify the integral amount of doping atoms which relates to the peak concentration in terms of the vertical characteristic length as N.PEAK = DOSE ( Y.CHAR ) . A polygon can be dened in the XY plane for describing an area where the prole has a constant value of N.PEAK. The polygon is dened by a pair of coordinate arrays X.POLY and Y.POLY representing the location of vertices of the polygon. The polygon can be arbitrary as long as it is non-self-intersecting. The last vertex may or may not coincide with the rst one, either way will do. Lateral prole extension outside of the polygon is determined by the parameters N.CHAR and N.ERFC. These parameters are applied to the lateral prole extension in the direction, normal to the nearest polygon edge. Outside of the prole bounding box (X.MIN, X.MAX, Y.MIN, and Y.MAX) there is no lateral prole extension for a polygonal prole.

Polygonal Proles

Prole Rotation

A prole can also be described by a rotation in the XY plane around a rotation center, dened by the center location coordinates X.CENTER and Y.CENTER. When using a rotated prole, the prole has a constant value of N.PEAK within the range R.INNER to R.OUTER. If R.INNER is zero, then a circular prole is created, otherwise, a donut-shaped prole is created. Lateral prole extension outside of the range R.INNER to R.OUTER is determined by the parameters R.CHAR and R.ERFC. These parameters are applied to the lateral prole extension in the radial direction. Outside of the prole bounding box the lateral prole extension is dened by the conventional parameters X.CHAR, X.ERFC, and Y.CHAR. A combination of the prole rotation and prole bounding box (X.MIN, X.MAX, Y.MIN, and Y.MAX) can be used in order to form segments of a circular prole.

One-Dimensional Proles from Data Files

The vertical impurity prole may be input from a data le by specifying the IN.FILE parameter and one parameter from the set 1D.PROC, SUPREM2, or 1D.ASCII. By default, the origin for the impurity prole is aligned with the vertical origin in Medici. For one-dimensional impurity proles input from data les created by a process simulation program, the origin occurs at the rst point of the bottom semiconductor material (polysilicon and silicon are treated as the same material). The Y.OFFSET parameter may be used to shift the vertical prole relative to the Medici structure.

Vertical Range

The Y.MIN and Y.MAX parameters dene the y interval within which the impurity proles contribute to the total impurity distribution for the structure. The
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