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Final Mems Nems
Final Mems Nems
PRESENTATION BY:-
NAWNIT KUMAR
M.TECH
OUTLINE
Introduction Cantilever Technique
Nanocalorimeter
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INTRODUCTION
Nano-Electro-Mechanical system (NEMS) is the integration of mechanical elements, sensors, actuators and electronics on
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Transducer
a device that converts a primary form of energy into a corresponding signal with a different energy form
Primary Energy Forms: mechanical, thermal, electromagnetic, optical, chemical, etc.
Sensor
a device that detects/measures a signal or stimulus acquires information from the real world
Actuator
a device that generates a signal or stimulus
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APPLICATION
NEMS have an important impact on
1 Medicine and Bioengineering DNA and genetic code analysis and synthesis, drug delivery, diagnostics and imaging.
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Principle of Microcantilevers The key elements in the detection of a mass are the vibrational frequency and the deflection of the cantilever
Deflection
Proportional to mass content
Resonance frequency
R =(k/m)1/2
K = spring constant m= mass
Appl. Phys. Lett., Vol. 85, No. 13, 27 September 2004
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Readout Method
There are several methods available to observe the deflection and resonance frequency of the microcantilever Optical method Piezoresistive method
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Optical
Optical method requires the use of a low power laser beam If microcantilever does not deflect, then no biomolecules have been absorbed Laser beam hits a specific position on the position sensitive detector (PSD) Major weakness-high cost
*Karolyn
M. Hansen, Hai-Feng Ji, Guanghua Wu, Ram Datar, Richard Cote, Arunava Majumdar, and Thomas Thundat (2001) Cantilever-Based Optical Deflection Assay for Discrimination of DNA Single-Nucleotide Mismatches. Analytical Chemistry 73 (7): 1567-1571
Piezoresistive
These sensors measure the strain induced resistance change When the biomolecules are absorbed by the material there is a volumetric change in the sensing material Volumetric change is measured by resistance change in cantilever Advantages-Low cost
*Viral
detection using an embedded piezoresistive microcantilever sensor. Sensors and Actuators A: Physical 107 (3), 219224
Cantilever Sensors
As mass is added to the cantilever shifts the resonance frequency.
In this receptor only allow specific analyte to get adsorbed Rest remain out of contact Since analyte increases the mass so there is shift in resonance frequency
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*Amit K. Gupta, Pradeep R. Nair, Demir Akin, Michael R. Ladisch, Steve Broyles, Muhammad A. Alam, and Rashid Bashir (2006) Anomalous resonance in a nanomechanical biosensor. PNAS 103 (36): 13362-13367
With these devices, we can detect the mass of single-virus particles bound to the cantilever. Resonant frequency shift resulting from the adsorbed mass of the virus particles
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Nanocalorimetry
# Calorimetry is the science of measuring the heat of chemical reactions or physical changes. Calorimetry is performed with a calorimeter.
# The device consists of a substrate with an array of micromachined nanocalorimeter sensors. # Each nanocalorimeter consists of a silicon nitride membrane and a tungsten heating element that also serves as a temperature gauge. # The nanocalorimeter sensors are very sensitive, with a resolution of 10 nJ/K, allowing thermal analysis of small quantities of material.
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# The small mass of the individual nanocalorimeters enables measurements on samples as small as a few hundred nanograms at heating rates up to 104K/s.
# Each nanocalorimetric sensor consists of a thin-film thermistor sandwiched between two electrically insulating ceramic layers that form a membrane supported by the substrate
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The thermistor is fabricated from an electrically conductive film and serves to both measure temperature and heat the sample. Samples to be measured are limited to the thermistor area of each sensor, and may be deposited on either side of the membrane. The membrane design of the sensor thermally insulates the sample from the surroundings and ensures that the thermal mass of the sensor, i.e., the addendum, is very small.
A current passed through the heating element heats the sample and the calorimetric cell The power dissipated in the thermistor is determined experimentally from the current supplied to the thermistor and the potential drop between the voltage probes. The local temperature change is determined from a four-point thermistor resistance measurement that has been calibrated to temperature
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Measurements are performed in vacuum to eliminate convection losses and to provide a chemically inert testing environment. ceramic membrane consists of silicon nitride, selected because it is a good electrical insulator and because it is made easily into thin membranes. low thermal effusivity, which reduces the heat loss into the membrane. The thermistor is made of tungsten, because of its large temperature coefficient of resistance and its small resistivity, both of which are beneficial to measurement sensitivity
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Operating Principle
The power dissipated in the thermistor can be parsed into stored power and power lost to the surroundings. At constant pressure, the stored power results in a change of the enthalpy of the sample and calorimeter addendum. If we define a control volume (CV) that comprises the sample and the calorimeter addendum P is the total power dissipated in the thermistor, H is the time rate of change of the enthalpy within the CV, Q is the heat loss through the boundaries of the CV.
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where T is the temperature of the thermistor. Substituting Eq. (2) into Eq. (1) and rearranging results in
where T is the heating rate of the thermistor. The left side of Eq.3 can be directly calculated from measured quantities and is defined as the calorimetric signal from the sensor. If Q is known or if its contribution to Eq. (3) is negligible (e.g., in the case of large heating rates), the change in enthalpy with temperature, dH/dT, can be determined directly from the calorimetric signal. J. Mater. Res., Vol. 25, No. 11, Nov 2010
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To reduce the effect of the calorimeter addendum and/or heat loss on the measurement, it is often convenient to perform a reference measurement Equation (3) can then be rewritten to define the differential calorimetric signal as
del represents the difference between a sensor with a sample and a sensor that is either empty or contains a reference sample.
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Application of Nanocalorimetry
Studying molecular interactions It is also used to investigate the kinetics of phase transformations and reactions. Nanocalorimetry makes use of thin-film and micromachining technologies to significantly reduce the addendum of the calorimeter, enabling ultrasensitive calorimetric measurements
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NEMS are extensively used and now a days they play vital role in our life. Further technology development are going to improve their synthesis and performance. Many life saving robot are still to come. R&D work is still on and lots of new ideas are still to be implemented.
CONCLUSION
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REFERENCES
MEMS AND NEMS Systems, Devices, and Structures by Sergey Edward Lyshevski http://mems.sandia.gov
http://www.memsnet.org/mems/
http://gen.lib.rus.ec/ www.wikipedia.org
http://www.links999.net/robotics/robots/robots_introduction.html
THANK YOU
Thank you
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