Guided by: Dr.

Sharifuddin Mondal

Presented by: Shivam Choudaha

M.Tech in Manufacturing Tech. En.Roll:- 112604 Jaypee University Of Engineeing & Technology, Guna

CONTANTS OF PRESENTATION
Introduction MEMS fabrication techniques
Bulk micromachining Surface micromachining LIGA

Applications

Other techniques of fabrication

References

INTRODUCTION
Microelectromechanical systems (MEMS) is the technology of

manufacturing very small devices.

MEMS are made up of components between 1 to 100 micrometers in

size (i.e. 0.001 to 0.1 mm), and MEMS devices generally range in size from 20 micrometers to a millimeter (i.e. 0.02 to 1.0 mm).
Richard Feynman was theoretically introduce MEMS technology in

1959, but came in practices in 1980s.

MEMS FABRICATION TECHNIQUES

MEMS fabrication techniques
Bulk micromachining Surface micromachining LITHOGRAPHY, GALVANOFORMUNG, ABFORMUNG (LIGA)

BULK MICROMACHINING (BMM)

Bulk micromachining (BMM) describes the fabrication process of a

device taking advantage of all three space dimensions.

Bulk micromachining starts with a solid piece and removes material

until it reaches its final shape. The most common method for performing bulk micromachining is via selective masking and wet chemical solvents.
Photolithography is used to transfer a pattern from a mask to the

surface.

 Method of BMM Dry etching (Plasma or ion bombardment) Wet etching Chemical solvents used in BMM Potassium Hydroxide(KOH) Tetramethylammonium hydroxide(TMAH) Ethylene diamine pyrocatechol (EDP) Material used in BMM Silicon wafers Plastic Ceramic Glass

BULK MICROMACHINING

SURFACE MICROMACHINING (SM)

A typical Surface Micromachining process is a repetitive sequence of

depositing thin films on a wafer, photo patterning the films, and then etching the patterns into the films.
In order to create moving, functioning machines, these layers are

alternating thin films of a structural material (typically silicon) and a sacrificial material (typically silicon dioxide). The structural material will form the mechanical elements, and the sacrificial material creates the gaps and spaces between the mechanical elements.
At the end of the process, the sacrificial material is removed, and

the structural elements are left free to move and function.

 Materials used for deposition Silicon wafers Glass Plastic Method of SM Dry etching (Plasma etching) Wet etching(Chemical solvents) Chemical solvents used in BMM Potassium Hydroxide(KOH) Tetramethylammonium hydroxide(TMAH) Ethylene diamine pyrocatechol (EDP)

SURFACE MICROMACHINING

Final Product

LITHOGRAPHY, GALVANOFORMUNG, ABFORMUNG (LIGA)

LIGA is a fabrication technology used to create high-aspect-ratio

(width/height)microstructures.
In the process, sensitive polymer photo resist, typically Para-

Methoxymethamphetamine (PMMA), bonded to an electrically conductive substrate, is exposed to parallel beams of high-energy rays from a synchrotron radiation source through a mask partly covered with a strong ray absorbing material. Chemical removal of exposed (or unexposed) photo resist results in a three-dimensional structure, which can be filled by the electrode position of metal. The resist is chemically stripped away to produce a metallic mold insert. The mold insert can be used to produce parts in polymers or ceramics through injection molding.

 Steps of LIGA Exposure Development Electroforming Stripping Replication Method of LIGA X-Ray LIGA (High aspect ratio) U-V LIGA (Low aspect ratio) Material used in LIGA Silicon wafers Ti Cu and many other material

LIGA

APPLICATIONS
Techniques
Bulk micromachining

Applications
Pressure sensors Accelerometer IC fabrication Medical instruments TFT Thin film solar cells Modern IC (100 layers)

Surface Micromachining

LITHOGRAPHY, GALVANOFORMUNG, ABFORMUNG (LIGA)

Nozzle for uranium enrichment Waveguide

OTHER TECHNIQUES
High Aspect Ratio Microstructure Technology (HARMT)
Advanced Silicon Etch(ASE)

Deep reactive-ion etching (DRIE)

REFERENCES
P. Rai Choudhury, MEMS and MOEMS Technology and Applications

PHI Learning Private Limited, 2012, ISBN- 978-81-203-3752-7

Stephen A. Campbell, The Science and Engineering of MEMS Oxford

university press, 2010, ISBN-019-568144-4

Madou, M. (2003). Fundamentals of Microfabrication. CRC. ISBN 978-

0-8493-0826-0.
Saile, V. (2009). LIGA and its Applications. Wiley-VCH. ISBN 978-3-

527-31698-4.