Folded, Stacked Chip-Scale Package (FSCSP) Assembly and Test Process Flow

O tline
1. Assembly Process
Front of Line (FOL) End of Line (EOL)

2. Test Process
Test Process Operations (TPO) Finish Process Operations (FPO)

. Process !ontrols " #onitors

Intel CONFIDENTIAL. Covered by CNDA#33454

12/13/13

Assembly Process Flow

FOL
Front of Line (FOL) Assembly are stations from Die Prep to Internal Visual Inspection (IVI).
3 12/13/13

EOL
End of Line (EOL) Assembly are stations from Mold to Pac a!e Visual Inspection (PVI).

Intel CONFIDENTIAL. Covered by CNDA#33454

Front-o!-line (FO")
wa er Incomin! "afer Monitor "afer #a$ "afer Laminate %ac !rind Mount and De&tape Die Visual Inspection In&line stores
!Con"#"t" o F#l$ Atta%&' D#e Atta%&' and D#e (re"". DA 2/3 #" de)endent on "ta%*#n+ %on #+,rat#on or to) )a%*a+e

ta)e ",b"trate

-ape Prep

Die Preparation Modules

#ubstrate Mar #ubstrate %a e

#ubstrate Prep Modules

Die Attac'( )*+*,

DA F#l$

Front&of&Line Modules
Internal Visual Inspection "ire %ond A, w#re

12/13/13

Intel CONFIDENTIAL. Covered by CNDA#33454

#nd-o!-"ine (#O")
Internal Visual Inspection Pre&Mold %a e Pre&Mold Plasma .lean /old Co$)o,nd Post&Mold .ure Laser Mar (top) In Mar (bottom) Fold Ad'esi1e Dispense 2 Fold( Fold .ure( Fold %lister #creen( %all Attac' /eflo$
!Note0 For 1otto$ )a%*a+e only

Mold

Fold Ad&e"#ve

End&of&Line Modules

"older ")&ere" - l,.

Deflu0 #a$ #in!ulation

Pre&Fold Plasma .lean(

Pre&Fold %a e(

Pac a!e Visual Inspection -o -est Flo$

12/13/13

Intel CONFIDENTIAL. Covered by CNDA#33454

Front-o!-"ine (FO")
3AFE4 INCO/IN5 /ONITO4 3AFE4 6A3 3AFE4 LA/INATE 1AC754IND 3AFE4 /O8NT 3AFE4 DETA(E DIE 9I68AL IN6(ECTION

TA(E (4E(

6816T4ATE /A47IN5

6816T4ATE 1A7E

FIL/ ATTAC:

INTE4NAL 9I68AL IN6(ECTION ;I9#<

3I4E1OND

DIE (4E66

DIE ATTAC:

12/13/13

Intel CONFIDENTIAL. Covered by CNDA#33454

#nd-o!-"ine (#O")
(4E /OLD 1A7E (4E/OLD (LA6/A CLEAN /OLD (O6T /OLD C84E IN7/A47/ LA6E4/A47

6A3 6IN58LATION

FL8> CLEAN

6OLDE4 1ALL 4EFLO3

1ALL ATTAC:

(4E FOLD 1A7E

(4EFOLD (LA6/A CLEAN

A8TO FOLD

FOLD AD:E6I9E C84E

(75 9I68AL IN6(ECTION

TE6T

12/13/13

Intel CONFIDENTIAL. Covered by CNDA#33454

Test Process Flow

-PO
-est Process are stations from %urn&in to #tac Visual Inspection.

FPO
Finis' Process are stations from Laser Mar to Pac in!.

12/13/13

Intel CONFIDENTIAL. Covered by CNDA#33454

$n-stacked Package Testing Flow

%ottom Pac a!e %urn&in Post %urn&in Lo!ic .lass

-op Pac a!e Flas' .lass -est

Assy .omponent In1ty #tac

12/13/13

Intel CONFIDENTIAL. Covered by CNDA#33454

Test Process Flow

1OA4D LOAD 184NBIN 1OA4D 8NLOAD (O6T 184NBIN ELECT4ICAL TE6TIN5 (4EB6TAC7 1A7E (75 6TAC7IN5 (O6T 6TAC7 A66E/1LC DIE TE6T

$ottom Pac%a&e

FP O
1A 12/13/13 Intel CONFIDENTIAL. Covered by CNDA#33454

Package Stack %od le

#creen Print Pic 2 Place /eflo$

-ray&to&.arrier 11 12/13/13 Intel CONFIDENTIAL. Covered by CNDA#33454

.arrier&to&-ray

Finish Process Flow

TO(6IDE LA6E4/A47 DE66ICANT 1A7E 496I F9I /9DA (AC7

C&
12 12/13/13 Intel CONFIDENTIAL. Covered by CNDA#33454

FO" Process Controls ' (ie Prep

'pec(
,-# -afer 'a2 1./0.1. 1./0.1.4

Parameter
1is#ech 1is#ech !*t 5*ality

Fre)*ency
All Fablots All Fablots 'hiftly3 repair3 con63 chan&e cons*mables All Fablots

'amplin& 'i+e
/2afers per fablot3 2.pts per 2afer 2afers per fablot3 12pts per 2afer

-afer Laminate

1./0.1./

1is#ech Lamination 5*ality

2afers per fablot

$ac%&rind3 #o*nt " 7etape

1./0 .1128 1./0.219 1./0.1:1

#o*nt Acc*racy Thic%ness TT1

'hiftly3 repair3 con63 chan&e cons*mables All 2afers

2afers /rd&s per 2afer3 2afers 0/01 !'P3 /*nits re;ects in a 2afer < 1..= 1, of 2afer3 fo*nd >*nits re;ect in a lot < 1..= 1, of the lot

71,

1is#ech

13 12/13/13

Intel CONFIDENTIAL. Covered by CNDA#33454

FO" Process Controls ' Tape Prep, (A ) &*

'pec(
Tape Prep 1./0 ..42

Parameter
1is#ech Tape Placement 1is#ech #ar% 5*ality 1is#ech 1is#ech Film Placement 1is#ech ,nitial die placement 1is#ech 7ie Placement 1is#ech -ire ,nte&rity

Fre)*ency
All assy lots Per s*bstrate reel All assy lots

'amplin& 'i+e
s*bstrates per ma& ?strips per reel

'*bstrate #ar%

1./0 .1/. 1./0 .19> 1./0 .1 / 1./0 .1 4

s*bstrates per ma& s*bstrates per ma& ?* per strip3 2strips ?* per strip3 2strips

'*bstrate Pre0 ba%e Film Attach

All assy lots 'hiftly3 repair3 con6ersion3 chan&e cons*mables87# 'hiftly3 repair3 con6ersion

7ie Attach

7ie Press

1./0 .1 : 1./0 .11>

'hiftly3 repair3 con6ersion3 chan&e cons*mables87# All assy lots

?* per strip3 2strips :2ires per *nit3 2*nits /.=3 all odd strips

-ire $ond

,1,

14 12/13/13

1./0 1is#ech .1?? Intel CONFIDENTIAL.

Covered by CNDA#33454

All assy lots

#O" Process Controls ' %old ) %ark

'pec(
Pre0#old $a%e Pre0#old Plasma !lean #old 1./0 .2/1 1./0 .1?> 1./0 .1 2

Paramete Fre)*ency r
1is#ech 1is#ech 1is#ech -ires2ay Temperat*r e Transfer Time All assy lots All assy lots All assy lots 'hiftly3 repair3 con6ersion3 cleanin&

'amplin& 'i+e
strips per ma& strips per ma& 1..= ?2ires per *nit3 1*nit per panel3 :panels per strip 1:rd&s per chase3 all chases 1 rd& per chase3 all chases

Post #old !*re

1./0 .1?9 1./0 .1//

1is#ech

'hiftly3 repair3 con6ersion3 cleanin& All assy lots 'hiftly3 repair3 con6ersion All assy lots

strips per ma&

Laser #ar%

1is#ech #ar% 7epth 1is#ech

strips per ma& :rd&s3 *nits strips per ma&

,n% #ar%

1./0 .1.9

15 12/13/13

Intel CONFIDENTIAL. Covered by CNDA#33454

#O" Process Controls + *A,( ) Sing lation

'pec(
$all Attach 1./0 .1/28 1./0 .242 1./0 .1/

Paramete Fre)*ency r
1is#ech All assy lots

'amplin& 'i+e
strips per ma&

@eflo2

1is#ech TAL Pea% Temp Time $et2een

All assy lots 'hiftly3 repair3 con6ersion

strips per ma& 1rd&

7efl*A 'in&*lation

1./0 .1/? 1./0 .11?8 1./0 .19.

1is#ech 1is#ech '1 '2 OP7 B OP7 C

All assy lots All assy lots 'hiftly3 repair3 con6ersion3 blade chan&e

strips per ma& 1..= bottom3 top p%& to P1, 2rd&s per *nit3 9*nits3 random samplin&

12 12/13/13

Intel CONFIDENTIAL. Covered by CNDA#33454

#O" Process Controls ' Fold (!or bottom pkg 'pec( Parameter Fre)*enc 'amplin& 'i+e only)
y
Pre0Fold $a%e Pre0Fold Plasma !lean Fold 1./0.1> 1./0.1>1 1./0..4? 1is#ech 1is#ech Adh -ei&ht Di& Temp Eeater Temp Pea% Temp Post Fold !*re P1, 1./0.1>1 1./0 .1118 2.0 .. 1is#ech 1is#ech All assy lots All assy lots 'hiftly3 repair3 con6ersion3 syrin&e chan&e All assy lots All assy lots 1tray per lot 1tray per lot 2?rd&s 9rd&s 2rd&s :rd&s 1tray per lot 1..=

1= 12/13/13

Intel CONFIDENTIAL. Covered by CNDA#33454

T-FPO Process Controls

'pec(
$*rn0in Post $*rn0in ?.0.2.1 Lo&ic8'tac% 1./0..4: Flash !lass >..012:

Parameter
Elec1is#ech Elec1is#ech !one P*ff Press*re ,np*t 7rop Eei&ht 'ort 7rop Eei&ht

Fre)*ency
2.= of lots All lots -ee%ly

'amplin& 'i+e
1..= 2 trays per lot < middle and last tray 1rd& for e)pt monitors

'tac%

>..0..4>

'tac% Eei&ht Pea% Temp TAL

'hiftly3 repair3 con6ersion3 chan&e cons*mables All lots All lots 'hiftly3 repair3 con6ersion3 chan&e cons*mables All lots

/*nits3 random :rd&s :rd&s 1..= 1..= :rd&s3 *nits

'1, P'A7T Laser #ar%

2.0.. >..0 1 / >..0224?

1is#ech Elec1is#ech #ar% 7epth

$a%e

$l*# >..0 2?.1 !rit19 >..0 22>4

1is#ech

1tray

1? 12/13/13

Intel CONFIDENTIAL. Covered by CNDA#33454

T-FPO Process Controls

'pec(
E5A

Paramete Fre)*enc r y
1is#ech Electrical 5*ality All lots

'amplin& 'i+e
1.= or 1tray per lot

$all ,nspection

,!O' >..0 ..91 @1', >..0 22.1

1is#ech $all 7imensions Pac%a&e 7imensions 1is#ech 1is#ech Pac%in& 5*ality Peel $ac% Force

All lots

1..=

#15A Pac%

>..0..9/ >..022. Tn@ >..022.> Tray >..022>1 $n' >..02294 'traPac%

All lots All lots

1..= 1..= :09inches per reel

1@ 12/13/13

Intel CONFIDENTIAL. Covered by CNDA#33454

*ackp

FSCSP Con!ig ration (.-section)

/old A, w#re Fle. Ta)e 6older ball" Fold Ad& F#l$ Ad& 6older ball"

D#e 2 ;.4A/< D#e 1 ;Fla"&<

Lo+#%

21 12/13/13

Intel CONFIDENTIAL. Covered by CNDA#33454