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Poster For Computation of Charge Collection Probability For Any Collecting Junction Shape
Poster For Computation of Charge Collection Probability For Any Collecting Junction Shape
A*STAR
Singapore 117528
e-mail: kurniawano@ihpc.a-star.edu.sg
2 School
of Electrical and Electronic Engineering
Introduction Nanyang Technological University The U-shaped Junction Well
The electron-beam-induced current (EBIC) technique of the scanning Singapore 639798
The U-shaped junction well is a junction shape that is commonly adopted
electron microscope (SEM) has been widely used e-mail:forvo@pmail.ntu.edu.sg,
semiconductor in tanc0184@ntu.edu.sg
bipolar technology as shown in Fig. 2.
devices and materials characterizations. The EBIC techniques relies on
The boundary condition for U-shaped junction well
the carriers generation, diffusion and collection as illustrated in Fig. 1.
The reciprocity theorem [1] gives the spatial relationship of the charge analytical expression for L=1µ m.
collection probability. In x-z plane, the charge collection probability at Table I statistically summarizes the absolute difference between the
location (x’, z’) obeys charge collection probability computed using finite difference method and
analytical expression.
∂ 2 Q(x' , z' ) ∂ 2 Q(x' , z' )
2
+ 2
− λ 2 Q(x' , z' ) = 0
∂x ∂ z
where λ is the reciprocal of diffusion length L.
In finite difference method, the independent continuous variable is
L= L= L=
replaced by discrete variable. µ m
10.004118 µ m
30.004076 10 µ m
Mean 0.004076
The second derivative can be approximated using centered difference Standard 0.004339 0.004418 0.004426
approximation [2] deviation
Maximum 0.024668 0.025058 0.0251
Minimum 8.26 x10-7 4.23x10---6 7.7x10-6
where xs is the node spacing.
f(x + x s ) − 2f (x) + f(x − x s )
''
f (x) ≈is obtained when
A system of equation 2 those equations is applied to
xs Fig 4 Relative difference in computed Table I Statistic summary for
each node point and solving this system of equation results the charge charge collection probability with absolute difference in computed
collection probability. respect of analytical expression, L = charge collection probability with
1µ m. respect of analytically expression
References
Verification [1] C. Donolato, "A reciprocity theorem for charge collection," Applied
The charge collection probability distribution within the junction well of a Physics Letters, vol. 46, pp. 270-2, 1985.
U-shaped junction well with 5 µ m for both its width and height is [2] M. T. Heath, Scientific Computing : an introductory survey 2nd ed.
computed using the proposed computational method with the use of Boston : McGraw-Hill 2002.
Matlab. The results were compared with the charge collection probability [3] O. Kurniawan and V. K. S. Ong, "Charge collection from within a
distribution computed using analytical expression derived in [3] where the collecting junction well," IEEE Transactions on Electron Devices, vol.
infinite summation is truncated at 600 terms. 55, pp. 1220-1228, 2008.
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