MEMS

-Micro Electro Mechanical Systems

- A way to miniaturize our life style

BYK.ANEESHA RANI
K.SREE NAVYA
Y.ANUSHA

2ND YEAR ECE

DR.L.B.COLLEGE OF ENGINEERING (FOR WOMEN)

What is MEMS?
Mems is a technology of very small devices. It is a combination of
mechanical functions and electrical functions on the same chip
using micro fabrication technology.

MEMS are made up of components between 1 to 100 micrometers

in size
MEMS devices generally range in size from 20 micrometers to a
millimeter

Fabrication of mems

Deposition
Physical Chemical

Patterning
Lithography
Photolithography
Electron beam lithography
Ion beam lithography
Ion track technology
X-ray lithography.

Etching
Dry

Wet

 Deposition
Physical deposition :
Physical deposition consists of a process in which a material is removed from a
target, and deposited on a surface
Chemical deposition :
Chemical deposition techniques include chemical vapor deposition, in which a
stream of source gas reacts on the substrate to grow the material desired.

Patterning

Patterning of mems is the transfer of a pattern into a material.

Lithography is a widely used process in patterning of mems .
Examples of lithography are Photolithography, Electron beam lithography, Ion
beam lithography, Ion track technology, X-ray lithography.

Etching
Wet Etching :
Wet chemical etching
consists in selective removal
of material by dipping a
substrate into a solution
that dissolves it.
The chemical nature of this
etching process provides a
good selectivity

Dry Etching :
Dry etching can be done in
three ways and they are
a) Reactive ion etching (RIE)
b) Sputter etching
c) Vapor phase etching.

Applications of mems

 In medicine

A MEMS is a device that can be

implanted in the human body.
MEMS surgical tools provide the
flexibility and accuracy to perform
surgery.

Biomems

Bio-mems are used to refer to the science

and technology of operating at the micro
scale for biological and biomedical
applications.

 In automotives :
Heavy use of mems is found in air
bag systems, vehicle security system,
inertial brake lights, rollover
detection, automatic door locks etc.

As gyroscope:
Inexpensive vibrating structure
gyroscopes manufactured with
mems technology have become widely
available. These are
packaged similarly to other integrated
circuits and may provide either
analog or digital outputs.

 In microphones:
The mems microphone also called as
microphone Chip is widely used in
the present day communication
world.

In military :
Micro-electro mechanical system (MEMS)
technology help projectiles to reach their
targets accurately

 In accelerometers:

MEMS accelerometers are widely used in cars

for airbag deployment and in consumer
electronics applications such as smart phones,
gaming devices for sensing motion

In sensors:

A sensor is a device which receives and

responds to a signal when touched.A micro
sensor reaches a significantly higher speed
and sensitivity compared with
microscopic approaches.

Apart from these applications mems are also used in many

fields in the present world

They are used to detect earth quakes, in gas shut off, in

shock and tilt sensing

Inkjet printers and micro scanners also involve the use of

mems.
Mems is used in Optical switching technology in which,
switching technology and alignment for data
communications is done.

Advantages and disadvantages

Minimize energy and
materials.
Improved
reproducibility.
Improved accuracy and
reliability.
Increased selectivity
and sensitivity.

Farm establishment
requires huge
investments.
Micro-components are
costly compared to
macro components.
Design includes very
much complex
procedures

Conclusion
This enabling
technology promises to
create entirely new
categories of products.
Mems will be the
indispensible factor in
advancing technology
As with all emerging
technologies had been
predicted to
revolutionize
technology and our lives

Queries???