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Coventor Tutorial
Coventor Tutorial
Kyoto University
Kyoto University
Coventor Tutorial
Bi-Stable Mechanical Beam Simulation
-Material definition
-Fabrication (Process flow design)
-Layout (Structure design)
-Device fabrication (Meshing and Naming Entities)
-Analyzer setting (Boundary conditions)
-Simulation (Finite State Analysis)
-Viewing result
Hong Kong University of Science and Technology
Kyoto University
Kyoto University
Kyoto University
Coventor-Process : Si Formation
Kyoto University
Coventor-Process : Si Patterning
Kyoto University
Kyoto University
Kyoto University
Coventor Tutorial
Bi-Stable Mechanical Beam Simulation
-Material definition
-Fabrication (Process flow design)
-Layout (Structure design)
-Device fabrication (Meshing and Naming Entities)
-Analyzer setting (Boundary conditions)
-Simulation (Finite State Analysis)
-Viewing result
Hong Kong University of Science and Technology
Kyoto University
Kyoto University
The layer names are from the predefined Layer Names in the last
Process Editor!!
Kyoto University
Other useful
functions
Kyoto University
Otherwise, solid
model cant be
built!!
ERROR
For detailed information on editing layout, please refer to the
Section 2.5 & 3 of the manual Designer ! ! !
Kyoto University
Kyoto University
Kyoto University
Kyoto University
Kyoto University
Coventor Tutorial
Bi-Stable Mechanical Beam Simulation
-Material definition
-Fabrication (Process flow design)
-Layout (Structure design)
-Device fabrication (Meshing and Naming Entities)
-Analyzer setting (Boundary conditions)
-Simulation (Finite State Analysis)
-Viewing result
Hong Kong University of Science and Technology
Kyoto University
Since only
SILICON layer is
simulated, other
can be hided.
Kyoto University
Coventor Partition
Partition the Si
into several parts.
(Partition the beam
(moved parts)
from the anchor
(fixed parts) .
1. Choose 3 points to
generate a plane
2. Choose the plane
and the Silicon
bulk (needed for
partition)
3. Partition under
Solid Model
For detailed information on solid model, please refer to the
Section 4.5.1 of the manual Designer ! ! !
Hong Kong University of Science and Technology
Kyoto University
After partition,
the plane can be
hided.
After several
times of partition,
the beams will be
completely
separated from
the anchor.
Kyoto University
Kyoto University
Kyoto University
Kyoto University
Kyoto University
Kyoto University
Name
electrodes on
the top faces!
Potential
will be
applied on
these faces.
For detailed information on Mesh model, please refer to the
Section 4.6 of the manual Designer ! ! !
Hong Kong University of Science and Technology
Kyoto University
Name anchors on
the bottom faces!
Fixall and
Temperature
will be applied
on these faces.
Kyoto University
Kyoto University
Coventor Tutorial
Bi-Stable Mechanical Beam Simulation
-Material definition
-Fabrication (Process flow design)
-Layout (Structure design)
-Device fabrication (Meshing and Naming Entities)
-Analyzer setting (Boundary conditions)
-Simulation (Finite State Analysis)
-Viewing result
Hong Kong University of Science and Technology
Kyoto University
For detailed information on editing layout, please refer to the Section 3.5
of
the manual analyzer_standard ! ! !
Hong Kong University of Science and Technology
Kyoto University
Kyoto University
Kyoto University
Kyoto University
Kyoto University
Kyoto University
4. Set
the
value
2. Start to
set Variable
5. Run here for simulating a series of values
Hong Kong University of Science and Technology
Kyoto University
Otherwise, they
actuator will move
across the amplifier, or
the amplifier will move
across the beam rather
than push it.
Kyoto University
Coventor Tutorial
Bi-Stable Mechanical Beam Simulation
-Material definition
-Fabrication (Process flow design)
-Layout (Structure design)
-Device fabrication (Meshing and Naming Entities)
-Analyzer setting (Boundary conditions)
-Simulation (Finite State Analysis)
-Viewing result
Hong Kong University of Science and Technology
Kyoto University
Coventor Simulation
Real-time
Simulation
Progress/health
Monitoring
Hong Kong University of Science and Technology
Kyoto University
Kyoto University
Kyoto University
Kyoto University
Kyoto University