Overview of Vacuum Systems

Tejas Deshpande
24 July, 2014

Outline
Introduction
Pumps
Positive displacement pumps
Momentum transfer pumps
Entrapment pumps
Pressure gauges
Vacuum seals
Manipulation and motion under vacuum

Introduction

Introduction: definitions
Kinetic Theory of Gases
Ideal gas equation
Velocity of molecules hitting chamber walls

Introduction: definitions
Pumping
Rate of mass flow

Mass conductance

http://fisica.ufpr.br/sharipov/tubefm.html

Introduction: definitions
Pumping
Pump capacity & effective pumping speed

Rate of evacuation

Example: Pfeiffer Hena-25 pump +

cylindrical chamber

Finite C with a hose

Introduction: definitions
Pumping
Conductance of KF 40 hose (L = 10", D = 2.165")
[1]

[1] http://www.vacuumlab.com/Articles/Knowing%20Eff%20Pump%20Speed.pdf

Positive displacement pumps

Rotary vane pumps
Principle of operation

Positive displacement pumps

Scroll pumps
Principle of operation

Positive displacement pumps

Diaphragm pumps
Principle of operation

Positive displacement pumps

Roots blower
Principle of operation

Momentum transfer pumps

Diffusion pumps
Air diffuses to vapor stream
Baffles condense vapor
Oil backstreaming problem

Momentum transfer pumps

Turbomolecular pumps
Principle of a molecular drag pump
Mechanically similar to rotary pump
Good compression ratio
Poor pumping speed
Turbo pump

Momentum transfer pumps

Turbomolecular pumps
Principle of operation

Entrapment pumps
Ion pumps
Penning cell
Magnetic field acts as electron trap cyclotron orbits
Ions deposit on Cathode

Entrapment pumps
Titanium sublimation pumps
Titanium as evaporatable getter material
Chemical sorption
40-50 Ampere current evaporates Ti

Pressure gauges
Liquid Manometers
Simplest U-tube manometer
Atmospheric pressure = 1 bar

The Diaphragm Manometer

Capacitive sensor
AC vs. DC
DC capacitance bridge
AC resonant circuit tuned to
diaphragm vibration

Pressure gauges
Thermal Conductivity Gauges
Convection of heat through the gas

Other heat losses

Radiation ~ T4
Solid conduction

Operating conditions
Free molecular flow
> 10-3 torr

Pressure gauges
Ion Gauge
Measurement of ion current

Gauge sensitivity

Bayard-Alpert gauge

Collector potential: -10 V

Grid potential: 180 V
Cathode filament: 30 V
Screen: 0 (ground)

Vacuum Seals
O-ring seal
Elastomers, Viton-A, Polyimide
Quick and reusable
Limited baking range (< 250 C)

ConFlat flange seal

Leak-tight (< 10-12 Pa m3s-1)
Metal gaskets (typically copper)
Bakable to 450 C
Not reusable

Manipulation and motion under vacuum

Metal bellows
Mechanical feedthroughs
Bakable to 450 C
Limited linear/angular stroke

Continuous rotation
Speeds up to 2000 RPM
High torque bellows
Low torque magnets

Manipulation and motion under vacuum

Gate Valve
Large bore
Sample transfer

Right-angled valve
Small bore
Air evacuation

Manipulation and motion under vacuum

Transfer arm
Significantly greater stroke than bellow-sealed manipulator
Magnetic power transmission

Summary
Introduction
Pumps
Positive displacement pumps
Momentum transfer pumps
Entrapment pumps
Pressure gauges
Vacuum seals
Manipulation and motion under vacuum