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Final Presentation
Final Presentation
Lindsay Hunting
Phyllis Xu
Joy Perkinson
Presentation Outline
Motivation of project
Project goals
Results
Cost analysis
What is a Metamaterial?
A periodic material that derives its
properties from its structure rather
than its components.
*Taken From 3.042 handout & Physics Worlds 2005 Sound Ideas
Project Motivation
Project Goals
Design a process using lithography to
fabricate a 3D structure
Create macroscale models of 2D
structure, phase mask, and 3D
structure
Create a 3D metamaterial and image
using SEM
Process Design
Interference
lithography
Phase mask
2-D
photoresist
pattern
Titania structure
Sol-gel infiltration
3-D pattern
2D Structure Fabrication
Coat
plain Si
wafer
Exposure
UV exposure for
xx seconds
Develop
flip 90 and
expose again
submerge in PM
acetate to dissolve
unexposed
photoresist (20
min
submerge in
isopropanol to
wash away all
remnantsfinal
structure
Step 2
Step 3
3D Structure Fabrication
Coat
plain glass
slide
Exposure
Place phase
mask on top of
slide
Develop
Expose for xx
seconds and
remove phase mask
submerge in PM
acetate to dissolve
unexposed
photoresist (5-10 min)
submerge in
isopropanol to
wash away all
remnantsfinal
structure
Process Tuning
Prototype Functionality
Problems for 2D & 3D patterns
1. Overexposure
2. Unwashed monomer
3. Adhesion problems
4. Inconsistent results
Design Functionality
2-D Patterns
5s
Design Functionality
Phase mask
Design Functionality
3-D Patterns
3s SU-8 2005Top
Thickness ~ 5um
2-D Pattern
CAD Model
Actual Sample
Phase Mask
3-D Pattern
Cost Analysis
Fixed cost:
Spin coater, lasers, SEM
General lab equipment, facilities
Variable cost:
SU-8 20xx and HMDS ($300/1L $30/500mL )
Trifluoroacetic acid and TiO2 ($60/100mL, $117/50mL)
Si wafers ($15/piece)
Glass wafers ($240/2500 slides)
Total costs/sample: $6/sample
Future Work
Optimize process
Adhesion promoters
TechWatch
2004:
Miniaturized antennas based on negative
permittivity materialsLucent Technologies
Metamaterial scanning lens antenna systems
and methodsThe Boeing Company
2003:
Metamaterials employing photonic crystalMIT
Methods of fabricating electromagnetic
metamaterialsThe Boeing Company
2002:
Resonant antennasLucent Technologies
Questions?
Design Functionality
Thick Film Photoresist
Calculation:
Sin (70) = 58 / t
Thickness (t) ~ 61 microns
Success!
Design Functionality
Problems in 2-D patterns
1. Un-washed monomer
2. Over exposure
15s SU-8 2015 Top
3. Non-uniform columns
Width of top ~ 1.81 um
Width of bottom ~ 1.00 um
Step 2
Step 3