Material Elektronik

Teknik Fisika
Institut Teknologi Bandung 2016

MATERIAL ELEKTRONIK

FE-SEM
FIELD EMISSION SCANNING ELECTRON
MICROSCOPY
Selasa, 15 November 2016
Ruang KaProdi TF Lt. 2

Kamaruddin

Material Elektronik
Teknik Fisika
Institut Teknologi Bandung 2016

Outline
Introduction
History
Prinsip
Fungsi dan Cara Kerja
Harga dan Penyedia Tempat
Review Paper Penggunaan FE-SEM

Introduction

FE-SEM
FEM

FIELD EMISSION

FEG-SEM
Nanoteknologi
telah
sangat
didorong
pengembangan
mikroskop elektron baru-baru ini, dengan tuntutan tidak hanya
untuk meningkatkan resolusi tetapi juga untuk informasi
lebih lanjut dari sampel

History
Basic Terminology :
Fowler-Nordheim (FN) Tunneling : Electron tunneling
through an exact or rounded triangular barrier
Deep Tunneling : Tunneling well below the top of the
energy barrier [which needs simpler tunneling theory].
Cold field electron emission (CFE) : A statistical emission
regime where (i) the electrons in the emitting region are
effectively in local thermodynamic equilibrium, and (ii) most
electrons escape by deep tunneling from states close to
the emitter's Fermi level.

Erwin Mueller (1936)

Winkler, in Leipzig, 1744-5

Prinsip

Schematic diagram of the near field emission scanning electron

microscope

Prinsip
Thermionic Emitters use electrical current to heat up a filament; the two most
common materials used for filaments are Tungsten (W) and Lanthanum hexaboride
(LaB6). When the heat is enough to overcome the work function of the filament
material, the electrons can escape from the material. Thermionic sources have
relative low brightness, evaporation of cathode material and thermal drift during
operation.
A Field Emission Source (FES); also called a cold cathode field emitter, does not
heat the filament. The emission is reached by placing the filament in a huge
electrical potential gradient. The FES is usually a wire of Tungsten (W) fashioned
into a sharp point. The significance of the small tip radius (~ 100 nm) is that an
electric field can be concentrated to an extreme level, becoming so big that the work
function of the material is lowered and electrons can leave the cathode.

Prinsip

Aplikasi & Cara

Kerja
Aplikasi
Thickness measurement of thin coatings and films
Correlation of surface appearance and surface morphology
Characterization of size, size distribution, shape and dispersion of additives,
particulates and fibers in composites and blends
Measurement of height and lateral dimensions of nanometer-sized objects
Characterization of cell size and size distribution in foam materials
Elemental analysis of micron-sized features
Fracture and failure analysis
Defect analysis
Cara Kerja

Harga &
Penyedia

Model &
Perkembangan

FEI & ZEOL

FE-SEM FEI INSPECT F50 dan

EDAX EDS Analyzer di Fakultas
Teknik UI

Review Paper

Phytoplankton (Diatom)
The images were acquired using a Carl Zeiss
ultra 55 Field-Emission Scanning Electron
Microscope operated at 5 kV with X-ray
spectroscopy (EDS).

Review Paper

A. FESEM images of untreated green

bentonite (GBUT) and 10 % limetreated soil (GBLT10 %) at 1-, 4-, and 8month (M)-curing periods
B. FESEM images of untreated white kaolin
(WKUT) and 5 % lime-treated soil
(WKLT5 %) at 1-, 4-, and 8-month (M)curing periods
JSM-6701F
JEOL field emission

A.

B.

scanning electron microscope

(FESEM)

Review Paper

FE-SEM (Hitachi S-4800)

Material Elektronik
Teknik Fisika
Institut Teknologi Bandung
2016

Terima
Kasih
Kamaruddin M.K. Material
Elektronik