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Role of Titanium Dioxide (Tio ) in Optics: Name-Ayyaz Imam Roll No. - 1703009 Branch - Metallurgical Engineering
Role of Titanium Dioxide (Tio ) in Optics: Name-Ayyaz Imam Roll No. - 1703009 Branch - Metallurgical Engineering
in Optics
Huygen’s Principle:
What a metasurface basically does?
Fabrication of the Titanium Dioxide Metasurface
Fig. (a) A glass substrate is first spin coated with electron beam lithography(EBL) resist
(b) The resist is exposed to EBL and is subsequently developed.
(c) The intial stage of Atomic Layer Deposition(ALD) of TiO₂ onto the patterned resist.
(d) At the end of ALD process, a blanket of TiO₂ is formed on top of the resist.
(e) We etch down the TiO₂ until the resist layer is reached.
(f) The resist is removed and stripped such that only the nanostructures remain and
the height of the nanostructures are defined by the height of spin coated resist.
Why Titanium Dioxide(TiO₂)?
Fig A. X-Ray diffraction of Atomic Layer Deposited TiO₂. There are no observable diffraction
peaks from any TiO₂ polymorphs. The peaks that appear in the scan result from the X- ray
diffraction stage. The X- ray diffraction with the sample is represented by red while
without the sample is represented by blue.
Fig. B. Atomic force microscope image of bare glass substrate with a root mean square
roughness of 0.698 nm.
Fig. A. Measured real and imaginary part of the refractive index as a function of
wavelength. Blue squares represent real part and red circles represent the imaginary part
of refractive index. For the amorphous titanium dioxide to have negligible absorption loss,
the imaginary part of the complex refractive index must be negligible.
Fig. B. Atomic force microscope image of a typical TiO₂ film deposited via Atomic layer
deposition process. The film is an atomically smooth surface with RMS roughness of 0.738
nm.
• Dielectric Metasurfaces were limited to transparency
windows at infrared wavelengths due to significant optical
absorption loss at visible wavelengths.