SAME GAME, DIFFERENT NAMES?

 MEMS in United States

 MST Microsystems Technology in

Europe

 Micromachines in Japan
MEMS, WHAT IS IT?

 A process technology used to create tiny

integrated devices or systems that combine
mechanical and electrical components

mechanical + electrical
FEEL OF SIZE
FEEL OF SIZE
MEMS, General Components?
 Interdisciplinary
 To make a MEMS device knowledge from different field
is necessary
 Design
 Engineering and manufacturing
 Integrated circuits fabrication technology
 Mechanical engineering
 Material science
 Electrical engineering
 Chemistry and chemical engineering
 Fluid engineering
 Optics
 Instrumentation and packaging
APPLICATIONS

 Variety of applications in different fields

 Automotive
 Electronics
 Medical
 Communications
 Defense
 But not only limited to these
AUTOMOTIVE Applications
 Internal navigation sensors
 Air conditioning compressor sensors
 Break force sensors and suspension
control accelerometers
 Fuel level and vapour pressure sensors
 Airbag sensors
 “Intelligent” tyres
AUTOMOTIVE Applications
Electronics Applications

 Disk drive head

 Inkjet printer heads
 Projection screen televisions
 Earthquake sensors
 Avionics pressure sensors
 Mass data storage systems
Medical APPLICATIONS
Muscle stimulators and drugs delivery systems
MEDICAL APPLICATIONS
Vision aid
MEDICAL APPLICATIONS
Implanted pressure sensors
MEDICAL APPLICATIONS
Nanorobot in action
COMMUNICATION
APPLICATIONS
 Fiber-optics network components
 RF Relays, switches and Filters
 Projection displays in portable
communications devices and
instrumentation
 Voltage controlled oscillators VCOs
 Tunable lasers
Defense Applications

 Munition guidance
 Surveillance
 Arming systems
 Embedded sensors
 Data Storage
 Aircraft control
High Potential In Market
How To Achieve Such
Miniaturization?
 Fabrication techniques that actually define
the technology
 IC batch Fabrication Techniques
 Bulk Micromachining
 Surface Micromachining
 High-Aspect-Ratio Micromachining
CONCLUSION

 One of the most promising technologies

for the 21st century
 Potential to revolutionalize both industrial
and consumer products
 Its techniques and Micro based devices
have the potential to affect of all of our
lives and the way we live
 REFERENCES
http://mems.eng.usf.edu
http://www.wikipedia.org
http://www.sandia.gov
http://www.isu.edu
http://www.mini.pw.edu.pl
http://www.lboro.ac.uk
http://www.egr.msu.edu
http://scme-nm.org
http://www.eecs.berkeley.edu
http://www.microstrain.com
http://nanohub.org
http://compliantmechanisms.byu.edu
http://www.ncbi.nlm.nih.gov/pubmed/17947154
https://www.google.co.uk/url?sa=i&rct=j&q=&esrc=s&source=images