Professional Documents
Culture Documents
Chemical Vapour Deposition: Vijitha I. JRF, Csir-Niist
Chemical Vapour Deposition: Vijitha I. JRF, Csir-Niist
DEPOSITION
Vijitha I.
JRF, CSIR-NIIST
Background
In this the substrate (wafer) and the walls of the reactor are heated, i.e. a
homogeneous temperature is maintained inside the reaction chamber.
Contamination
Cold-wall reactor:
This reactors uses heating systems that minimize the heating up of the reactor
walls while the wafer is being heated up. The temperature is not homogeneous
inside the reaction chamber.
Transport of
by-products by Desorption of
Transport of
forced by-products
by-products by
convection from the
diffusion.
away from the surface.
deposition
region.
8
Mechanism
Gas Phase
Reaction
Desorption of
Precursor
Desorption of
Volatile Surface
Transport to Reaction Products
Surface
LPCVD
CVD
10
Atmospheric pressure chemical vapour deposition (APCVD)
13
Laser chemical vapour deposition (LCVD)
14
Plasma-enhanced chemical vapour deposition (PECVD)
18
19