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Lithography: Dr. Rohan Gupta A.P, Ece
Lithography: Dr. Rohan Gupta A.P, Ece
• Attractive
• Better resolution
• Severely limited by time taken to write single
substrate
• Writing of gates in GaAs devices
• 6-8 slices/hr
• Speed of direct e-beam writing can be
improved
Electron beam projection printing