1

04/17/2021
MEMS GYROSCOPE
PRESENTED BY;
BAKHTIYAR HUSSAIN BHAT
AIDAL SHAFI MIR
DANISH NISAR
AAKASH MUSHTAQ
MUZAMIL AHMED
 2
introduction

 Gyroscope is a device used for measuring and maintaining the orientation of an object or
a system on which it is mounted .
 Mechanically,gyroscope is a spinning wheel or a disc mounted on an axle that is free to
rotate in any direction.

04/17/2021
 3
Conventional
gyroscope

 The device consists of a spinning wheel or a disc whose axle is free to take any orientation and this orientation
changes much less in response to an external torque .the disc or flywheel has a large mass and spin speed and hence
a large angular momentum which counteracts all external torque and creates an inertial reference that keeps the
orientation of the spin axis constant.

Spin axis

frame

gimbal rotor

04/17/2021
 4
disadvantages

 High cost
 Large size
 Can track motion about single axis .

04/17/2021
 5
Mems gyroscope

 Mems gyroscope is based on coriolis force which is induced in it due to the combination
of vibration of a proof mass and an orthogonal angular rate input.
 Corilios acceleration is an apparent acceleration that arises in a rotational frame and is
proportional to the rate of rotation.

a=2(V*ω)

04/17/2021
 6
Why mems?

 Small size
 Low cost
 Low power consumption as there is no rotating
disc which requires a motor.

04/17/2021
 7
Linear gyroscope dynamics

 The most basic implementation for a micromachined vibratory rate gyroscope is a single
proof mass and the substrate,making the mass free to oscillate in two orthogonal
directions,the drive and the sense directions.

04/17/2021
 8
Continued;

 The drive mode oscillator is comprised of the

proof mass,the suspension system that allows the
proof mass to oscillate in the drive direction ,the
drive mode actuation and the electrodes.

04/17/2021
 9
Continued;

 The sense mode accelerometer is formed by the proof mass , the suspension system that
allows the proof mass to move in the sense direction and the sense mode detection
electrodes .
 When the gyroscope is subjected to an angular rotation,a sinusoidal corilios force at the
frequency of drive mode oscillation is induced in the sense direction . The corlios force
excites the sense mode accelerometer, causing the proof mass to respond in the sense
direction . This sinusoidal corilios response is picked up by the detection electrodes.

04/17/2021
 10
continued.;

04/17/2021
 11
design

 A proof mass is suspended above a substrate using a suspension system of flexible beams
anchored to the substrate .
 One set of electrodes is needed to excite the drive mode oscillator and another set of
electrodes detects the sense mode response.

04/17/2021
 12
Working principle

 Ac driving voltage with same magnitude but 180 phase difference are applied to the
driving electrodes.
 The proof mass will vibrate along x direction which is driving mode .
 The frequency of driving voltage is chosen to match the resonant frequency of the central
mass structure to achieve large vibration amplitude.
 Central mass experiences an alternating corilios force along y direction . The central
movable mass will be activated along y direction , the sensing mode.
 The sensing differential pair will change due to sensing vibration. By measuring this
differential capacitance change the value of angular velocity can be known .

04/17/2021
Tuning fork gyroscope 13

04/17/2021
 14

Voltage source

detector

amplifier

04/17/2021
 15
Continued;

 In this tuning fork type of gyroscope, when the voltage supply is applied to the opposite
electrodes on the upper arms which are made of piezoelectric material ,they start vibrating
in opposite directions along the plane. Now when the fork is rotated , corilios force comes
into play due to which the lower two arms start vibrating in and out of the plane .the
magnitude of vibrations or the corilios acceleration produced is proportional to the rate of
rotation. Due to invertible piezoelectric principle, a voltage output is drawn which is first
amplified and then detected.

04/17/2021
 16
Mems gyro by drappers laboratories

04/17/2021
 17
Continued;

 In this gyro sensor there are two proof masses which are made to vibrate in opposite
directions. Now when the arrangement is rotated in the shown direction ,corilios force is
developed. This force tries to down the one mass and raise the other .Due to this there is
change of capacitance between the proof mass and the capacitor above or beneath it.The
change in capacitance between the two capacitors would give the sense of rotation

04/17/2021
 18
applications

 Smartphones;
 Precise motion sensing such as user acceleration, angular velocity and rotation rate.
 Gesture recognition
 Navigation
 Gaming companies use it in making gaming consoles

04/17/2021
 19
Automotive application

 Yaw rate sensor

 Roll rate sensor
 Helps in positioning to spacecraft
 Detects vibrations and movements thus robots can work more efficiently

04/17/2021
 20

 Thank you

04/17/2021