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Fabrication
Fabrication
Fabrication
Slide 1
CMOS Fabrication
CMOS transistors are fabricated on silicon wafer
Lithography process similar to printing press
On each step, different materials are deposited or
etched
Easiest to understand by viewing both top and
cross-section of wafer in a simplified manufacturing
process
n+ diffusion
p+ diffusion
n+ n+ p+ p+
polysilicon
n well
p substrate
metal1
p+ n+ n+ p+ p+ n+
n well
p substrate
GND VDD
– n-well
– Polysilicon
Polysilicon
– n+ diffusion
– p+ diffusion n+ Diffusion
– Contact p+ Diffusion
– Metal Contact
Metal
p substrate
SiO2
p substrate
Photoresist
SiO2
p substrate
Photoresist
SiO2
p substrate
Slide 10
Etch
Etch oxide with hydrofluoric acid (HF)
– Seeps through skin and eats bone; nasty stuff!!!
Only attacks oxide where resist has been exposed
Photoresist
SiO2
p substrate
SiO2
p substrate
n well
n well
p substrate
Polysilicon
Thin gate oxide
n well
p substrate
Polysilicon
Polysilicon
Thin gate oxide
n well
p substrate
n well
p substrate
n+ Diffusion
n well
p substrate
n+ n+ n+
n well
p substrate
n+ n+ n+
n well
p substrate
p+ Diffusion
p+ n+ n+ p+ p+ n+
n well
p substrate
Contact
n well
p substrate
Metal
Metal
Thick field oxide
p+ n+ n+ p+ p+ n+
n well
p substrate
d d d
nMOS g OFF
ON
s s s
d d d
pMOS g OFF
ON
s s s
A Y VDD
0
1
A Y
A Y
GND
CMOS VLSI Design Slide 25
CMOS Inverter
A Y VDD
0
1 0 OFF
A=1 Y=0
ON
A Y
GND
CMOS VLSI Design Slide 26
CMOS Inverter
A Y VDD
0 1
1 0 ON
A=0 Y=1
OFF
A Y
GND
CMOS VLSI Design Slide 27
CMOS NAND Gate
A B Y
0 0
0 1 Y
1 0 A
1 1
B
Y
A
B
C