Resistive Thermal Evaporation Technique

Electron Beam Evaporation Technique

DC / RF Sputtering technique
Ion Beam Sputtering Technique
• Homogeneous Nucleation: Substrate and film materials are same
• Heterogeneous Nucleation: Substrate and film materials are different

Two Nucleation theories:

1. Atomistic Model
2. Capillarity Model
Three modes of thin film growth