Selection of Piezoelectric Material for MEMS

Technology based Microphone by using MCDM

Methods

Paper ID: 418

PRESENTER NAME
Affiliation
 Contents
INTRODUCTION

-PIEZOELECTRIC MICROPHONE

-MCDM METHODS

PIEZOELECTRIC MATERIAL PROPERTIES

RESULT and CONCLUSION

 Introduction
- Piezoelectric Microphone
The market demand of MEMS technology based piezoelectric
microphone
Piezoelectric materials such as PZT, PVDF, AIN, ZnO, BaTiO3, KNN and
LiNBO3.

- MCDM Methods
The goal of MCDM methods is is to choose the best alternative
according to the defined criteria
Two MCDM methods such as TOPSIS and VIKOR
 Piezoelectric Material Properties

Resistivity (Ohm m)
Piezoelectric coefficient (pC/N)
Young’s modulus (GPa)
Relative permittivity (ϵ33/ϵ0)
Elastic Compliance(1/picoPa)
Loss actor (tanδ)
-To improve the Performance parameters of MEMS microphone
such as sensitivity, SNR ratio, output impedance and bandwidth.
 Result and Conclusion
- More weightage is given to properties such as piezoelectric coefficient
and resistivity to get high electromechanical coupling coefficient and
improved bandwidth respectively.

- TOPSIS and VIKOR Results: PZT got the first rank followed by PVDF, AIN,
ZnO, BaTiO3, KNN and LiNBO3.