Failure Mode and Effects Analysis

Infineon
Roll Out 2004

IFX QM-Tool

Dr. Preussger/wü
CQM MT Never stop thinking.
01/20/22
 Agenda
 Introduction
 Status of QM-Tool
 Team
 General Flow
 Options for assessment metrics
 Definition of assessment criteria
 Response Limits for setting measures
 Support Tools
 FMEA template

Dr. Preussger/wü
CQM MT
01/20/22
 FMEA - Objective

Analysis of potential failures and

their causes with the target to
prevent failures from the beginning

Dr. Preussger/wü
CQM MT
01/20/22
 FMEA - Approach

Experts from different areas are

needed to do the analysis.

Communication is essential for the

success.

FMEA is a team approach

Dr. Preussger/wü
CQM MT
01/20/22
 FMEA Team

 Creating an FMEA requires expertise and skills on different

fields of knowledge.
 The FMEA-Team shall be a cross functional team from the
fields of knowledge covering at least 80% of the object to be
assessed.
 Standard project and moderation techniques shall be
applied by the team.
 The optimum size of the core team is 4 to 5 members.
 Besides this core team a group of experts not participating
in the meetings but supporting for special questions shall be
available.

Dr. Preussger/wü
CQM MT
01/20/22
 Improving the Effectiveness

 FMEA is a time and resources consuming approach

 Modularity of an FMEA is a prerequisite for improved reuse
rate
 Modularity is supported by a consequent tree analysis
 An FMEA data base makes FMEA knowledge available for
other groups and improves the reuse rate

 Preparation Phase is essential for the effectiveness of the

FMEA

Dr. Preussger/wü
CQM MT
01/20/22
 Agenda
 Introduction
 Status of QM-Tool
 Team
 General Flow
 Options for assessment metrics
 Definition of assessment criteria
 Response Limits for setting measures
 Support Tools
 FMEA template

Dr. Preussger/wü
CQM MT
01/20/22
 Previous Status

 No generic IFX process

 FMEA not adapted to needs of semiconductor business
 Reproducibility low
 Different assessment schemes
 Different reaction limits
 Different templates

Dr. Preussger/wü
CQM MT
01/20/22
 Current Status

 Generic IFX process released and available

 FMEA adapted to needs of semiconductor business
 FMEA adapted to requirements of automotive standards
 FMEA aligned with update of JEDEC document JEP131
 Common assessment schemes
 Common reaction limits
 Common template

Dr. Preussger/wü
CQM MT
01/20/22
 Outlook

 Next revision is currently running

 Focus on BG-specific criteria
 Focus on effectiveness and efficiency
 Improvement of assessment metrics
 IFX-wide FMEA software solution

Dr. Preussger/wü
CQM MT
01/20/22
 Agenda
 Introduction
 Status of QM-Tool
 Team
 General Flow
 Options for assessment metrics
 Definition of assessment criteria
 Response Limits for setting measures
 Support Tools
 FMEA template

Dr. Preussger/wü
CQM MT
01/20/22
 Authors

FMEA Vers1.0 improvement driven by a team within

ZD@SD

Team Members:

Dr. Preussger - QM
Mr. Stegerer - BE RGB
Mr. Auburger - AIT
Ms Dinkel - FE MCHP
Ms Deckers - Development DS
Mr. Ulrich - BE RGB
Mr. Gabler - BE RGB
Dr. Preussger/wü
Mr. Prodinger - FE VI
CQM MT
01/20/22
Ms Kalmes - WS OP QM
 Authors of Revision 2

FMEA further improved by

Team Members:

Dr. Preussger - CQM

Mr. Radl - MP QM
Ms Numberger - CL BES QM
Mr. Zoeller - CQM

based on change requests of BGs and users

Dr. Preussger/wü
CQM MT
01/20/22
 Agenda
 Introduction
 Status of QM-Tool
 Team
 General Flow
 Options for assessment metrics
 Definition of assessment criteria
 Response Limits for setting measures
 Support Tools
 FMEA template

Dr. Preussger/wü
CQM MT
01/20/22
 Preparation Phase
Design or Process FMEA

Select Type

Select Metric

Tree Analysis

Priorization

Dr. Preussger/wü
Planning
CQM MT
01/20/22
 Basic FMEA types: Process FMEA

Process steps of a production

Elements to be assessed
process or design flow

Deviations in the process

Potential failure modes
(cause)

Deviations from process

Potential effects of the failure
requirements (effect)
Dr. Preussger/wü
CQM MT
01/20/22
 Basic FMEA types: Design FMEA

Elements of a product
Elements to be assessed
(function / module)

Deviations caused by the

Potential failure modes production and/or design
process (cause)

Deviations from product

Potential effects of the failure
specification (effect)
Dr. Preussger/wü
CQM MT
01/20/22
 Preparation Phase
Design or Process FMEA

Select Type
RPN or OxD-metric
Review and select metric
Select Metric For S, O and D

Tree Analysis

Priorization

Dr. Preussger/wü
Planning
CQM MT
01/20/22
 Trigger Metric for measures

 To be decided by the responsible BG-QM for products and

by the fab QM for technologies
 Options:
– RPN-Metric  RPNcrit (RPN = S x O x D)
– OxD-Metric  Pcrit (P = O x D)
– OxD-Metric is the preferred approach. S is used for priorization,
OxD is used for pareto. This procedure is consistent with
Standards like JEP131 (updated version)
– RPN-Metric is used according to standards. In case of binding
agreements with the customer this metric could be used.

Dr. Preussger/wü
CQM MT
01/20/22
 Preparation Phase
Design or Process FMEA

Select Type RPN or O x D-metric

Review and select metric
for S, O and D
Select Metric

Define subsystems of the object with

separate requirements
Tree Analysis
Check reuse and modularity

Priorization

Dr. Preussger/wü
Planning
CQM MT
01/20/22
 PFMEA DFMEA

FMEA-System
System FMEA

Software FMEA IC- FMEA nn subelement

process Design flow Design (Product)

FMEA FMEA FMEA

Unit process- Unit process Design tool

A FMEA nn FMEA FMEA

Dr. Preussger/wü
CQM MT
01/20/22
Equipmt FMEA
 FMEA-System Tree Analysis IC

part 1
Package
Design FMEA part 2

Chip

Block 1 Block 2 Block 3 Block 4

Sub circuit 3.1 Sub circuit 3.2

Dr. Preussger/wü
CQM MT
01/20/22
 Preparation Phase
Design or Process FMEA

RPN or O x D-metric
Select Type
Review and select metric
for S, O and D
Select Metric
Define subsystems of the object with
separate requirements
Tree Analysis Check reuse and modularity
Set priority according to
Priorization criticality
of each module
Start with most critical module
Dr. Preussger/wü
Planning
CQM MT
01/20/22
 Criteria for prioritization of modules could be:
Novelty
Rough risk status
Actual maturity
Complexity
Schedule of related work package

Example for a new system (novelty has been skipped because

all elements have identical status)
Risks Maturity Complexity Schedule
unknown(1) low (1) complex(1) critical(1)
high (1) medium (2) medium(2) neutral(2)
medium (2) high (3) simple(3) uncritical(3)
low (3)

Dr. Preussger/wü
CQM MT FMEA of module with lowest sum has to be done first.
01/20/22
 High risk

Tree Analysis IC: Criticality Medium risk

Low risk
Design FMEA

Block 1 Block 2 Block 3 Block 4

Order: Sub circuit 3.1 Sub circuit 3.2

4
3.1
3.2
Dr. Preussger/wü
CQM MT 2
01/20/22
1
 Preparation Phase
Design or Process FMEA

RPN or O x D-metric
Select Type
Review and select metric
for S, O and D
Select Metric
Define subsystems of the object with
separate requirements
Tree Analysis Check reuse and modularity
Set priority according to
Priorization criticality
of each module
start with most critical module
Dr. Preussger/wü
Planning Realistic project planning
CQM MT
01/20/22
 Assessment Phase (1) Define or check the assessment criteria
at the beginning
FMEA Template

Assessment FMEA FMEA Assessment

Criteria Assessment Subsystem B
Subsystem A

Requirements
Subsystem
Start FMEA process with
FMEA (Subsystem)
subsystem A, which has the
if already existing Subsystem Check
highest potential risk

FMEA
(Subsystem) yes
exists

no no
Check FMEA (Sub- FMEA Assessment
system) for changes next subsystem
yes

Dr. Preussger/wü
CQM MT
01/20/22
 Assessment Phase (1)

FMEA Template
Check if there is already an FMEA
Assessment
Criteria
FMEA
Assessment
for the subsystem that could
FMEA be
Assessment
Subsystem B
Subsystem A reused or slightly modified
Requirements
Subsystem

FMEA (Subsystem)
Subsystem Check
If there is an FMEA module, that
if already existing
could be reused, continue with
subsystem B
FMEA
(Subsystem) yes
exists

no no
Check FMEA (Sub- FMEA Assessment
system) for changes next subsystem
yes

Dr. Preussger/wü
CQM MT
01/20/22
 Assessment Phase (2)

Consequence/ Risks / Potential

Effects of FMEA’s fails with resp. to
of other Subsystems requirements

Potential Effect / Severity (S)

Before creating the risks / potential Consequence

fail list check effects of related

FMEAs, whether they could be
Potential Occurrence
risks also. Causes (O)

Root cause no
understood and
possible to define
measure
Go down one tree
level
yes

Dr. Preussger/wü
CQM MT
01/20/22
 Cause - Failure - Effect

Upper level Effect Failure Cause

Effect
Lower level Cause Failure

The effect of a failure at a lower level is the cause of a failure

on an upper level !
Dr. Preussger/wü
CQM MT
01/20/22
 Cause - Failure - Effect - Relation: Example
Effect
Failure Product
DFMEA
Effect = Cause
Failure Process
FMEA
Cause = Effect
Unit
Failure Process
Effect = Cause FMEA

Failure Equipment
FMEA
Cause
Dr. Preussger/wü
CQM MT
01/20/22
 Assessment Phase (2)

Consequence/ Risks / Potential

Effects of FMEA’s fails with resp. to
of other Subsystems requirements

For each potential fail Potential Effect / Severity (S)

Consequence
describe the potential
causes (use a separate
Potential Occurrence
line for each cause) Causes (O)

If the root cause can’t

be described or O
can’t be given on the Root cause no
understood and
existing FMEA level, possible to define
measure

go down one tree Go down one tree

level
yes
level
Dr. Preussger/wü
CQM MT
01/20/22
 Occurrence (O)

 The occurrence is measured as the probability PO that this

failure mode occurs at a process step or product module
under discussion.
 The lowest possible value for O is the inverse of the
sample size inspected (e.g. if 0/10 fails have been
measured, 1/11 is the worst case assumption). Reference
data from similar objects can be used.
 Use customer perspective:
perspective O is always related to the total
production volume (e.g. faulty wafers per wafers after the
process step under discussion)
 If available statistical data should be used. In all other cases
a subjective assessment can be made

Dr. Preussger/wü
CQM MT
01/20/22
 Occurence ranking based on statistical data

Ranking Meaning O-Rate

1 unlikely <10 ppm
2 Only isolated fails (identical cases) 100 ppm
3 Only isolated fails in similar cases 500 ppm
4 Occasional fails 0.1 %
5 Occasional fails 0.2 %
6 Occasional fails 0.5 %
7 Repeated fails 1%
8 Repeated fails 2%
9 Fail almost inevitable 5%
10 Fail almost inevitable >10 %

Dr. Preussger/wü
CQM MT
01/20/22
 Comparison with other metrics

FMEA Rating

1,00E+00

1,00E-01

1,00E-02

1,00E-03
Rate 1st
Rate

Rate SAE
1,00E-04

1,00E-05

1,00E-06

1,00E-07
0 2 4 6 8 10 12
Rank
Dr. Preussger/wü
CQM MT
01/20/22
 Occurence ranking subjective

Ranking Meaning Probability

1 Failure is unlikely. Remote

2 Only isolated fails associated with almost identical cases Very low

3 Only isolated failures associated with similar cases Low

4-6 Generally associated with processes similar to previous Moderate

processes that have experienced occasional failures, but
not in major proportions

7-8 Generally associated with processes similar to previous High

processes that have often failed (Repeated fails).

9-10 Failure is almost inevitable Very high

Dr. Preussger/wü
CQM MT
01/20/22
 Assessment Phase (2)

Consequence/ Risks / Potential

Effects of FMEA’s fails with resp. to
of other Subsystems requirements

For each potential fail Potential Effect / Severity (S)

Consequence
describe the potential
effects (use a separate
Potential Occurrence
line for each effect) Causes (O)

Root cause no
understood and
possible to define
measure
Go down one tree
level
yes

Dr. Preussger/wü
CQM MT
01/20/22
 Severity (S)

 Severity is an assessment of the seriousness of the effect of

the potential failure mode to the customer (customer
perspective ! ).
 Focus on consequences for the external customer of IFX
 The consequences include all type of problems at the
customers production line or in the field, economical or legal.
 Topics from IFX production point of view could be added.

Dr. Preussger/wü
CQM MT
01/20/22
 Severity Metric

Dr. Preussger/wü
CQM MT
01/20/22
 Assessment Phase (3)

Current Controls Detectability

(D)

Update
Occurrence
(O)
Risk Calculation

For each potential

fail-effects-
List the controls for combination describe
prevention (P) or the detectability based
detection (D) on the most effective
Dr. Preussger/wü control.
CQM MT
01/20/22
 Detectability (D)

 The detectability is measured by the probability of detecting

the failure before the product is send to the customer.
 It can be calculated as the inverse value, the escape rate,
the probability that the defective part leaves IFX.

Dr. Preussger/wü
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 Risk calculation: Escape Rate

Detectability could be described by the probability that a fail

escapes the control measure:

ER = 1 - D

ER = ER PCM x ER Wafer-Test x ER Product-Test1 x... (assembled IC’s)

ER = ER PCM x ER Wafer-Test (for Bare Die deliveries with wafer test)

Dr. Preussger/wü
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 Detection ranking based on statistical data

Ranking Meaning Detection Slip-Rate

1 Almost certainly <10 ppm
2 Almost certainly 100 ppm
3 Good chance 500 ppm
4 Good chance 0.1 %
5 Likely 0.2 %
6 Likely 0.5 %
7 May be 1%
8 May be 2%
9 Probably not, but may be by customer 5%
10 no >10 %

Dr. Preussger/wü
CQM MT
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 Detection ranges for different methods PFMEA

Detection Method D min D max

Online at process 1 1
Control of inline data immediately after process 1 2
Special analysis after process 2 3
Control of inline data later in process 3 4
Special analysis later in process 3 5
Control by operator later in process (subjective) 5 6
PCM for all wafers at 5 sites 5 5
(100 % measurement  (D-1))
Functional or prefuse test at the product 5 5
Functional test after burn in 6 7
WLR monitoring 8 9
Product reliability monitoring 8 10

Dr. Preussger/wü
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01/20/22
 Detection ranking for different methods DFMEA (ICs)

Ranking Detection internally

1-2 Detection by simulation

3-4 Detection in pre-fuse test on wafer level

5-6 Undetectable on wafer level but detection by BE tests

7 Detection by internal qualification test

8 Detection with prolonged burn-in-time only

9 Detection by customer qualification test

10 Undetectable by production or qualification test

Dr. Preussger/wü
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 Detection ranking for different methods DFMEA (Software)

Ranking Detection internally

1-2 Detection by prototyping

3-4 Detection in verification test on subprogram level (unit)

5-6 Detection in verification test on program level (link testing)

7 Detection by internal qualification test of the whole system (system test)

8 Detection during customer acceptance testing (SEM-I P4)

9 Detection during test operation by customer (SEM-I P5)

10 Undetectable by any verification, acceptance or qualification test

Dr. Preussger/wü
CQM MT
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 Assessment Phase (3)

Current Controls Detectability

(D)

Update
Occurrence
(O)
Risk Calculation

List the controls for Check if preventive

prevention (P) or controls require an
detection (D) update of O
Dr. Preussger/wü
CQM MT
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 Assessment Phase (3)

Current Controls Detectability

(D)

Update
Occurrence
(O)
Risk Calculation

For each potential fail-

effects-combination calculate
the OxD and the RPN number
if required

Dr. Preussger/wü
CQM MT
01/20/22
 Metric for Outgoing Quality (OxD-metric)

The probability that a defective product is delivered to the customer

is given by

P def = P0 x ER

ER: Escape Rate

P0: Probability that the failure occurs

In terms of FMEA this value is assessed by O x D.

Dr. Preussger/wü
CQM MT
01/20/22
 AOQ

Dr. Preussger/wü
CQM MT
01/20/22 P0
 Response Limit for Setting Measures (OxD-metric) (1)

Standards of the automotive industry* require that actions shall be

ranked in the order:

1) Severity
2) Occurrence
3) Detectability

This guarantees that high severity topics get the highest attention
within the improvement process (customer benefit) and that
production or design risks are addressed with highest priority.

This strategy is covered by the OxD metric which focuses on the

selection of high severity topics and uses OxD to generate the
pareto for the measures.

Dr. Preussger/wü

*SAE J-1739
CQM MT
01/20/22
 Response Limit for setting measures (OxD-metric) (2)

Measures shall be set as result of an assessment within an FMEA if

A) Severity is very high and AOQ is higher than 50% of the critical
value
S  9 and O x D > Pcrit / 2

Example: AOQ target = 10ppm  Pcrit = 24

S  9 and O x D > 12 (RPN  108)

B) Occurrence is very high (O  8 and S > 3)

Reason: If O is in the range of some 10% it should be checked

whether this is a deviation or a wider spec range.

Compensation of high occurrences with high detectability should be

Dr. Preussger/wü
CQM MT
avoided.
01/20/22
 Response Limit for setting measures (OxD-metric) (3)

Measures shall be set as result of an assessment within an FMEA if

C) AOQ is higher than critical probability limit and severity is high

O x D > Pcrit and S  7

Summary of OxD metric

Measures shall be set if

S = 9,10 and O x D  Pcrit / 2 OR

S = 7,8 and O x D  Pcrit OR
S > 3 and O  8

Dr. Preussger/wü
 The 3 conditions were coded into the FMEA template – violations
CQM MT
are highlighted automatically.
01/20/22
 OxD-Metric for S= 9 , 10 (Pcrit=10)
1 O 10
1                    

                   

                   

                   

                   
D
                   

                   

                   

                   
10
Dr. Preussger/wü                    
CQM MT
01/20/22
 OxD-Metric for S = 7 , 8 (Pcrit=10)
1 O 10
1                    

                   

                   

                   

                   

D
                   

                   

                   

                   

10                    
Dr. Preussger/wü
CQM MT
01/20/22
 Measures(1)

From FMEA From FMEA

Assessment Assessment
SubsystemA SubsystemB

AOQ-Pareto
Generate OxD paretos grouped
in severity classes
Check-Pareto

Apply Rules for

Response Limit Check OxD paretos for
consistency

Dr. Preussger/wü
CQM MT
01/20/22
 Example RPN-Pareto
300

250

200
RPN

150

RPNcrit=100
100

50

0
1 5 9 13 17 21 25 29 33 37 41 45 49 53 57 61 65 69 73 77 81 85 89 93 97 101 105 109 113
Dr. Preussger/wü
CQM MT
01/20/22
 Example OxD-Pareto for S=9,10
25

20

15
OxD

10
Pcrit/2=9

0
1 2 3 4 5 6
Dr. Preussger/wü
CQM MT
01/20/22
 Example OxD-Pareto for S=7,8
35

30

25

20
Pcrit=18
OxD

15

10

0
1 3 5 7 9 11 13 15 17 19 21 23 25 27 29 31 33 35 37 39 41 43 45 47 49 51 53 55 57 59 61 63 65 67 69 71 73 75 77 79 81 83 85 87
Dr. Preussger/wü
CQM MT
01/20/22
 Example OxD-Pareto for S=4-6

20

18
check
16

14

12
OxD

10

0
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16
Dr. Preussger/wü
CQM MT
01/20/22
 AOQ-Paretos
 Generated according to the OxD values and grouped in severity
classes:
– low (S=1-3) : Check highest OxD values
– moderate (S=4-6) : Response limit B shall be applied Check
highest OxD values
– high (S=7,8) : Response limit C and B shall be applied
– very high (S=9,10) : Response limit A shall be applied

 Priority for the measures are:

– 1) S very high and AOQ>Pcrit/2
– 2) S high and AOQ>Pcrit
– 3) For further improvement S moderate, high or very high ranked
according to RPN

Dr. Preussger/wü
CQM MT
01/20/22
 Measures(2)
Measures should be
clustered and checked for
their effect on lower risk
Define + cluster
Measures failures

Check Potential
Each measure shall be
Effect analyzed for it’s effect on
the risk numbers
Check Improvement

Assess the effect of the

measure after implementation
Update FMEA
New Risk
Assessment

Dr. Preussger/wü
CQM MT
01/20/22
 Agenda
 Introduction
 Status of QM-Tool
 Team
 General Flow
 Options for assessment metrics
 Definition of assessment criteria
 Response Limits for setting measures
 Support Tools
 FMEA template

Dr. Preussger/wü
CQM MT
01/20/22
 Support Tools

 Tool to calculate Pcrit

– Supports target setting
 Template T07
– To be used for all IFX FMEAS

Dr. Preussger/wü
CQM MT
01/20/22
 Agenda
 Introduction
 Status of QM-Tool
 Team
 General Flow
 Options for assessment metrics
 Definition of assessment criteria
 Response Limits for setting measures
 Support Tools
 FMEA template

Dr. Preussger/wü
CQM MT
01/20/22
 Template T07

Microsoft Excel
Worksheet

Dr. Preussger/wü
CQM MT
01/20/22