Scanning Electron

Microscope
(SEM)
Presented By:
Muhammad Qasid
Presented To:
Dr.Islam Ullah Khan
Class & Roll No:
820 M.Phil Chemistry
Section : B1
 Content Layout
• Introduction
• History
• Basic Components
• Working Principle
• Applications
• Advantage and disadvantage
 What is SEM
• A Scanning Electron Microscope is an instrument that
investigates the surfaces of solid samples by using a
beam of electrons in a vacuum.

• The image is generated by the secondary emissions from

the sample.
 History

•In 1935, the original prototype of the SEM,

was made by Knoll(Germany).
•In 1942, Zworykin (USA), developed a
SEM for observing a bulk specimens.
•In 1965, Cambridge Scientific Instrument
(UK) & JOEL (Japan) first commercialized
SEM individually.
Basic Components
• Electron Gun
• Condenser Lenses
• Objective Aperture
• Objective Lenses
• Scan Coils
• Chamber
• Detectors
• Image Display Unit
Basic Components of SEM
 Electron Gun
• Produces e- beam Generally of two types:
• A) Thermionic Emission Gun
• B) Field Emission Gun
• Thermo electrons emitted from a filament
(cathode) made of a thin tungsten wire, (about
0.1 mm) by heating the filament at high
temperature (about 2800k).
• Speed and direction adjusted through a hole and
electrode.
 Condenser lense
• Adjusts the diameter of the
electron beam.
• Made of magnets capable of
bending the path of
electrons.
• Controls the path and
destination of electron
 Objective Aperture and Lenses
 Aperture:
• Fits above the objective lens.
• A metal rod holding a thin plate of
metal containing four holes.
• Aperture strip carries holes of
different size.
• Stops electrons that are off-axis or
off- energy from progressing down
the column.
 Lenses:.Used for focusing.
 Scan Coils
Consist of two solenoids oriented in such a
way as to create two magnetic fields
perpendicular to each other.
Varying the current in one solenoid causes the
electrons to move left to right.
Varying the current in the other solenoid forces
these electrons to move at right angles to this
direction (left to right) and downwards.
 Chamber
 Specimens to examine are placed here.
 Structure is very sturdy and insulated
from vibration.
 Adjusts the angle and direction of
specimen to avoid re-mounting.

Detectors
• Are called “the eyes” of SEM.
• Detect the various ways that the
electron beam interacts with the
sample object.
• Most used detector inside the SEM is
secondary electron detector.
 Image Display unit
Output of SEM
 Scanning on the display unit is
synchronized with the electron-
probe scan, brightness variation,
which depends on the number of
the secondary electrons.
 Fast speed is used for observation
and a slow scan speed is used for
saving of image.
 Image is recorded in a digital
format.
Sample Characteristics
• Topography: Surface features ,
texture.
• Morphology: The shape and size
of the particles constructing
object.
• Composition: The elements and
compounds that the object is
composed of and the relative
amounts of them.
• Crystallographic Information:
How the atoms are arranged in
the object.
 Working Principle
Beam generation
Hot cathode source
left on their own, the cloud is re-
absorbed by the tube when the
current is removed
Scanning.The beams needs to SCAN the
sample, not PASS through them.
Scan Generators:.
Scan Coil
CRT
Scattering range depends on:,
Arcs!!!!
Electron energy (~)
Atomic number
The density of the constituent atom.
 Applications
 Detection and analysis of surface fractures.
 Examination of surface contaminations.
 Providing information in microstructures.
 Revelation of spatial variations in chemical compositions.
 Identification of crystalline structures.
 Wide usage in life science, biology, gemology, medical, forensic science and
metallurgy.
 Semiconductor inspection
 Assembly of microchips
Advantages and Disadvantages

Advantages Disadvantages
Wide-array of applications.  Expensive
Gathering of versatile  large
information.  Sensitivity towards electric,
User-friendly operation. magnetic or vibration
Generation of data in digital interference
form.  Requirement of special
Minimal preparation actions. training
Ultra-speed capacity  Limitation to solid, inorganic
samples