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Electric Actuator Valve Report
Electric Actuator Valve Report
1. Field Issue 현황
2. Concept & System
3. Control Valve Spec 비교
4. Test Concept & System
5. Lab Test Result
유니셈 주식회사
1
1. Field issue 현황 Speed & Quality, 도전 No1
200
146
150
83
52 100
46
38
16 13 50
4 1 1
1 1
0
HEATER FAIL
CHECK VALVE
FLEXIBLETUBE
비저항 SENSOR
PRE SENSOR
냉매 LEAK
COOLANT 오염
PUMP FAIL
기타
EEV 교체
COMP 결빙
FLOW METER
공정별 설비 현황 공정별 주력 모델
110 60%
ME- 연구 2,063
50%
446 LSI 1,504
40%
ETCH, CVD : 95% 577
30% 355
20%
3.290 Memory 113
10% SPUT
165 29
57 ETCH CVD DIFF
0
ETCH CVD DIFFSION SPUTTER RCS2500A PCS6000A RCS6000A CED3030A
사업부별
2
2. Concept & System Speed & Quality, 도전 No1
현재 , 열 교환기 System
Exp V/V
PCW In
Load Chuck
HEX
PCW Out
Coolant
Pump
Coolant
PCW
개선 Proposal Valve
Chiller Scope
3
3. PCW Valve Spec 비교 Speed & Quality, 도전 No1
주요 Spec 비교
형상
4
3. PCW Valve Spec 비교 Speed & Quality, 도전 No1
장 , 단점 분석
형상
5
3. PCW Valve Spec 비교 Speed & Quality, 도전 No1
Valve Inlet
Outlet
6
3. PCW Valve Spec 비교 Speed & Quality, 도전 No1
30 30 30
25 25 25
20 20 20
Flow(LPM)
Flow(LPM)
Flow(LPM)
특 성 15 15 15
곡 선 10 10 10
5 5 5
0 0
0
13.6
17.2
10.0
11.2
12.4
14.8
16.0
18.4
19.6
10.0
11.2
12.4
13.6
17.2
18.4
19.6
14.8
16.0
4.0
5.2
6.4
7.6
8.8
4.0
5.2
6.4
7.6
8.8
109
121
133
145
157
13
25
73
85
37
49
61
97
1
Signal (mA) Signal (mA) Signal (mA)
. 부하 변화에 따른 개도 조절
. 압력 변화에 민감하지 않음 . 부하 변화에 따른 개도 조절
. 순간적인 부하대응에 빠름
. 1 개 또는 2 개의 Valve 설치로 모든 . 압력 변화에 민감하지 않음
. 압력 변화에 민감함 영역
. 1 개의 Valve 설치로 모든 영역의
. 이 물질에 취약함 , 오 동작을 유발 의 온도제어가 가능 온도제어
. PID 최적화 필요 . Pulse 로 인한 자동 제어 ( 0~500 Ste 가능
p) . Pulse 로 인한 자동 제어 ( 0~500 Step )
특 . Fitting 사용으로 인한 LEAK POINT 증가
. Lamping Up & Down Time 이 우수
. Lamping Up & Down Time 이 우수
징 . 정밀적인 제어 대응을 위한 Calibration
. Auto tuning 가능 Program . Auto tuning 가능 Program 으로 처리
이 필요함 . 밸브 오리피스 작음 . ( 최대 Φ3.2)
. 조절 Valve Type : V 형 Ball valve
. PCW 압력 변화 발생시 구동부가 밀리서 . PID 최적화 필요
. 유체 통과 유로 넓어 이 물질 대응력 강화
공급되는 PCW 의 공급량이 증가하여 온도 . 공정에 따른 Step 값 최적화 필요함 . . 저항 발생에 대한 조작력 강함
헌팅 유발 . 제어 Program 이 타 V/V 에 비하여 . V 형 Ball Valve 구동에 의한 유량 조절
복잡함 ( 이 물질 대응력 강력함 , 오일 , 물때등 )
7
3. PCW Valve Spec 비교 Speed & Quality, 도전 No1
20
Burkert
EAV (1,500Step 용 )
Flow(LPM)
15 0.02LPM/Step
기개발품
EAV (500Step 용 )
0.05LPM/Step
10
EEV
1EA : 0.02LPM/Step
2EA : 0.04LPM/Step
5
개도율
8
3. PCW Valve Spec 비교 Speed & Quality, 도전 No1
12
8
EEV
F l o w(LPM )
1EA : 0.02LPM/Step
6
4
EAV (1,500Step 용 )
2 0.02LPM/Step
0
10.0
10.4
10.8
11.2
11.6
12.8
13.2
13.6
14.4
14.8
15.2
15.6
16.0
16.8
17.2
17.6
18.0
18.4
18.8
19.6
20.0
4.0
4.4
4.8
5.2
5.6
6.0
6.4
6.8
7.2
7.6
8.0
8.4
8.8
9.2
9.6
12.0
12.4
14.0
16.4
19.2
S i g n a l (mA )
9
3. PCW Valve Spec 비교 Speed & Quality, 도전 No1
30
25
20
EAV (500Step 용 )
F l o w(LPM )
0.05LPM/Step
15
10
EEV
5 2EA : 0.04LPM/Step
0
6.0
10.4
12.4
12.8
13.2
13.6
15.2
15.6
16.0
17.6
18.4
4.0
4.4
4.8
5.2
5.6
6.4
6.8
7.2
7.6
8.0
8.4
8.8
9.2
9.6
10.0
10.8
11.2
11.6
12.0
14.0
14.4
14.8
16.4
16.8
17.2
18.0
18.8
19.2
19.6
20.0
S i g n a l (mA )
10
3. PCW Valve Spec 비교 Speed & Quality, 도전 No1
-. Cover
: Control Board 와 일체형 type 으로 낙수 방지 및 내부
보호
-. Motor
: 60Hz 시 600RPM 을 회전하는 구동용 Motor
-. Gear Unit
: Motor 의 회전력을 적정한 감속비로 변환하여 필요한
Torque 를 발생 시키는 부분
11
4. Test Concept & System Speed & Quality, 도전 No1
Compressor -
Pump 2.2kw
Heater 4.5kw
Coolant FC3283
냉매 R-404a
Coolant -
Flow rate
PCW 20±2℃, 20LPM, 3kg/ ㎠
12
4. Test Concept & System Speed & Quality, 도전 No1
13
4. Test Concept & System Speed & Quality, 도전 No1
Test 조건
-. PCW Temp : 20℃
-. PCW 유량 : 15~20LPM
AC208V, 50A
ad
Lo k
h uc
C
k W)
3) 1
328 (1
Notebook ( FC
t u rn
e 3)
n tR 28
ola (F
C 3
Co ly
pp
Su
nt
ola
Co
PCW Return
PCW Supply
14
4. Test Concept & System Speed & Quality, 도전 No1
Coolant 압력 / 유량 . Coolant 압력 / 유량 .
-SV : 45℃ -SV : 75℃, 60℃
- Coolant 유량 / 압력 : 8 LPM, 1.8 kg/cm2 - Coolant 유량 / 압력 : 8 LPM, 1.8 kg/cm2
0W 0W
10 min 10 min 10 min 10 min
15
5. Lab Test Result (EEV) Speed & Quality, 도전 No1
100.0 300
95.0 280
90.0
260
85.0
240
80.0
75.0 220
70.0 Sup Temp Ret Temp Pcw Flow 200 Pcw Pressure Pcw Temp
TEMP [℃]
65.0 180
60.0
48.0 160
55.0 47.8 125
50.0
47.6 140
47.4 115
45.0 47.2 120
47.0
40.0
46.8
100 105
35.0 46.6 80
46.4 95
30.0
46.2 60
25.0 46.0 85
20.0
45.8 40
45.6 75
20
TEMP [℃]
15.0 45.4
10.0
45.2 0 65
시각 15:09:24 15:16:49 15:24:14 1 45.0
5:31:39 15:39:04 15:46:29 15:53:54 16:01:19 16:08:44
44.8
44.6 55
Time [h:m:s]
44.4
44.2 45
44.0
43.8 35
43.6
43.4 25
43.2
43.0
42.8 15
42.6
42.4 5
42.2
42.0 -5
시각 15:09:24 15 : 1 6 : 4 9 1 5 : 2 4 : 14 1 5: 3 1 :3 9 15 : 39 : 0 4 1 5 :4 6 : 2 9 1 5 : 5 3: 5 4 1 6 : 01 : 1 9 16:08:44
Time [h:m:s]
16
S u ppl y , R e t u r n [ ℃ ]
100.0
10.0
15.0
20.0
25.0
30.0
35.0
40.0
45.0
50.0
55.0
60.0
65.0
70.0
75.0
80.0
85.0
90.0
95.0
14:50:00
14:52:38
14:55:15
14:57:52
15:00:29
15:03:06
15:05:43
Return
15:08:20
15:10:58
15:13:35
15:16:12
15:18:49
Supply
15:21:26
5. Lab Test Result (EAV)
15:24:03
15:26:41
42.0
42.2
42.4
42.6
42.8
43.0
43.2
43.4
43.6
43.8
44.0
44.4
44.6
44.8
45.0
45.2
45.4
45.6
45.8
46.0
46.2
46.4
46.6
46.8
47.0
47.2
47.4
47.6
47.8
48.0
15:29:18
14:50:00 15:31:55
14:52:19 15:34:32
14:54:38 15:37:09
Inside Temp
14:56:57 15:39:46
14:59:16
4 4 . 2 T i me[h :m:s ]
15:42:23
15:01:35
15:45:00
15:03:54
15:47:38
15:06:13
15:50:15
Heating
15:08:32
15:52:52
15:10:50
15:55:29
17
15:13:09
15:58:06
15:15:28
SV 45℃, 9000W
15:17:47
16:00:43
16:03:21
Cooling
15:20:06
15:22:25 16:05:58
15:24:44 16:08:35
15:27:03 16:11:12
15:29:22 16:13:49
Return
15:31:41 16:16:26
PCW Flow
15:34:00 16:19:03
15:36:19 16:21:40
15:38:37
y
15:40:56
Time[h:m:s ]
0.0
5.0
-5.0
10.0
15.0
20.0
25.0
30.0
S u p p l 35.0
40.0
45.0
50.0
55.0
60.0
65.0
70.0
75.0
80.0
15:43:15
-10.0
15:45:34
15:47:53 H e a t i n g , C o ol i n g , T a n k - In si de [ ℃ ]
15:50:12
15:52:31
Inside Temp
15:54:50
15:57:09
15:59:27
16:01:46
16:04:05
16:06:24
16:08:43
16:11:02
16:13:21
16:15:39
16:17:58
16:20:17
16:22:36
Speed & Quality, 도전 No1
S u ppl y, Re turn [℃]
10.0
15.0
20.0
25.0
30.0
35.0
40.0
45.0
50.0
55.0
60.0
65.0
70.0
75.0
80.0
85.0
90.0
95.0
100.0
17:29:58
17:32:42
17:35:27
17:38:11
17:40:55
17:43:39
17:46:24
17:49:08
17:51:52
Return
17:54:36
17:57:20
18:00:04
18:02:49
5. Lab Test Result (EAV)
Supply,
1 8 : 0Return
5 : 3 3 [℃]
Supply
1) Temp 안정화 평가 (1,500Step)
18:08:17
18:11:01
42.0
42.2
42.4
42.6
42.8
43.0
43.2
43.4
43.6
43.8
44.2
44.4
44.6
44.8
45.0
45.2
45.4
45.6
45.8
46.0
46.2
46.4
46.6
46.8
47.0
47.2
47.4
47.6
47.8
48.0
18:13:46
17:29:58
18:16:30
17:32:21
18:19:14
17:34:44
18:21:58
17:37:07
Inside Temp
4 4 . 0Time [h :m:s ]
18:24:43
17:39:30
18:27:27
17:41:53
18:30:11
17:44:16
18:32:55
17:46:39
18:35:40
17:49:01
Heating
18:38:24
17:51:24
18:41:08
18
17:53:47
18:43:53
SV 45℃, 9000W
17:56:10
17:58:33 18:46:37
18:00:56 18:49:21
Cooling
18:03:19 18:52:06
18:05:42 18:54:50
18:08:05 18:57:34
18:10:28 19:00:19
Return
18:12:51 19:03:03
18:15:14 19:05:47
18:17:37
0.0
18:20:00
10.0
20.0
30.0
40.0
50.0
60.0
70.0
80.0
90.0
S u p p ly
100.0
110.0
120.0
130.0
140.0
150.0
160.0
170.0
180.0
190.0
200.0
Time[h:m:s ] 18:22:23
18:24:46
H eat ing, C ool i ng, Tank-Insi de [℃]
18:27:09
18:29:32
18:31:55
18:34:18
I n s i d e T e mp
18:36:41
18:39:04
18:41:27
18:43:50
18:46:13
18:48:36
18:50:59
18:53:22
18:55:45
18:58:08
19:00:31
19:02:54
19:05:17
Speed & Quality, 도전 No1
5. Lab Test Result (EEV) Speed & Quality, 도전 No1
100.0 80
95.0
90.0 70
85.0
80.0 60
75.0
70.0 50
65.0
TEMP [℃]
Time [h:m:s]
19
S u ppl y , Re t u rn [℃]
20.0
25.0
30.0
35.0
40.0
45.0
50.0
55.0
60.0
65.0
70.0
75.0
80.0
85.0
90.0
95.0
100.0
12:55:57
12:58:41
13:01:25
13:04:09
13:06:53
13:09:37
13:12:22
Return
13:15:06
13:17:50
13:20:34
13:23:19
13:26:03
Supply
13:28:47
5. Lab Test Result (EAV)
13:31:31
1) Temp 안정화 평가 (500Step)
13:34:16
13:37:00
Supply, Return
1 3 : 3 9[℃]
:44
13:42:28
Ti me7[h
Inside Temp
13:45:13
72.0
72.2
72.4
72.6
72.8
73.0
73.2
73.4
73.6
73.8
74.0
74.2
74.4
6
74.8
75.0
75.2
75.4
75.6
75.8
76.0
76.2
76.4
76.6
76.8
77.0
77.2
77.4
77.6
77.8
78.0
13:47:57
4 .:m:s
12:55:57
]
13:50:41
12:58:22
13:53:25
13:00:47
13:56:10
13:03:12
Heating
13:05:36
13:58:54
13:08:01 14:01:38
13:10:26 14:04:23
13:12:51 14:07:07
20
13:15:16 14:09:51
Cooling
SV 75℃, 2200W
13:17:41 14:12:35
13:20:06 14:15:20
13:22:31 14:18:04
13:24:56 14:20:48
13:27:21 14:23:32
13:29:46 14:26:16
PCW Flow
13:32:11 14:29:01
13:34:36
14:31:45
13:37:01
Return
13:39:26
0.0
5.0
10.0
15.0
20.0
25.0
30.0
35.0
40.0
45.0
50.0
55.0
60.0
65.0
70.0
75.0
80.0
13:41:51
13:44:16
H e ati ng, C ooli ng, Tank-Insi de [℃]
13:46:41
Supply
13:49:06
Time[h:m:s ]
13:51:31
13:53:56
13:56:21
13:58:46
14:01:11
Inside Temp
14:03:36
14:06:01
14:08:26
14:10:51
14:13:16
14:15:41
14:18:06
14:20:31
14:22:56
14:25:21
14:27:46
14:30:11
14:32:35
Speed & Quality, 도전 No1
Supply, Ret urn [℃]
20.0
25.0
30.0
35.0
40.0
45.0
50.0
55.0
60.0
65.0
70.0
75.0
80.0
85.0
90.0
95.0
100.0
11:19:00
11:21:57
11:24:53
11:27:49
11:30:44
11:33:39
11:36:34
1Supply,
1 : 3 9 : 3 0 Return [℃]
11:42:27
Return
11:45:23
72.0
72.2
72.4
72.6
72.8
73.0
73.2
73.4
73.6
73.8
74.0
74.2
74.4
74.6
74.8
75.0
75.2
75.4
75.6
75.8
76.0
76.2
76.4
76.6
76.8
77.0
77.2
77.4
77.6
77.8
78.0
11:48:20
11: 19: 0 0 11:51:16
5. Lab Test Result (EAV)
Ti me [h:m:s ]
11: 42: 12 12:17:44
11: 44: 47 12:20:40
11 :47 :22 12:23:37
11: 4 9: 57 12:26:33
12:29:30
21
11 :52 :32
Heating
12:32:26
SV 75℃, 2200W
11: 55: 0 7
12:35:23
11: 57: 4 2
12:38:19
12: 00: 1 8
12:41:15
12: 02: 5 3
Return
12:44:12
1 2:0 5:28
Cooling
12:47:08
12: 08: 03
12:50:05
1 2:10 :38
12:53:01
12: 13: 13
12:55:57
Supply
12: 15: 48
Ti me [h:m:s ]
12:58:54
12: 18: 24
13:01:50
12: 2 0: 59
12: 23: 3 4
0.0
5.0
10.0
15.0
20.0
25.0
30.0
35.0
40.0
45.0
50.0
55.0
60.0
65.0
70.0
75.0
80.0
12: 26: 09
1 2:2 8:44 Heating, C ooling, Tank-Inside [℃]
Inside Temp
1 2:31 :19
12: 33: 54
12 :36 :30
12: 39: 0 5
12: 41: 4 0
1 2:4 4:15
1 2:4 6:50
1 2:4 9:25
12 :52: 00
12: 54: 35
12: 57: 10
12: 59: 46
13: 02: 21
Speed & Quality, 도전 No1
Temp [℃]
(EEV)
30
35
40
45
50
55
60
65
70
EEV 적용
21:42:00
S V : 55℃
21:42:22
부하 : 11, 000W
21:42:44
21:43:06
21:43:28
21:43:50
1) Temp 안정화 평가
21:44:12
21:44:34
21:44:56
21:45:18
공급온도
21:45:40
Temp [℃]
5. Lab Test Result (EAV)
21:46:02
48.5
49.5
50.5
51.5
52.5
53.5
54.5
55.5
56.5
57.5
48
49
50
51
52
53
54
55
56
57
58
EEV 적용
21:46:24
S V : 55℃
21:48:56 21:46:46
21:49:06
부하 : 11, 000W
21:47:08
반환온도
21:49:16
21:49:26 21:47:30
21:49:36 21:47:52
21:49:46 21:48:14
21:49:56 21:48:36
21:50:06
21:48:58
21:50:16
Time [ h :m:s ]
21:49:20
Ta nk Ins id e
21:50:26
21:49:42
공급온도
21:50:36
22
21:50:46 21:50:04
21:50:56 21:50:26
EEV 경향 Te s t Da ta ( P C S 8000A)
21:51:06
21:50:48
21:51:16
C o o lin g
반환온도
21:51:26 21:51:10
21:51:36 21:51:32
21:51:46 21:51:54
21:51:56
21:52:16
21:52:06
21:52:38
He a tin g
21:52:16
Time [ h:m:s ]
Ta n k Ins id e
21:52:26 21:53:00
21:52:36 21:53:22
21:52:46 21:53:44
EEV 경향 Te s t Da ta ( P C S 8000A)
21:52:56 21:54:06
21:53:06
C o o lin g
21:54:28
21:53:16
21:53:26 21:54:50
0
21:53:36
20
40
60
80
100
120
140
160
180
200
21:53:46
He a tin g
21:53:56 [%]
21:54:06
21:54:16
21:54:26
21:54:36
21:54:46
21:54:56
0
20
40
60
80
SV 55℃, 12000W, PCW 압력 : 3.5Bar
100
120
140
160
180
200
[%]
Speed & Quality, 도전 No1
Te mp [ ℃]
40
45
50
55
60
65
11:33:00
11:33:46
11:34:33
11:35:20
SV
11:36:06
11:36:53
11:37:39
Te mp [ ℃]
11:38:26
48.5
49.5
50.5
51.5
52.5
53.5
54.5
55.5
56.5
57.5
48
49
50
51
52
53
54
55
56
57
58
11:39:13
S V : 55℃
공급온도
11:45:03
Mo t o r V a lv e
11:39:59
11:45:28
부하 : 1 1 , 0 0 0 W
11:40:45
5. Lab Test Result (EAV)
11:45:52
11:41:32
11:46:16
11:42:18
11:46:40
1) Temp 안정화 평가 (EAV 500Step)
반환온도
11:47:04
11:43:04
11:47:28
11:43:50
11:47:52
11:44:37
11:48:16
11:45:24
11:48:40
11:46:10
공급온도
11:49:04
11:46:56
11:49:28
Ta nk Ins id e
11:47:42
11:49:52
Tim e [ h:m :s ]
11:48:28
23
11:50:16
11:49:14
11:50:41
반환온도
11:50:00
11:51:05
11:51:29
11:50:47
C o o ling
11:51:53
11:51:33
Mo to r Va lve 경향 Te s t Da ta ( P C S 8000A)
11:52:17
11:52:19
11:52:41
11:53:05
압력
Time [ h :m:s ]
11:53:05
11:53:51
Ta n k In s id e
11:53:29
11:54:38
11:53:53
11:55:24
11:54:18
유량
11:54:42
11:56:10
Mo to r Va lve 경향 Te s t Da ta ( P C S 8000A)
11:56:56
11:55:06
C o o lin g
11:57:42
11:55:30
11:58:28
11:55:54
11:56:18
11:59:14
He a tin g
11:56:42
12:00:00
He a tin g
11:57:06
12:00:47
11:57:30
0
20
40
60
80
100
120
140
160
180
200
11:57:54
11:58:18
11:58:42
11:59:06
0
20
40
60
80
SV 55℃, 12000W, PCW 압력 : 3.5Bar
100
120
140
160
180
200
[ %]
Speed & Quality, 도전 No1
S u ppl y , Re t u rn [℃]
20.0
25.0
30.0
35.0
40.0
45.0
50.0
55.0
60.0
65.0
70.0
75.0
80.0
85.0
90.0
95.0
100.0
12:55:00
12:56:48
12:58:37
1) Ramping Up/Down
13:00:25
5. Lab Test Result
13:02:14
13:04:02
13:05:51
13:07:39
13:09:28
13:11:16
Return
13:13:04
13:14:53
13:16:41
13:18:30
13:20:18
Supply
13:22:07
13:23:55
13:25:44
24
13:27:32
13:29:21
Ti me [h :m:s ]
13:31:09
Inside Temp
13:32:57
13:34:46
Ramping Up/Down (30~90℃)
13:36:34
13:38:23
9Min
13:40:11
Heating
13:42:00
13:43:48
13:45:37
13:47:25
13:49:14
Cooling
13:51:02
13:52:51
13:54:39
13:56:28
13:58:16
0.0
5.0
10.0
15.0
20.0
25.0
30.0
35.0
40.0
45.0
50.0
55.0
60.0
65.0
70.0
75.0
80.0
85.0
90.0
95.0
100.0
105.0
110.0
115.0
120.0
Test
Graph
25
5. Lab Test Result Speed & Quality, 도전 No1
12min
9min
Test
Graph
온도 조건 30℃ ~90℃ 상승 , 하강
제어 Supply Control
26
5. Lab Test Result Speed & Quality, 도전 No1
Test
On/Off 반복 Cycle 구동시 ,
27
5. Lab Test Result Speed & Quality, 도전 No1
PCW In
보온재 강제적용
Test
28