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Low Temperature Plasma Sterilizer

Vacuum System

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Contents

 Definition of Vacuum
 Vacuum Diagram
 Pump & Oil Mist Trap
 Pressure Gauge

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Vacuum Definition

 A vacuum is a space in which the pressure is

below atmospheric pressure

 Standard unit
mmHg, Torr, Pa (N/m2), mbar
1mmHg = 1torr = 133.322Pa

1atm(atmospheric pressure) = 760 mmHg = 760 Torr = 1013 mbar = 100,133 Pa = 100 Kpa
1 Torr = 1.33 mbar = 133 Pa
100 mTorr = 10-1 Torr = 0.133 mbar = 13.3 Pa

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Vacuum Diagram

Chamber Vacuum Gauge

Vacuum
Main Board
Valve

Rotary Pump Touch Display

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Rotary Pump

Oil-refill Cap

Oil Return Line

Maximum Oil-level Mark

Minimum Oil-level Mark

Oil-drain Cap

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Rotary Pump

Caution

. Before beginning with any maintenance or service, disconnect the pump

from all power supplies.

. Hazardous substances may escape from the pump and oil.

. Take adequate safety precautions. Wear gloves, face protection

or breathing protection.

. Do not operate the pump that had covers removed.

When disposing of used oil, you must observe the applicable

environmental regulations in your country!

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Pump Oil

Oil Type : Mineral Oil

Oil Checking : Visual Checking
Color : Transparent → Red(brown)&Turbid,
Level : Enough oil Level
Oil Capacity : 1Liter (change: 0.9~1.0 L)
Oil Check : Every 3 month
Oil Change : Every 600 cycles.

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Oil Change

 Check the Oil Level and Color

→ Oil change
 Check the Filter on the pump

Visual Check
Normally the oil is clear and transparent white.

 If the oil get brown or Red, it should be changed.

 Oil Level is between in Min and Max Level.

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Oil Mist Filter and Carbon Filter

Mist Trap checking : Visual & Smell

→ Get dark on the trap or Smoke
Mist Trap change : Every 600 cycles.
Mist Trap check : Every 3 month

Oil Mist Filter Carbon Filter

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How to change Pump Oil

1. Change

1. Unscrew Oil refill Cap 2. Put oil extractor tube into pump and then work extractor
to suck out used oil.

2. Refill

1. Put funnel into oil inlet hole and pour new oil.

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How to change carbon filter and oil mist filter

1. Carbon Filter

-Remove the used filter with a straight and then put a new one to push strongly connecting to the opening of oil mist filter.

2. Oil Mist Filter

Oil Mist Filter Cap

Oil Mist Filter Housing

1. Open the oil mist filter cap and take out the used filter. Next Chapter

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How to change carbon filter and oil mist filter

Oil Mist Filter Housing

2. Place new filter into filter housing and then close cap tightly.

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