“Like air and “If you think

TO THE PRESENTATION that the internet

drinking water,
ON has changed
being digital will your life, think
be noticed only by again. The
its absence, not its Internet of
presence.” – Things is about
to change it all
over again!” –
Nicholas
Negroponte Brendan O’Brien
TRANSPORT
IoT

Health
care
 W H AT I S M E M S ?
The one main criterion of
MEMS stands for Micro-Electro MEMS is that there are at
Mechanical system. It is a miniature least some elements having
ALIAS - some sort of mechanical
machine that has both mechanical Microsystems technology functionality whether or not
and electronic components.  (MST), these elements can move.
“Microsystems
Technology” or
MEMS devices “micromachined devices”
generally range Because some MEMS Because of the large surface area to
in size from 20 devices convert a volume ratio of MEMS, forces
micrometers to a measured mechanical produced by ambient 
millimeter. signal into an electromagnetism (e.g., electrostatic
electrical or optical charges and magnetic moments), and
signal, they may also fluid dynamics (e.g., surface tension
be referred to as   and viscosity) are more important
transducers. design considerations than with larger
scale mechanical devices.
 HOW ARE MEMS CONSTRUCTED ?

MEMS are composed of parts such as micro sensors, microprocessors, micro

actuators, units for data processing and parts that can interact with exterior
pieces.  

MEMS have a low per device production cost, packaging can be a challenge.
Each MEMS should be packaged so that the electrical and the optical circuitry
and other device components remain free for air or water contamination while
still being in contact with the physical environment.

MEMS are often manufactured with the same batch fabrication techniques used to create
integrated circuits (ICs) and many commercial MEMS products are integrated and packaged
together with ICs.

Materials used for MEMS manufacturing are - Silicon, Polymers, Metals &
Ceramics.
MEMS manufacture involves basic processes such as Deposition processes, Patterning, Lithography,
Etching processes, Sputtering and Die preparation.
 The term MEMS was introduced in the year 1965.

The first ever device using MEMS was developed by Harvey

Nathanson which was called as Resonant Gate Transistor(RGT).

One of the first few types of MEMS produced were for air-bag
controllers and inkjet printheads. In the late 1990s, a projector was
made using micromirrors(utilizes MEMS).

Gordon Moore and Richard Feynman predicted the

emerging technology of smaller and smaller
electromechanical systems.
 FUTURE OF MEMS
The MEMS market is year after year growing faster than the
average semiconductor industry.
The MEMS market is year after year growing faster than the
average semiconductor industry. Multi-sensor applications &
modules are playing an increasingly important role.

The most spectacular and at the same time extensive and interesting
usage scenario is perhaps biotechnology and medical technology.

The automotive industry is consequently one of the fields in which MEMS

sensor production and use are expected to grow most.

A further field in which using MEMS technology is being explored

is microphones. A MEMS microphone makes it possible, for instance, to
reduce the size of hands-free devices for mobile phones and to build
much smaller and more discrete aids specifically for people with hearing
problems.
 APPLICATIONS OF
MEMS
• MEMS sensors have been using wide range of its use in Accelerometers, Microphones,
gyroscopes, pressure roots, tilt sensors.

• Actuators such as MEMS switches, micro-pumps, micro-levers and micro-grippers are

blooming the market.

Today, everyone carries MEMS devices on themselves in the form of smartphones, smartwatches and fitness
trackers
• Smart homes, smart wearable devices, and huge growth in the automotive industry are some of the drivers that
are impacting the growth of this market. 

• In airborne, automotive, industrial, defense, mining, surveying, naval & marine — manned & unmanned in each
sector — these silicon MEMS accelerometers are redrawing market lines
 ADVANTAGES OF MEMS
• The manufacturing of MEMS is semiconductor IC manufacturing like low-cost mass
invention, consistency is also essential to MEMS devices.

• The size of sensor sub-components will be within 1 to 100 micrometers range as well as
the MEMS device size will determine 20 micro-meter to a millimeter range.

• Power consumption is very low.

• Simple to incorporate into systems or change.

• These can be highly opposed to shock, radiation, and vibration.

• Better thermal development tolerance and its thermal constant is small.

• Parallelism