Professional Documents
Culture Documents
Basic Design of The Cleanroom-1
Basic Design of The Cleanroom-1
1- Introduction
2- Sources of contamination:
6- Room Pressurization
7- Architectural Issues
8- Mechanical Considerations
9- Certification Requirements
Session Objective
Internal sources:
the potentially largest source is from people in a cleanroom, plus
the shedding of surfaces, process equipment, and the process itself.
People in the workspace generate particles in the form of skin
flakes, lint, cosmetics, and respiratory emissions. Other sources of
internal contamination are generated through manufacturing
processes.
Source Of Contamination
Clean Room Class Limits “not to exceed” particles per cubic meter (m3)
Class equal to or greater than the tabulated size
At rest* In operation**
Grade 0.5 µm 5.0 µm 0.5 µm 5.0 µm
A 3,520 20 3,520 20
B 3,520 29 352,000 2,900
C 352,000 2,900 3,520,000 29,000
D 3,520,000 29,000 Not defined Not defined
Source Of Contamination
Filter effectiveness:
The ability of the filter to remove particles from the air is
reflected by its efficiency rating. The American Society of
Heating, Refrigerating, and Air Conditioning Engineers
(ASHRAE) has developed a standard for measuring filter
effectiveness. The standard describes test procedures to
classify filters in terms of arrestance and efficiency. Two terms
are commonly used.
Filter effectiveness
n/a
≧98% at 0.3µm
Note :
1. AFI: American Filter Institute
2. NBS: National Bureau of Standards
3. ASHRAE: American Society of Heating Refrigerating & Air-conditioning Engineers
4. MERV: Minimum Efficiency Reporting Value 8. Am: Average Arrestance Efficiency for Coarse Filters
5. MPPS: Most Penetrating Particle Size 9. Em: Average Efficiency for Fine Filters
6. HEPA: High-Efficiency Particulate Air Filter 10. IEST: Institute of Environmental Sciences and Technology
7. ULPA: Ultra Low Penetration Air Filter
Filter testing
Filter testing:
The efficiency of the filter is of paramount importance and must be
measured in an appropriate way; the common methods of filter
testing include:
Filter testing
Pressurizing Limits:
Positive pressure must be maintained to ensure airflows from the
cleanest area to the less clean area. The idea is to inhibit the
infiltration of unfiltered air. The cleanest room is kept at higher
Air Flow Distribution and Control
pressure, with pressure levels decrease as cleanliness level
decrease. A differential pressure of 0.03 to 0.05
inches water gage (wg) is recommended between areas. Static or
active pressure control methods are used depending on tolerance.
Typical tolerance is ± 0.01 inches wg.
Room Pressurization
Makeup Air and Building Pressurization:
Many of the critical clean rooms have their own dedicated air conditioning
systems. While this is good design strategy, many of the installation rely
purely on the re-circulated system without paying much attention to
pressurization. Without Air
pressurization contaminant
Flow Distribution and Control can seep into these
sensitive rooms through cracks in wall and ceiling joints, cable and utility
penetrations, and space above drop ceilings and below raised floors.
Positive pressurization is the basis of assuring that uncontrolled and
untreated does not infiltrate the protected area. The ambient air (makeup
air) used to provide the positive pressurization must be treated to ensure
environment free of contaminants.
Room Pressurization
1) Room Construction:
Rooms should be constructed using smooth, monolithic,
cleanable, chip resistant materials with a minimum of joints and
seams, and no crevices
Air Flow or moldings.
Distribution and Control
Sheet vinyl and plastic or epoxy coated products shall be used.
All doors, panels, etc. should be flush mounted or use sloped
tops.
Architectural Issues
2) Flooring
Various types of flooring are used in clean rooms, depending on
cleanliness levels
Contamination control flooring may have a tacky finish to trap
dust and other debris from
Air Flow wheelsand
Distribution and shoes.
Control
Access flooring consists of solid or perforated panels or raised
pedestals. Air can flow through perforated panels and can be
exhausted in a subfloor area.
Vinyl flooring features sealed seams to prevent the accumulation
of contamination. This material is considered suitable for high-
quality manufacturing sites: class 100,000 thru class 10,000.
Architectural Issues
flow design.
The traditional gel grid approach, which is usually associated with a
pressurized plenum system or fan filter modules minimize and is
therefore a relatively low risk solution. The cost however is
prohibiting due to the extensive air delivery system (full coverage
filters, AHU’s, chilled water, etc.).
Architectural Issues
Static control
Shoe and glove cleaners
Appropriate gowning (type of clothing, proper changing rooms)
Validated sanitation
Air Flow Distribution and Control
Adequate transfer procedures for materials and personnel.
Mechanical Considerations
Other important HVAC considerations
Humidity Control: Clean room service is intended for critical application and
therefore humidity control is critical and takes precedence over temperature
control. The clean room HVAC design for latent’s load should consider the
high operational ambientAirwet bulb
Flow data, not
Distribution mean coincident dry-bulb data as
and Control
conventional HVAC designs.
The reliability and availability of the HVAC system is critical to the success
of the clean room manufacturing application. Typical design criteria is
Temperature: 18 to 24°C
RH: 50 to 60%
Fresh Air: 20% to 100% fresh air.
Mechanical Considerations
Noise Criteria
Noise is one of the major issues in clean room and the
design usually require high degree attenuation and use of
acoustic silencers.Air Flow Distribution and Control
Clean room design due to large requirements of airflow is
inherently noisy and requires a close attention to noise
control. Clean room noise can be attributed to three
primary sources:
Mechanical Considerations
Fan noise
Air flow turbulence
Process equipment
The first two sources may be addressed by the noise-control
Air Flow Distribution and Control
engineer during the design of the facility. The manufacturer
of equipment must handle reduction of the noise from
process equipment.
Acceptance Criteria
HEPA filters don’t last forever. Even ones that are supposedly
“permanent” will still need cleaning to remain effective, and it’s
possible to damage them during the cleaning process. To keep the air
clean, HEPA filters need to be replaced from time to time. How do
you know how muchAirtime each filter
Flow Distribution andhas? Well, there’s no specific
Control
time limit for HEPA filter life. They could last months or years. It’s all
about the environment they are in and how much cleaning they do.
Since lifespan isn’t based on time, to know when to replace your filter
you’ll have to have some HEPA filter testing done. First, let’s discuss
some basic signs you need new HEPA filters, then we’ll analyze how
the pros do the testing.
Group Discussions
What are the signs that the HEPA filter needs to be replaced?
Knowing the condition of your HEPA filters can be determined by
performing some basic inspection.
1. The Filter is Damaged
This seems fairly obvious, but it’s not something you’d see unless you
were looking for it. You might have noticed strange sounds coming
from the area around the filter, such as a high-pitched whistle. If your
HEPA filters are remotely located, you might not ever notice the sound.
A quick visual inspection can reveal whether your filters still have their
structural integrity, so it would be a good idea to set up a routine
schedule to check them out.
Group Discussions
Before the aerosol test can begin, however, the filter must have
an established “flow rate.” That way, it’s possible to tell whether
the airflow is too high or too low. Without that baseline rate, the
test is no better than guesswork. Once the baseline is established
and the test is complete,
Air Flowthe tech can
Distribution determine how large the
and Control
leak is. The FDA says that a penetration of just 0.01% is
a significant leak.
Group Discussions